Stress and curvature in MEMS mirrors [4983-09] (Englisch)
- Neue Suche nach: Gass, F. R.
- Neue Suche nach: Dagel, D. J.
- Neue Suche nach: Adams, D. P.
- Neue Suche nach: Grossetete, G. D.
- Neue Suche nach: Spahn, O. B.
- Neue Suche nach: Kemme, S. A.
- Neue Suche nach: Mani, S. S.
- Neue Suche nach: Malloy, K. J.
- Neue Suche nach: International Society for Optical Engineering
- Neue Suche nach: Gass, F. R.
- Neue Suche nach: Dagel, D. J.
- Neue Suche nach: Adams, D. P.
- Neue Suche nach: Grossetete, G. D.
- Neue Suche nach: Spahn, O. B.
- Neue Suche nach: Kemme, S. A.
- Neue Suche nach: Mani, S. S.
- Neue Suche nach: Malloy, K. J.
- Neue Suche nach: Smith, J. H.
- Neue Suche nach: Krulevitch, P. A.
- Neue Suche nach: Lakner, H. K.
- Neue Suche nach: International Society for Optical Engineering
In:
MOEMS and miniaturized systems
;
87-93
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2003
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Stress and curvature in MEMS mirrors [4983-09]
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Beteiligte:Gass, F. R. ( Autor:in ) / Dagel, D. J. ( Autor:in ) / Adams, D. P. ( Autor:in ) / Grossetete, G. D. ( Autor:in ) / Spahn, O. B. ( Autor:in ) / Kemme, S. A. ( Autor:in ) / Mani, S. S. ( Autor:in ) / Malloy, K. J. ( Autor:in ) / Smith, J. H. / Krulevitch, P. A.
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Kongress:Technical conference; 3rd, MOEMS and miniaturized systems ; 2003 ; San Jose, CA
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Erschienen in:MOEMS and miniaturized systems ; 87-93
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.01.2003
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Format / Umfang:7 pages
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Anmerkungen:Held jointly with Photonics West
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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European roadmaps for MOEMS applications (Invited Paper) [4983-02]Salomon, P. R. / International Society for Optical Engineering et al. | 2003
- 1
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European roadmaps for MOEMS applicationsSalomon, Patric R. et al. | 2003
- 11
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Novel optoelectronic methodology for testing MOEMS (Invited Paper) [4983-03]Pryputniewicz, R. J. / Furlong, C. / International Society for Optical Engineering et al. | 2003
- 11
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Novel optoelectronic methodology for testing of MOEMSPryputniewicz, Ryszard J. / Furlong, Cosme et al. | 2003
- 26
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Measurement of thermal-mechanical noise in MEMS microstructures [4983-04]Stievater, T. H. / Rabinovich, W. S. / Newman, H. S. / Mahon, R. / Goetz, P. G. / Ebel, J. L. / McGee, D. J. / International Society for Optical Engineering et al. | 2003
- 26
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Measurement of thermal-mechanical noise in MEMS microstructuresStievater, Todd H. / Rabinovich, William S. / Newman, Harvey S. / Mahon, Rita / Goetz, Peter G. / Ebel, Jack L. / McGee, David J. et al. | 2003
- 34
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Integrated otpical monitoring of MEMS for closed-loop controlDawson, Jeremy M. / Wang, Limin / McCormick, W. B. / Rittenhouse, S. A. / Famouri, Parviz F. / Hornak, Lawrence A. et al. | 2003
- 34
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Integrated optical monitoring of MEMS for closed-loop control [4983-05]Dawson, J. M. / Wang, L. / McCormick, W. B. / Rittenhouse, S. A. / Famouri, P. F. / Hornak, L. A. / International Society for Optical Engineering et al. | 2003
- 44
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Fiber optic switch concept with analog micromirror deviceLausch, Christine / Goering, Rolf / Wippermann, Frank et al. | 2003
- 44
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Fiber optic switch concept with analog micromirror device [4983-39]Lausch, C. / Goering, R. / Wippermann, F. / International Society for Optical Engineering et al. | 2003
