AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography (Englisch)
- Neue Suche nach: Vora, K. D.
- Neue Suche nach: Lochel, B.
- Neue Suche nach: Harvey, E. C.
- Neue Suche nach: Hayes, J. P.
- Neue Suche nach: Peele, A. G.
- Neue Suche nach: Vora, K. D.
- Neue Suche nach: Lochel, B.
- Neue Suche nach: Harvey, E. C.
- Neue Suche nach: Hayes, J. P.
- Neue Suche nach: Peele, A. G.
In:
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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16
, 10
;
1975-1983
;
2006
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography
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Beteiligte:Vora, K. D. ( Autor:in ) / Lochel, B. ( Autor:in ) / Harvey, E. C. ( Autor:in ) / Hayes, J. P. ( Autor:in ) / Peele, A. G. ( Autor:in )
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Erschienen in:JOURNAL OF MICROMECHANICS AND MICROENGINEERING ; 16, 10 ; 1975-1983
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Verlag:
- Neue Suche nach: Institute of Physics Publishing
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Erscheinungsdatum:01.01.2006
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Format / Umfang:9 pages
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ISSN:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 620
- Weitere Informationen zu Dewey Decimal Classification
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Klassifikation:
DDC: 620 -
Datenquelle:
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