Microarea analysis of iron and phosphorus by resonance photoionization sputtered neutral mass spectrometry (Englisch)
- Neue Suche nach: Shichi, H.
- Neue Suche nach: Osabe, S.
- Neue Suche nach: Sugaya, M.
- Neue Suche nach: Kanehori, K.
- Neue Suche nach: Kakibayashi, H.
- Neue Suche nach: Mitsui, Y.
- Neue Suche nach: Shichi, H.
- Neue Suche nach: Osabe, S.
- Neue Suche nach: Sugaya, M.
- Neue Suche nach: Kanehori, K.
- Neue Suche nach: Kakibayashi, H.
- Neue Suche nach: Mitsui, Y.
In:
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUM SURFACES AND FILMS
;
25
, 4
;
751-757
;
2007
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Microarea analysis of iron and phosphorus by resonance photoionization sputtered neutral mass spectrometry
-
Beteiligte:Shichi, H. ( Autor:in ) / Osabe, S. ( Autor:in ) / Sugaya, M. ( Autor:in ) / Kanehori, K. ( Autor:in ) / Kakibayashi, H. ( Autor:in ) / Mitsui, Y. ( Autor:in )
-
Erschienen in:JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUM SURFACES AND FILMS ; 25, 4 ; 751-757
-
Verlag:
- Neue Suche nach: SLACK INCORPORATED
-
Erscheinungsdatum:01.01.2007
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Format / Umfang:7 pages
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ISSN:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Print
-
Sprache:Englisch
- Neue Suche nach: 621.55
- Weitere Informationen zu Dewey Decimal Classification
-
Klassifikation:
DDC: 621.55 -
Datenquelle:
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- 1093
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Characterization of thin-film deposition in a pulsed acrylic acid polymerizing dischargeVoronin, Sergey A. / Bradley, James W. / Fotea, Catalin / Zelzer, Mischa / Alexander, Morgan R. et al. | 2007
- 1093
-
Papers from the 53rd International Symposium of AVS - Plasma Science and Technology III - Characterization of thin-film deposition in a pulsed acrylic acid polymerizing dischargeVoronin, Sergey A. et al. | 2007
- 1098
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Morphological evolution of Al whiskers grown by high temperature glancing angle depositionSuzuki, Motofumi / Nagai, Koji / Kinoshita, Sadamu / Nakajima, Kaoru / Kimura, Kenji / Okano, Tomoki / Sasakawa, Kaoru et al. | 2007
- 1098
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Papers from the 53rd International Symposium of AVS - Surface Engineering - Morphological evolution of Al whiskers grown by high temperature glancing angle depositionSuzuki, Motofumi et al. | 2007
- 1103
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Ti–Al–Si–N films for superhard coatings deposited by reactive cosputtering using Ti, Al, and Si targetsMiyamura, A. / Yamaguchi, M. / Hattori, K. / Sato, Y. / Nakamura, S. / Shigesato, Y. et al. | 2007
- 1103
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Papers from the 53rd International Symposium of AVS - Surface Engineering - Ti-Al-Si-N films for superhard coatings deposited by reactive cosputtering using Ti, Al, and Si targetsMiyamura, A. et al. | 2007
- 1108
-
Papers from the 53rd International Symposium of AVS - Surface Engineering - Plasma polymerized thin films of maleic anhydride and 1,2-methylenedioxybenzene for improving adhesion to carbon surfacesDrews, Joanna et al. | 2007
- 1108
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Plasma polymerized thin films of maleic anhydride and 1,2-methylenedioxybenzene for improving adhesion to carbon surfacesDrews, Joanna / Goutianos, Stergios / Kingshott, Peter / Hvilsted, Søren / Rozlosnik, Noemi / Almdal, Kristoffer / Sørensen, Bent F. et al. | 2007
- 1118
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Fabrication of structurally chiral films and observation of Bragg resonance at deep UV wavelengthsDe Silva, Lakshman / Hodgkinson, Ian et al. | 2007
- 1118
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Papers from the 53rd International Symposium of AVS - Surface Engineering I - Fabrication of structurally chiral Sc2O3 films and observation of Bragg resonance at deep UV wavelengthsSilva, Lakshman De et al. | 2007
- 1123
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Multiply charged Al recoils with impact of ionsChen, X. / Sroubek, Z. / Yarmoff, J. A. et al. | 2007
- 1123
-