- 53
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Single-chip 1x84 MEMS mirror array for optical telecommunication applications (Invited Paper) [4983-06]Juneau, T. N. / Chen, T. / Brosnihan, T. / Rajaraman, S. / Chau, K. H. / Judy, M. / International Society for Optical Engineering et al. | 2003
- 53
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Single-chip 1×84 MEMS mirror array for optical telecommunication applicationsJuneau, Thor N. / Chen, Tony / Brosnihan, Tim / Rajaraman, Swaminathan / Chau, Kevin H. / Judy, Michael et al. | 2003
- 65
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SOI/DRIE all-fiber optical switch for high-power applicationsLiu, Jing / Fan, Lawrence / DeVoe, Don L. et al. | 2003
- 65
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SOI/DRIE all-fiber optical switch for high-power applications [4983-07]Liu, J. / Fan, L. / DeVoe, D. L. / International Society for Optical Engineering et al. | 2003
- 75
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High-power optical microswitch fabricated by deep reactive ion etching (DRIE)Cochran, Kevin R. / Fan, Lawrence / DeVoe, Don L. et al. | 2003
- 75
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High-power optical microswitch fabricated by deep reactive ion etching (DRIE) [4983-08]Cochran, K. R. / Fan, L. / DeVoe, D. L. / International Society for Optical Engineering et al. | 2003
- 87
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Stress and curvature in MEMS mirrorsGass, Fawn R. / Dagel, Daryl J. / Adams, David P. / Grossetete, Grant D. / Blum Spahn, Olga / Kemme, Shanalyn A. / Mani, Seethambal S. / Malloy, Kevin J. et al. | 2003
- 87
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Stress and curvature in MEMS mirrors [4983-09]Gass, F. R. / Dagel, D. J. / Adams, D. P. / Grossetete, G. D. / Spahn, O. B. / Kemme, S. A. / Mani, S. S. / Malloy, K. J. / International Society for Optical Engineering et al. | 2003
- 94
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Optical system properties of a reconfigurable MEMS interconnectKemme, Shanalyn A. / Blum-Spahn, Olga / Gass, Fawn R. / Dagel, Daryl J. / Grossetete, Grant D. et al. | 2003
- 94
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Optical system properties of a reconfigurable MEMS interconnect [4983-10]Kemme, S. A. / Spahn, O. B. / Gass, F. R. / Dagel, D. J. / Grossetete, G. D. / International Society for Optical Engineering et al. | 2003
- 102
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MOEMS device design, development, and integration for interconnect applications [4983-11]Castracane, J. / Xu, B. / Madison, S. / Verheggen, J. / Yan, D. / International Society for Optical Engineering et al. | 2003
- 102
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MOEMS device design, development, and integration for interconnect applicationsCastracane, James / Xu, Bai / Madison, Seth / Verheggen, Jaap / Yan, Dong et al. | 2003
- 109
-
Development of 1x4 micro-optical switch based on SOI vertical micromirror technology [4983-12]Wang, Z. F. / Shan, X. C. / Wang, Z. P. / Cao, W. Q. / Xu, J. F. / Lim, S. P. / Noell, W. / de Rooij, N. F. / International Society for Optical Engineering et al. | 2003
- 109
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Development of 1×4 micro optical switch based on SOI vertical micromirror technologyWang, Zhenfeng P. / Shan, Xue Chuan / Wang, Zhiping / Cao, Wenqing / Xu, Jianfeng / Lim, Siak-Piang / Noell, Wilfried / de Rooij, Nico F. et al. | 2003
- 114
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Out-of-plane rotary micromirrors for reconfigurable photonic applicationsDagel, Daryl J. / Blum Spahn, Olga / Allen, James J. / Kemme, Shanalyn A. / Grossetete, Grant D. / Gass, Fawn R. et al. | 2003
- 114
