Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
Inhaltsverzeichnis
- 1637
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Study of 193 nm photoresist degradation during short time fluorocarbon plasma exposure. I. Studies of modified layer formationSumiya, M. et al. | 2008
- 1647
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Study of 193 nm photoresist degradation during short time fluorocarbon plasma exposures. II. Plasma parameter trends for photoresist degradationSumiya, M. et al. | 2008
- 1654
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Comparative study of thermally cured and electron-beam-exposed hydrogen silsesquioxane resistsChoi, Sookyung et al. | 2008
- 1660
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Nanofabrication by mechanical and electrical processes using electrically conductive diamond tipMiyake, Shojiro et al. | 2008
- 1666
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Sub-50-nm track pitch mold using electron beam lithography for discrete track recording mediaSbiaa, R. et al. | 2008
- 1670
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Oxidation behavior of In95Sn5 solid solutionRamasamy, S. et al. | 2008
- 1675
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Comparative study of Cl2, Cl2-O2, and Cl2-N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InPCarlström, C.F. et al. | 2008
- 1684
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Plasma etch removal of poly(methyl methacrylate) in block copolymer lithographyTing, Yuk-Hong et al. | 2008
- 1690
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Fabrication of concave gratings by curved surface UV-nanoimprint lithographyChen, Yung-Pin et al. | 2008
- 1696
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Growth of nitrogen doped ZnO films through a nitrogen diffusion process from WN films formed by a cosputtering techniqueLee, Jonghyun et al. | 2008
- 1700
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Field-emission fluorescent lamp using carbon nanotubes on a wire-type cold cathode and a reflecting anodeHuang, J.X. et al. | 2008
- 1705
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Fabrication and properties of Cu-Ni mixed-metal periodical array for midinfrared filtering and hydrophobic applicationHuang, Wen-Hsien et al. | 2008
- 1712
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Correlation of the growth rate for selective epitaxial growth of silicon and oxide thickness and oxide coverage in a reduced pressure chemical vapor deposition pancake reactorLee, Kung-Yen et al. | 2008
- 1718
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Optical properties and critical-point energies of BaTiO3 (001) from 1.5 to 5.2 eVChoi, S.G. et al. | 2008
- 1723
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Comparative study of ZrN and Zr-Ge-N thin films as diffusion barriers for Cu metallization on SiLeu, L.C. et al. | 2008
- 1728
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Nanochannels fabricated in polydimethylsiloxane using sacrificial electrospun polyethylene oxide nanofibersBellan, Leon M. et al. | 2008
- 1732
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Programmable proximity aperture lithography with MeV ion beamsPuttaraksa, Nitipon et al. | 2008
- 1740
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Comparison of selective Ge growth in SiO2 trenches on Si(001) and on blanket Si(001) substrates: Surface roughness and dopingPark, J.-S. et al. | 2008
- 1745
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Large areas of periodic nanoholes perforated in multistacked films produced by lift-offWu, Wei et al. | 2008
- 1748
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Self-aligned metal-contact and passivation technique for submicron ridge waveguide laser fabricationTeng, J.H. et al. | 2008
- 1753
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Iterative imprint for multilayered nanostructures by feeding, vacuum forming, and bonding of sheetsSuzuki, Hideaki et al. | 2008
- 1757
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Electron field emission from ZnOx nanoparticles decorated on vertically aligned carbon nanotubes prepared by vapor-phase transportWisitsoraat, A. et al. | 2008
- 1761
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Fabrication of gold tips suitable for tip-enhanced Raman spectroscopyWilliams, Craig et al. | 2008
- 1765
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Effect of ZnO catalyst on carbon nanotube growth by thermal chemical vapor depositionLee, Shih-Fong et al. | 2008
- 1771
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Single-pass forming for three-dimensional microstructures by high-speed shearing of multilayer thin filmsHamaguchi, Tetsuya et al. | 2008
- 1775
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ArF resist-friendly etching technologyHayashi, Toshio et al. | 2008
- 1782
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Specific spectral features in electron emission from nanocrystalline silicon quasi-ballistic cold cathode detected by an angle-resolved high resolution analyzerSakai, Daisuke et al. | 2008
- 1787
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Deposition of NiOx thin films with radio frequency magnetron sputtering and their characteristics as a source-drain electrode for the pentacene thin film transistorYun, Dong-Jin et al. | 2008
- 1794
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Overcoming material challenges for replication of "motheye lenses" using step and flash imprint lithography for optoelectronic applicationsKettle, J. et al. | 2008
- 1800
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Deposition of WNxCy for diffusion barrier application using the imido guanidinato complex W(N'Pr)Cl3('PrNC(NMe2)N'Pr)Ajmera, Hiral M. et al. | 2008
- 1808
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Transferring optical proximity correction effects into a process modelLi, Jianliang et al. | 2008
- 1813
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Use of ion beam assisted deposition and low temperature annealing for the fabrication of low loss, vertically stacked alumina waveguide structuresNightingale, J.R. et al. | 2008
- 1817
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Brief Reports and Comments - Nonvolatile memory and antifuse behavior in Pt-a-TiO2-Ag structuresBusani, T. et al. | 2008
- 1821
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Shop Notes - Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrateTharp, J.S. et al. | 2008
- 1824
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CUMULATIVE AUTHOR INDEX| 2008
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Letters - Study of substrate-directed ordering of long double-stranded DNA molecules on bare highly oriented pyrolytic graphite surface based on atomic force microscopy relocation imagingWang, Huabin et al. | 2008
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An international journal devoted to Microelectronics and Nanometer Structures . Processing, Measurement, and Phenomena| 2008