Sputtering and chemical erosion during CN"x synthesis by ion beam assisted filtered cathodic arc evaporation (Englisch)
- Neue Suche nach: Spaeth, C.
- Neue Suche nach: Kreissig, U.
- Neue Suche nach: Richter, F.
- Neue Suche nach: Spaeth, C.
- Neue Suche nach: Kreissig, U.
- Neue Suche nach: Richter, F.
In:
THIN SOLID FILMS
;
355-356
;
64-72
;
1999
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Sputtering and chemical erosion during CN"x synthesis by ion beam assisted filtered cathodic arc evaporation
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Beteiligte:
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Erschienen in:THIN SOLID FILMS ; 355-356 ; 64-72
-
Verlag:
- Neue Suche nach: ELSEVIER SEQUOIA SA
-
Erscheinungsdatum:01.01.1999
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Format / Umfang:9 pages
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ISSN:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Print
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Sprache:Englisch
- Neue Suche nach: 530.4275
- Weitere Informationen zu Dewey Decimal Classification
-
Klassifikation:
DDC: 530.4275 -
Datenquelle:
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