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Out-of-plane rotary micromirrors for reconfigurable photonic applications [4983-13]Dagel, D. J. / Spahn, O. B. / Allen, J. J. / Kemme, S. A. / Grossetete, G. D. / Gass, F. R. / International Society for Optical Engineering et al. | 2003
- 122
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Microelectromechanical optical switch [4983-14]Mukhurov, N. I. / Efremov, G. I. / International Society for Optical Engineering et al. | 2003
- 122
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Microelectromechanical optical switchMukhurov, Nikolay I. / Efremov, Georgy I. et al. | 2003
- 127
-
Thin-film-technology-based micro-Fourier spectrometer [4983-15]Knipp, D. / Stiebig, H. / Bhalotra, S. R. / Kung, H. L. / Miller, D. A. B. / International Society for Optical Engineering et al. | 2003
- 127
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Thin-film-technology-based micro-Fourier spectrometerKnipp, Dietmar / Stiebig, Helmut / Bhalotra, Sameer R. / Kung, Helen L. / Miller, David A. B. et al. | 2003
- 139
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Miniature thermoacoustic cryocooler driven by a vertical comb-driveHao, Zhili / Fowler, Mark / Hammer, Jay A. / Whitley, Michael R. / Brown, David et al. | 2003
- 139
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Miniature thermoacoustic cryocooler driven by a vertical comb-drive [4983-16]Hao, Z. / Fowler, M. / Hammer, J. A. / Whitley, M. R. / Brown, D. / International Society for Optical Engineering et al. | 2003
- 149
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Micromachined near-field probe arrays [4983-17]Srinivasan, P. / Beyette, F. R. / Papautsky, I. / International Society for Optical Engineering et al. | 2003
- 149
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Micromachined near-field probe arraysSrinivasan, Pradeep / Beyette, Fred R. / Papautsky, Ian et al. | 2003
- 159
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Novel micro fiber spectrometer [4983-18]Wen, Z. / Chen, G. / Huang, S. / International Society for Optical Engineering et al. | 2003
- 159
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Novel micro fiber spectrometerWen, Zhiyu / Chen, Gang / Huang, Shanglian et al. | 2003
- 167
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DWDM variable attenuator and multiple-channel power equalizer using MEMS technology [4983-19]Liu, A. Q. / Zhang, X. M. / Chan, C. W. / Thian, C. S. / Wang, F. / Lu, C. / Liu, Z. S. / International Society for Optical Engineering et al. | 2003
- 167
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DWDM variable attenuator and multiple-channel power equlizer using MEMS technologyLiu, Ai Q. / Zhang, Xu M. / Wei, Chan C. / Sheong, Thian C. / Wang, F. / Lu, C. / Liu, Zishun et al. | 2003
- 172
-
MOEMS spatial light modulator development at the Center for Adaptive OpticsKrulevitch, Peter A. / Bierden, Paul A. / Bifano, Thomas / Carr, Emily / Dimas, Clara E. / Dyson, Harold / Helmbrecht, Michael A. / Kurczynski, Peter / Muller, Richard S. / Olivier, Scot S. et al. | 2003
- 179
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Micromachined VOA with perpendicularly aligned tapered optic fibers [4983-20]Jung, S. / Hong, Y. / Lee, J. / Lee, Y. / International Society for Optical Engineering et al. | 2003
- 179
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Micromachined VOA with perpendicularly aligned tapered optic fibersJung, Sungcheon / Hong, Yoonshik / Lee, Junghyun / Lee, Yeoungyu et al. | 2003
- 180
-
Improved vision by eye aberration correction using an active-matrix-addressed micromirror arrayGehner, Andreas / Wildenhain, Michael / Doleschal, Wolfgang / Elgner, Andreas / Schenk, Harald / Lakner, Hubert et al. | 2003
- 188
-
Widely tunable lasers using MEMS gratings and mirrors [4983-21]Zhang, X. M. / Li, J. / Tang, D. Y. / Lu, C. / Liu, A. Q. / International Society for Optical Engineering et al. | 2003
- 188
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Widely tunable lasers using MEMS gratings and mirrorsZhang, Xu M. / Li, J. / Tang, Ding Y. / Lu, Chao / Liu, Ai Q. et al. | 2003
