Mass spectrometry detection of radicals in SiH~4-CH~4-H~2 glow discharge plasmas (Englisch)
- Neue Suche nach: Kae-Nune, P.
- Neue Suche nach: Perrin, J.
- Neue Suche nach: Guillon, J.
- Neue Suche nach: Jolly, J.
- Neue Suche nach: Eindhoven University of Technology; Department of Technical Physics
- Neue Suche nach: EPS; Atomic and Molecular Physics Division
- Neue Suche nach: EPS; Plasma Physics Division
- Neue Suche nach: Kae-Nune, P.
- Neue Suche nach: Perrin, J.
- Neue Suche nach: Guillon, J.
- Neue Suche nach: Jolly, J.
- Neue Suche nach: Schram, D. C.
- Neue Suche nach: Eindhoven University of Technology; Department of Technical Physics
- Neue Suche nach: EPS; Atomic and Molecular Physics Division
- Neue Suche nach: EPS; Plasma Physics Division
In:
12th European sectional conference on the atomic and molecular physics of ionized gases
2
;
250-259
;
1995
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Mass spectrometry detection of radicals in SiH~4-CH~4-H~2 glow discharge plasmas
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Beteiligte:Kae-Nune, P. ( Autor:in ) / Perrin, J. ( Autor:in ) / Guillon, J. ( Autor:in ) / Jolly, J. ( Autor:in ) / Schram, D. C. / Eindhoven University of Technology; Department of Technical Physics / EPS; Atomic and Molecular Physics Division / EPS; Plasma Physics Division
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Kongress:12th European sectional conference on the atomic and molecular physics of ionized gases ; 1994 ; Noordwijkerhout; The Netherlands
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Erschienen in:12th European sectional conference on the atomic and molecular physics of ionized gases , 2 ; 250-259PLASMA SOURCES SCIENCE AND TECHNOLOGY ; 4, 2 ; 250-259
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Verlag:
- Neue Suche nach: IOP Publishing
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Erscheinungsdatum:01.01.1995
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Format / Umfang:10 pages
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Anmerkungen:Also known as ESCAMPIG '94; See also 3830.415 vol 18E 1994 for preprinted abstracts and programme
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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