XY Stage with Nanometer Accuracy, Using Magnetic Bearing Actuators for Positioning (Englisch)
- Neue Suche nach: Auer, F.
- Neue Suche nach: Van Beek, H. F.
- Neue Suche nach: De Veer, B.
- Neue Suche nach: Auer, F.
- Neue Suche nach: Van Beek, H. F.
- Neue Suche nach: De Veer, B.
In:
Magnetic bearings, magnetic drives and dry gas seals
;
167-175
;
1995
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:XY Stage with Nanometer Accuracy, Using Magnetic Bearing Actuators for Positioning
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Beteiligte:
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Kongress:Conference, Magnetic bearings, magnetic drives and dry gas seals ; 1995 ; Alexandria; VA
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Erschienen in:PROCEEDINGS OF MAG ; 167-175
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Verlag:
- Neue Suche nach: Technomic Publishing
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Erscheinungsdatum:01.01.1995
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Format / Umfang:9 pages
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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- 47
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