- 193
-
MEMS spatial light modulators with integrated electronicsBecker, Thomas / Bifano, Thomas G. / Lee, Hocheol / Miller, Michele / Bierden, Paul A. / Cornelissen, Steven et al. | 2003
- 195
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Micromachined in-plane tunable optical filter using thermo-optic effect [4983-23]Yun, S. S. / Lee, J. H. / International Society for Optical Engineering et al. | 2003
- 195
-
Micromachined in-plane tunable optical filter using thermo-optic effectYun, Sungsik / Lee, Jong H. et al. | 2003
- 203
-
Bionics: precise color tuning by interference in nature and technology: applications in surface-micromachined 1.55-mum vertical air-cavity filters [4983-24]Hillmer, H. / Daleiden, J. / Prott, C. / Irmer, S. / Romer, F. / Ataro, E. / Tarraf, A. / Ruhling, H. / Maniak, M. / Strassner, M. et al. | 2003
- 203
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Bionics: prcise color tuning by interference in nature and technology-applications in surface-micromachined 1.55μm vertical air-cavity filtersHillmer, Hartmut / Daleiden, Juergen / Prott, Cornelia / Irmer, Soeren / Roemer, Friedhard / Ataro, Edwin / Tarraf, Amer / Ruehling, H. / Maniak, Markus / Strassner, Martin et al. | 2003
- 204
-
Large-scale polysilicon surface-micromachined spatial light modulatorDimas, Clara E. / Perreault, Julie / Cornelissen, Steven / Dyson, Harold / Krulevitch, Peter / Bierden, Paul / Bifano, Thomas et al. | 2003
- 215
-
Tunable Fabry-Perot interferometer for 3- to 4.5-mum wavelength with bulk micromachined reflector carrier [4983-25]Kurth, S. / Hiller, K. / Neumann, N. / Heinze, M. / Dotzel, W. / Gessner, T. / International Society for Optical Engineering et al. | 2003
- 215
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Tunable Fabry-Perot-Interferometer for 3-5 μm wavelength with bulk micromachined reflector carrierKurth, Steffen / Hiller, Karla / Neumann, Norbert / Heinze, Matthias / Doetzel, Wolfram / Gessner, Thomas et al. | 2003
- 227
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MOEMS spatial light modulator development at the Center for Adaptive Optics [4983-26]Krulevitch, P. A. / Bierden, P. A. / Bifano, T. G. / Carr, E. / Dimas, C. E. / Dyson, H. / Helmbrecht, M. A. / Kurczynski, P. / Muller, R. S. / Olivier, S. S. et al. | 2003
- 230
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A micromachined deformable mirror for adaptive opticsSchwartz, Wilfrid / Divoux, Claire / Margail, Jacques / Jocou, Laurent / Charton, Julien / Stadler, Eric / Jager, Thomas / Casset, Fabrice / Enot, T. et al. | 2003
- 235
-
Improved vision by eye aberration correction using an active-matrix addressed micromirror array (Invited Paper) [4983-27]Gehner, A. / Wildenhain, M. / Doleschal, W. / Elgner, A. / Schenk, H. / Lakner, H. K. / International Society for Optical Engineering et al. | 2003
- 242
-
DLP switched blaze grating: the heart of optical signal processingDuncan, Walter M. / Lee, Benjamin L. / Rancuret, Paul / Sawyers, Bryce D. / Endsley, Lynn / Powell, Donald et al. | 2003
- 248
-
MEMS spatial light modulators with integrated electronics [4983-28]Becker, T. / Bifano, T. G. / Lee, H. / Miller, M. / Bierden, P. A. / Cornelissen, S. / International Society for Optical Engineering et al. | 2003
- 250
-
Electrostatically actuated membrane mirrors for adaptive opticsKurczynski, Peter / Bogart, Gregory R. / Lai, Warren Y. / Lifton, Victor / Mansfield, William M. / Tyson, J. Anthony / Sadoulet, Bernard / Williams, David R. et al. | 2003
- 259
-
Design and fabrication of a continuous membrane deformable mirrorHammer, Jay A. / Banish, Michele R. / Whitley, Michael R. / Hao, Zhili / Warren, Keith O. / Sanchez, Sharon / Harchanko, John S. et al. | 2003
- 259
-
Large-scale polysilicon surface-micromachined spatial light modulator [4983-29]Dimas, C. E. / Perreault, J. / Cornelissen, S. / Dyson, H. / Krulevitch, P. A. / Bierden, P. A. / Bifano, T. G. / International Society for Optical Engineering et al. | 2003
- 266