Papers from the 53rd International Symposium of AVS - Surface Science - Multiply charged Al recoils with impact of 2.0 keV Si+ ionsChen, X. et al. | 2007
- 1128
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Characterization of orientation-selective-epitaxial layers on Si(100) substrates by x-ray diffraction and cross-sectional transmission electron microscopyInoue, Tomoyasu / Nakata, Yoshiyuki / Shida, Shigenari / Kato, Kazuhiro et al. | 2007
- 1128
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Papers from the 53rd International Symposium of AVS - Surface Science - Characterization of orientation-selective-epltaxial CeO2 layers on Si(100) substrates by x-ray diffraction and cross-sectional transmission electron microscopyInoue, Tomoyasu et al. | 2007
- 1133
-
K ion scattering from Au nanoclusters onLiu, G. F. / Karmakar, P. / Yarmoff, J. A. et al. | 2007
- 1133
-
Papers from the 53rd International Symposium of AVS - Surface Science - K ion scattering from Au nanoclusters on TiO2(110)Liu, G.F. et al. | 2007
- 1137
-
Surface modification of SKD-61 steel by ion implantation techniqueWen, F. L. / Lo, Y.-L. / Yu, Y.-C. et al. | 2007
- 1137
-
Papers from the 53rd International Symposium of AVS - Surface Science - Surface modification of SKD-61 steel by ion implantation techniqueWen, F.L. et al. | 2007
- 1143
-
Papers from the 53rd International Symposium of AVS - Surface Science - Reaction properties of NO and CO over an Ir(211) surfaceNakamura, I. et al. | 2007
- 1143
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Reaction properties of NO and CO over an Ir(211) surfaceNakamura, I. / Suzuki, K. / Takahashi, A. / Haneda, M. / Hamada, H. / Fujitani, T. et al. | 2007
- 1147
-
Papers from the 53rd International Symposium of AVS - Surface Science - X-ray photoemission spectroscopy and Fourier transform infrared studies of electrochemical doping of copper phthalocyanine molecule in conducting polymerKato, H. et al. | 2007
- 1147
-
X-ray photoemission spectroscopy and Fourier transform infrared studies of electrochemical doping of copper phthalocyanine molecule in conducting polymerKato, H. / Takemura, S. / Watanabe, Y. / Ishii, A. / Tsuchida, I. / Akai, Y. / Sugiyama, T. / Hiramatsu, T. / Nanba, N. / Nishikawa, O. et al. | 2007
- 1152
-
Papers from the 53rd International Symposium of AVS - Surface Science - Cathodoluminescence degradation of SiO2:Ce, Tb powder phosphors prepared by a sol-gel processNtwaeaborwa, O.M. et al. | 2007
- 1152
-
Cathodoluminescence degradation of powder phosphors prepared by a sol-gel processNtwaeaborwa, O. M. / Swart, H. C. / Kroon, R. E. / Botha, J. R. / Holloway, P. H. et al. | 2007
- 1156
-
Chemical interaction of H and D atoms with thin film diodesKrix, David / Nünthel, Ramona / Nienhaus, Hermann et al. | 2007
- 1156
-
Papers from the 53rd International Symposium of AVS - Surface Science - Chemical interaction of H and D atoms with Ag-H:p-Si(111) thin film diodesKrix, David et al. | 2007
- 1161
-
Gate dielectric development for flexible electronicsJoshi, P. C. / Voutsas, A. T. / Hartzell, J. W. et al. | 2007
- 1161
-
Papers from the 53rd International Symposium of AVS - Thin Films - Gate dielectric development for flexible electronicsJoshi, P.C. et al. | 2007
- 1166
-
Papers from the 53rd International Symposium of AVS - Thin Films - Structure and chemical properties of molybdenum oxide thin filmsRamana, C.V. et al. | 2007
- 1166
-
Structure and chemical properties of molybdenum oxide thin filmsRamana, C. V. / Atuchin, V. V. / Pokrovsky, L. D. / Becker, U. / Julien, C. M. et al. | 2007
- 1172
-
Transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering with dc and rf powers applied in combinationMinami, Tadatsugu / Ohtani, Yuusuke / Miyata, Toshihiro / Kuboi, Takeshi et al. | 2007
- 1172
-
Papers from the 53rd International Symposium of AVS - Thin Films - Transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering with dc and rf powers applied in combinationMinami, Tadatsugu et al. | 2007
- 1178
-
Effect of electrical properties on thermal diffusivity of amorphous indium zinc oxide filmsAshida, T. / Miyamura, A. / Sato, Y. / Yagi, T. / Taketoshi, N. / Baba, T. / Shigesato, Y. et al. | 2007
- 1178
-
