Effects of working pressure and substrate temperature on the structure and mechanical properties of nanocrystalline SiC thin films deposited by bias-enhanced hot filament chemical vapor deposition (Englisch)
- Neue Suche nach: Liu, Z. L.
- Neue Suche nach: Xiang, L.
- Neue Suche nach: Liu, Z. L.
- Neue Suche nach: Xiang, L.
In:
THIN SOLID FILMS
;
562
;
24-31
;
2014
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Effects of working pressure and substrate temperature on the structure and mechanical properties of nanocrystalline SiC thin films deposited by bias-enhanced hot filament chemical vapor deposition
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Beteiligte:Liu, Z. L. ( Autor:in ) / Xiang, L. ( Autor:in )
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Erschienen in:THIN SOLID FILMS ; 562 ; 24-31
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Verlag:
- Neue Suche nach: Elsevier Science B.V., Amsterdam.
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Erscheinungsdatum:01.01.2014
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Format / Umfang:8 pages
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ISSN:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 530.4275
- Weitere Informationen zu Dewey Decimal Classification
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Klassifikation:
DDC: 530.4275 -
Datenquelle:
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