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Characterization of spatial light modulators for microlithography [4985-18]Durr, P. / Dauderstadt, U. / Kunze, D. / Auvert, M. / Bakke, T. / Schenk, H. / Lakner, H. K. / International Society for Optical Engineering et al. | 2003
- 271
-
Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrorsYang, Eui-Hyeok / Shcheglov, Kirill / Trolier-McKinstry, Susan et al. | 2003
- 277
-
Operation of spatial light modulators in DUV light [4985-19]Dauderstadt, U. / Durr, P. / Krellmann, M. / Karlin, T. / Berzinsh, U. / Leonardsson, L. / Wendrock, H. / International Society for Optical Engineering et al. | 2003
- 285
-
A micromachined deformable mirror for adaptive optics [4983-31]Schwartz, W. / Divoux, C. / Margail, J. / Jocou, L. / Charton, J. / Stadler, E. / Jager, T. / Casset, F. / Enot, T. / International Society for Optical Engineering et al. | 2003
- 287
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Nodal model for continuous face sheet deformable mirrorsPapavasiliou, Alexandros P. et al. | 2003
- 297
-
DLP switched blaze grating: the heart of optical signal processing (Invited Paper) [4983-38]Duncan, W. M. / Lee, B. L. / Rancuret, P. / Sawyers, B. D. / Endsley, L. / Powell, D. / International Society for Optical Engineering et al. | 2003
- 305
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Electrostatically actuated membrane mirrors for adaptive optics [4983-32]Kurczynski, P. A. / Bogart, G. R. / Lai, W. Y.-C. / Lifton, V. / Mansfield, W. M. / Tyson, J. A. / Sadoulet, B. / Williams, D. R. / International Society for Optical Engineering et al. | 2003
- 314
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Design and fabrication of a continuous membrane deformable mirror [4983-33]Hammer, J. A. / Banish, M. R. / Whitley, M. R. / Hao, Z. / Warren, K. O. / Sanchez, S. / Harchanko, J. S. / International Society for Optical Engineering et al. | 2003
- 326
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Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors [4983-34]Yang, E.-H. / Shcheglov, K. / Trolier-McKinstry, S. / International Society for Optical Engineering et al. | 2003
- 334
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Technological approaches for fabrication of elastomer-based spatial light modulators [4985-20]Sakarya, S. / Vdovin, G. V. / Sarro, P. M. / International Society for Optical Engineering et al. | 2003
- 342
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Nodal model for continuous face sheet deformable mirrors [4983-35]Papavasiliou, A. P. / International Society for Optical Engineering et al. | 2003
- 351
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Off-axis variable focus and aberration control mirrors [4985-21]Himmer, P. A. / Dickensheets, D. L. / International Society for Optical Engineering et al. | 2003
- 359
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Fabrication of micromachined focusing mirrors with seamless reflective surface [4983-36]Hou, M. T.-K. / Liao, K.-M. / Yeh, H.-Z. / Cheng, B.-W. / Hong, P.-Y. / Chen, R. / International Society for Optical Engineering et al. | 2003
- 359
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Fabrication of micromachined focusing mirrors with seamless reflective surfaceHou, Max Ti-Kuang / Liao, Ke-Min / Yeh, Hong-Zhen / Cheng, Bo-Wen / Hong, Pei-Yuan / Chen, Rongshun et al. | 2003
- xiii
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Micropackaging technologies for integrated microsystems: applications to MEMS and MOEMS [4979-200]Najafi, K. / International Society for Optical Engineering et al. | 2003
- xxxiii
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NEXUS: roadmaps and applications [4979-201]El-Fatatry, A. / International Society for Optical Engineering et al. | 2003
- xxxix
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MEMS and MOEMS for National Security applications [4979-202]Scott, M. W. / International Society for Optical Engineering et al. | 2003