Papers from the 53rd International Symposium of AVS - Thin Films - Effect of electrical properties on thermal diffusivity of amorphous indium zinc oxide filmsAshida, T. et al. | 2007
- 1184
-
Anisotropic microstructure of physical vapor deposited coatings caused by anisotropy in flux distribution of arriving atomsGrachev, S. Yu. / Kamminga, J.-D. / Janssen, G. C. A. M. / Smy, T. / Tichelaar, F. D. et al. | 2007
- 1184
-
Papers from the 53rd International Symposium of AVS - Thin Films - Anisotropic microstructure of physical vapor deposited coatings caused by anisotropy in flux distribution of arriving atomsGrachev, S.Yu et al. | 2007
- 1188
-
Papers from the 53rd International Symposium of AVS - Thin Films - Preparation and photocatalytic activity of TiOxNy-CdS heterojunctionsPrabakar, K. et al. | 2007
- 1188
-
Preparation and photocatalytic activity of heterojunctionsPrabakar, K. / Takahashi, T. / Nezuka, T. / Takahashi, K. / Nakashima, T. / Kubota, Y. / Fujishima, A. et al. | 2007
- 1193
-
Preparation of transparent conducting B-doped ZnO films by vacuum arc plasma evaporationMiyata, Toshihiro / Honma, Yasunori / Minami, Tadatsugu et al. | 2007
- 1193
-
Papers from the 53rd International Symposium of AVS - Thin Films - Preparation of transparent conducting B-doped ZnO films by vacuum arc plasma evaporationMiyata, Toshihiro et al. | 2007
- 1198
-
Optimization of the microcrystalline silicon deposition efficiencyStrahm, B. / Howling, A. A. / Sansonnens, L. / Hollenstein, Ch. et al. | 2007
- 1198
-
Papers from the 53rd International Symposium of AVS - Thin Films - Optimization of the microcrystalline silicon deposition efficiencyStrahm, B. et al. | 2007
- 1203
-
Papers from the 53rd International Symposium of AVS - Thin Films - B-doped Be coatings for NIF target developmentXu, H. et al. | 2007
- 1203
-
B-doped Be coatings for NIF target developmentXu, H. / Moreno, K. A. / Youngblood, K. P. / Nikroo, A. / Hackenberg, R. E. / Cooley, J. C. / Alford, C. S. / Letts, S. A. et al. | 2007
- 1208
-
Papers from the 53rd International Symposium of AVS - Thin Films - Growth and electrochemical properties of Li-Ni-Co-Al oxide filmsRamana, C.V. et al. | 2007
- 1208
-
Growth and electrochemical properties of Li–Ni–Co–Al oxide filmsRamana, C. V. / Zaghib, K. / Julien, C. M. et al. | 2007
- 1214
-
Tilted fiber texture in aluminum nitride thin filmsDeniz, D. / Harper, J. M. E. / Hoehn, J. W. / Chen, F. et al. | 2007
- 1214
-
Papers from the 53rd International Symposium of AVS - Thin Films - Tilted fiber texture in aluminum nitride thin filmsDeniz, D. et al. | 2007
- 1219
-
Surface modification of porous nanocrystalline films for dye-sensitized solar cell application by various gas plasmasKim, Youngsoo / Yoon, Chang-Ho / Kim, Kang-Jin / Lee, Yeonhee et al. | 2007
- 1219
-
Papers from the 53rd International Symposium of AVS - Thin Films - Surface modification of porous nanocrystalline TiO2 films for dye-sensitized solar cell application by various gas plasmasKim, Youngsoo et al. | 2007
- 1226
-
Cathodoluminescence degradation of thin filmsCoetsee, E. / Swart, H. C. / Terblans, J. J. et al. | 2007
- 1226
-
Papers from the 53rd International Symposium of AVS - Thin Films II - Cathodoluminescence degradation of Y2SiO5: Ce thin filmsCoetsee, E. et al. | 2007
- 1231
-
Soft-x-ray spectroscopy experiment of liquidsGuo, Jinghua / Tong, Tyler / Svec, Lukas / Go, John / Dong, Chungli / Chiou, Jau-Wern et al. | 2007
- 1231
-
Papers from the 53rd International Symposium of AVS - Ultra-Bright Light Sources - Soft-x-ray spectroscopy experiment of liquidsGuo, Jinghua et al. | 2007
- 1234
-
Use of getter-catalyst thin films for enhancing ion pump vacuum performancesMura, M. / Paolini, C. et al. | 2007
- 1234
-
Papers from the 53rd International Symposium of AVS - Vacuum Technology - Use of getter-catalyst thin films for enhancing ion pump vacuum performancesMura, M. et al. | 2007
- 1240
-
Sensitivity factor of the axial-symmetric transmission gauge: Deviation and long-term variationTakahashi, N. / Tuzi, Y. / Arakawa, I. et al. | 2007
- 1240
-
Papers from the 53rd International Symposium of AVS - Vacuum Technology - Sensitivity factor of the axial-symmetric transmission gauge, Deviation and long-term variationTakahashi, N. et al. | 2007
- 1246
-
