Journal of Micromechanics and Microengineering
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
Inhaltsverzeichnis
- 025017
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Hot embossing of photonic crystal polymer structures with a high aspect ratioMauno Schelb / Christoph Vannahme / Alexander Kolew et al. | 2011
- 025001
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Measurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapseDaniel Peter / Michael Dalmer / Alfred Lechner et al. | 2011
- 025002
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Mechanics and scaling of thin part assembly at a fluidic interfaceKwang Soon Park / Xugang Xiong / Rajashree Baskaran et al. | 2011
- 025003
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Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze filmsRyan C Tung / Jin Woo Lee / Hartono Sumali et al. | 2011
- 025004
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Bidimensional codes recorded on an oxide glass surface using a continuous wave CO2 laserM R B Andreeta / L S Cunha / L F Vales et al. | 2011
- 025005
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Microchannel formation through Foturan® with infrared femtosecond and ultraviolet nanosecond lasersJ M Fernández-Pradas / D Serrano / J L Morenza et al. | 2011
- 025006
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A model for squeeze-film damping of perforated MEMS devices in the free molecular regimePu Li / Rufu Hu et al. | 2011
- 025007
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Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loopT Manzaneque / J Hernando-García / A Ababneh et al. | 2011
- 025008
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Microfluidics in silicon/polymer technology as a cost-efficient alternative to silicon/glassK Kalkandjiev / L Riegger / D Kosse et al. | 2011
- 025009
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Surface activation-based nanobonding and interconnection at room temperatureM M R Howlader / A Yamauchi / T Suga et al. | 2011
- 025010
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SU-8 serial MEMS switch for flexible RF applicationsTzu-Yuan Chao / M C Hsu / C-D Lin et al. | 2011
- 025011
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Fabrication of a normally-closed microvalve utilizing lithographically defined silicone micro O-ringsT Lemke / J Kloeker / G Biancuzzi et al. | 2011
- 025012
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Experimental analysis of the surface roughness evolution of etched glass for micro/nanofluidic devicesJ Ren / B Ganapathysubramanian / S Sundararajan et al. | 2011
- 025013
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Design and characterization of the immersion-type capacitive ultrasonic sensors fabricated in a CMOS processPo-Kai Tang / Po-Hsun Wang / Meng-Lin Li et al. | 2011
- 025014
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A thermal microjet system with tapered micronozzles fabricated by inclined UV lithography for transdermal drug deliveryYong-Kyu Yoon / Jung-Hwan Park / Jeong-Woo Lee et al. | 2011
- 025015
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A dynamic model for studying valveless electromagnetic micropumpsT X Dinh / N T M Le / V T Dau et al. | 2011
- 025016
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Viton-based fluoroelastomer microfluidicsG Sharma / L Klintberg / K Hjort et al. | 2011
- 025018
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Fabrication and evaluation of an on-chip liquid micro-variable inductorIssam El Gmati / Pierre Francois Calmon / Ali Boukabache et al. | 2011
- 025019
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Microvalve actuation with wettability conversion through darkness/UV applicationAli Gökhan Demir / Barbara Previtali / Massimiliano Bestetti et al. | 2011
- 025020
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The application of dry photoresists in fabricating cost-effective tapered through-silicon vias and redistribution lines in a single stepPradeep Dixit / Jaakko Salonen / Harri Pohjonen et al. | 2011
- 025021
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Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulationsN Ferrando / M A Gosálvez / J Cerdá et al. | 2011
- 025022
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Single pixel optical imaging using a scanning MEMS mirrorLi Li / Vladimir Stankovic / Lina Stankovic et al. | 2011
- 025023
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Superparamagnetic photocurable nanocomposite for the fabrication of microcantileversM Suter / O Ergeneman / J Zürcher et al. | 2011
- 025024
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The reflectivity, wettability and scratch durability of microsurface features molded in the injection molding process using a dynamic tool tempering systemSascha Kuhn / August Burr / Michael Kübler et al. | 2011
- 025025
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Experimental study of heat-treated thin film Ti/Pt heater and temperature sensor properties on a Si microfluidic platformD Resnik / D Vrtačnik / M Možek et al. | 2011
- 025026
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Residual-layer-free direct printing by selective filling of a mouldYu-Chih Kao / Franklin Chau-Nan Hong et al. | 2011
- 025027
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Comparison of parametric and linear mass detection in the presence of detection noiseZi Yie / Mark A Zielke / Christopher B Burgner et al. | 2011
- 025028
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A SOI-based CMOS-MEMS IR image sensor with partially released reference pixelsH Kwon / K Suzuki / K Ishii et al. | 2011
- 27001
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TECHNICAL NOTE: Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMSWang, Binglei et al. | 2011
- 027001
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Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMSBinglei Wang / Shenjie Zhou / Junfeng Zhao et al. | 2011
- 27002
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TECHNICAL NOTE: A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodesMaleki, T et al. | 2011
- 027002
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A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodesT Maleki / G Chitnis / B Ziaie et al. | 2011
- 027003
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Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layersL Bogunovic / D Anselmetti / J Regtmeier et al. | 2011
- 27003
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TECHNICAL NOTE: Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layersBogunovic, L et al. | 2011
- 027004
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Three-dimensional electrokinetic tweezing: device design, modeling, and control algorithmsRoland Probst / Benjamin Shapiro et al. | 2011
- 27004
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TECHNICAL NOTE: Three-dimensional electrokinetic tweezing: device design, modeling, and control algorithmsProbst, Roland et al. | 2011