Quartz friction gauge for monitoring the concentration and viscosity of NaturalHy mixturesKobayashi, Yohei / Kurokawa, Akira / Hirata, Masaru et al. | 2007
- 1246
-
Papers from the 53rd International Symposium of AVS - Vacuum Technology - Quartz friction gauge for monitoring the concentration and viscosity of NaturalHy mixturesKobayashi, Yohei et al. | 2007
- 1251
-
Photon stimulated desorption from copper and aluminum chambersGómez-Goñi, J. et al. | 2007
- 1251
-
Papers from the 53rd International Symposium of AVS - Vacuum Technology - Photon stimulated desorption from copper and aluminum chambersGómez-Goñi, J. et al. | 2007
- 1256
-
Papers from the 53rd International Symposium of AVS - Vacuum Technology - Benjamin Franklin and electrophotographySchein, L.B. et al. | 2007
- 1256
-
Benjamin Franklin and electrophotographySchein, L. B. et al. | 2007
- 1261
-
Papers from the 53rd International Symposium of AVS - Electronic Materials and Devices-Thin Films - Process-dependent electronic states at Mo-hafnium oxide-Si interfacesWalsh, S. et al. | 2007
- 1261
-
Process-dependent electronic states at Mo/hafnium oxide/Si interfacesWalsh, S. / Fang, L. / Schaeffer, J. K. / Brillson, L. J. et al. | 2007
- 1267
-
Velocity dependence and rest time effect on nanoscale friction of ultrathin films at high sliding velocitiesTao, Zhenhua / Bhushan, Bharat et al. | 2007
- 1267
-
Papers from the 53rd International Symposium of AVS - MEMS and NEMS-Biomaterial Interfaces - Velocity dependence and rest time effect on nanoscale friction of ultrathin films at high sliding velocitiesTao, Zhennua et al. | 2007
- 1275
-
Papers from the 53rd International Symposium of AVS - MEMS and NEMS-Biomaterial Interfaces - Adhesion properties of polymer-silicon interfaces for biological micro--nanoelectromechanical systems applicationsPalacio, Manuel et al. | 2007
- 1275
-
Adhesion properties of polymer/silicon interfaces for biological micro-/nanoelectromechanical systems applicationsPalacio, Manuel / Bhushan, Bharat / Ferrell, Nicholas / Hansford, Derek et al. | 2007
- 1285
-
Nanotribological characterization of vapor phase deposited fluorosilane self-assembled monolayers deposited on polydimethylsiloxane surfaces for biomedical micro-/nanodevicesBhushan, Bharat / Cichomski, Michal et al. | 2007
- 1285
-
Papers from the 53rd International Symposium of AVS - MEMS and NEMS-Biomaterial Interfaces - Nanotribological characterization of vapor phase deposited fluorosilane self-assembled monolayers deposited on polydimethylsiloxane surfaces for biomedical micro--nanodevicesBhushan, Bharat et al. | 2007
- 1294
-
Papers from the 53rd International Symposium of AVS - Nanometer Structures-Nanomanufacturing - Patterning of high density magnetic nanodot arrays by nanoimprint lithographyHu, Wei et al. | 2007
- 1294
-
Patterning of high density magnetic nanodot arrays by nanoimprint lithographyHu, Wei / Wilson, Robert J. / Xu, Liang / Han, Shu-Jen / Wang, Shan X. et al. | 2007
- 1298
-
Optimizing the dielectric performance of thin films through control of plasma-enhanced chemical vapor deposition process conditionsYang, Wenli / Monson, Alexander / Marino, Joseph / Wolden, Colin A. et al. | 2007
- 1298
-
Papers from the 53rd International Symposium of AVS - Plasma Science and Technology II-Thin Films - Optimizing the dielectric performance of TiO2 thin films through control of plasma-enhanced chemical vapor deposition process conditionsYang, Wenli et al. | 2007
- 1302
-
Atomic layer deposition of hafnium silicate gate dielectric layersDelabie, Annelies / Pourtois, Geoffrey / Caymax, Matty / De Gendt, Stefan / Ragnarsson, Lars-Åke / Heyns, Marc / Fedorenko, Yanina / Swerts, Johan / Maes, Jan Willem et al. | 2007
- 1302
-
Papers from the 53rd International Symposium of AVS - Thin Films-Surface Science - Atomic layer deposition of hafnium silicate gate dielectric layersDelabie, Annelies et al. | 2007
- 1309
-
Reducing SS hydrogen outgassing toSasaki, Y. Tito et al. | 2007
- 1309
-
Papers from the 53rd International Symposium of AVS - Vacuum Science-Applied Surface Science - Reducing SS 304-316 hydrogen outgassing to 2 X 10-15 torr I-cm2 SSasaki, Y.Tito et al. | 2007
- 1309
-
Reducing SS 304/316 hydrogen outgassing to 2x10^-^1^5 torr l/cm^2sSasaki, Y. T. et al. | 2007
- 1312
-
CUMULATIVE AUTHOR INDEX| 2007