Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods : NanoScale 2001 ; dimensional measurements in the micro- and nanometre range ; November 15th and 16th, 2001, Bergisch Gladbach, Germany (Englisch)
- Neue Suche nach: Hasche, Klaus
- Neue Suche nach: Mirande, Werner
- Neue Suche nach: Wilkening, Günter
- Neue Suche nach: Seminar on Quantitative Microscopy
- Weitere Informationen zu Seminar on Quantitative Microscopy:
- http://d-nb.info/gnd/10039854-6
- Neue Suche nach: Seminar on Nanoscale Calibration Standards and Methods
- Weitere Informationen zu Seminar on Nanoscale Calibration Standards and Methods:
- http://d-nb.info/gnd/10039856-X
- Neue Suche nach: Physikalisch-Technische Bundesanstalt, Abteilung Fertigungsmesstechnik
- Weitere Informationen zu Physikalisch-Technische Bundesanstalt, Abteilung Fertigungsmesstechnik:
- http://d-nb.info/gnd/2094023-3
- Neue Suche nach: Hasche, Klaus
- Neue Suche nach: Mirande, Werner
- Neue Suche nach: Wilkening, Günter
- Neue Suche nach: Seminar on Quantitative Microscopy
- Weitere Informationen zu Seminar on Quantitative Microscopy:
- http://d-nb.info/gnd/10039854-6
- Neue Suche nach: Seminar on Nanoscale Calibration Standards and Methods
- Weitere Informationen zu Seminar on Nanoscale Calibration Standards and Methods:
- http://d-nb.info/gnd/10039856-X
- Neue Suche nach: Physikalisch-Technische Bundesanstalt, Abteilung Fertigungsmesstechnik
- Weitere Informationen zu Physikalisch-Technische Bundesanstalt, Abteilung Fertigungsmesstechnik:
- http://d-nb.info/gnd/2094023-3
2002
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ISBN:
- Konferenzband / Print
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Titel:Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods : NanoScale 2001 ; dimensional measurements in the micro- and nanometre range ; November 15th and 16th, 2001, Bergisch Gladbach, Germany
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Beteiligte:Hasche, Klaus ( Autor:in ) / Mirande, Werner ( Autor:in ) / Wilkening, Günter ( Autor:in ) / Seminar on Quantitative Microscopy / Seminar on Nanoscale Calibration Standards and Methods / Physikalisch-Technische Bundesanstalt, Abteilung Fertigungsmesstechnik
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Kongress:Seminar on Quantitative Microscopy ; 5 ; 2001 ; Bergisch Gladbach
Seminar on Nanoscale Calibration Standards and Methods ; 1 ; 2001 ; Bergisch Gladbach -
Erschienen in:
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Verlag:
- Neue Suche nach: Wirtschaftsverl. NW, Verl. für neue Wissenschaft
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Erscheinungsort:Bremerhaven
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Erscheinungsdatum:2002
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Format / Umfang:209 S.
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Anmerkungen:Ill., graph. Darst.
Literaturangaben -
ISBN:
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Medientyp:Konferenzband
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Format:Print
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Sprache:Englisch
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Reportnr. / Förderkennzeichen:PTB-F-44
- Neue Suche nach: 33.05 / 50.21
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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Roughness measurements according to existing standards with a metrology AFM profilerMeli, F. et al. | 2001
- 7
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Roughness standards for the calibration of SPM - from design to comparison measurementGatzen, H. / Kourouklis, C. / Kruger-Sehm, R. et al. | 2001
- 13
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Thin layer measurements need reference standardsHasche, K. / Herrmann, K. / Krumrey, M. / Ulm, G. / Ade, G. / Thomsen-Schmidt, P. / Schadlich, S. / Frank, W. / Procop, M. / Beck, U. et al. | 2001
- 22
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Quantification of scanning force microscopy images: software and hardware issuesMcDonnell, L. / Roe, G. / O Mahony, J. et al. | 2001
- 29
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Calibration of the z-axis of an AFM using a metrological Fabry-Perot interferometerBergmans, R. / Dirscherl, K. / Haitjema, H. / Wetzels, S. / Schellekens, P. et al. | 2001
- 37
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Novel step height standard for the calibration of interference microscopesKoops, K. R. et al. | 2001
- 44
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In-situ determination of AFM tip shapes with well-known sharp-edged calibration structuresSulzbach, T. / Hubner, U. / Morgenroth, W. / Bornmann, S. / Meyer, H. G. / Brendel, B. / Mirande, W. et al. | 2001
- 50
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Review on available calibration artefactsKoenders, L. / Wilkening, G. et al. | 2001
- 61
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Determination of nanometric step heights with interference microscopesKrueger-Sehm, R. et al. | 2001
- 70
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Results of the inter-laboratory comparison "Determination of nanometric step heights with Atomic Force Microscopy"Senoner, M. / Koenders, L. / Unger, W. / Wilkening, G. et al. | 2001
- 70
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Results of the inter-laboratory comparison 'Determination of nanometric step heights with AFM'Senoner, M. / Koenders, L. / Unger, W. / Wilkening, G. et al. | 2001
- 78
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Investigation of gratings with period lengths in the nanometre rangeHerrmann, K. / Mirande, W. / Hasche, K. / Pohlenz, F. et al. | 2001
- 86
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Fabrication of calibration standards for the in-situ determination of AFM tip shapesHubner, U. / Morgenroth, W. / Bornmann, S. / Meyer, H. G. / Sulzbach, T. / Brendel, B. / Mirande, W. et al. | 2001
- 93
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Atomic Force Microscopy for surface analysis in industryScandella, L. et al. | 2001
- 100
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Topography reconstruction by means of optical scatterometry analysisPisani, M. / Zucco, M. / Picotto, G. B. et al. | 2001
- 107
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Study of thin film defects by Atomic Force MicroscopyKlapetek, P. / Franta, D. / Ohlidal, I. et al. | 2001
- 118
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Displacement measurements of piezoelectric actuators in the nanosize-rangeFabbri, G. / Galassi, C. / Picotto, G. B. / Pisani, M. et al. | 2001
- 125
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Structural characterisation of Mo and Mo/Ag films for transition-edge sensorsMonticone, E. / Portesi, C. / Pisani, M. / Picotto, G. B. et al. | 2001
- 129
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Atomic Force Microscopy of backing supports used in alpha-particle spectrometry - influence of surface topographical features on radionuclide depositionMendez Vilas, A. / Nuevo, M. J. / Martin S□anchez, A. et al. | 2001
- 137
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Several investigations of Scanning Force MicroscopyKessler, M. / Schmitz, B. et al. | 2001
- 145
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Large area AFM scans with the Nanometer Coordinate Measuring MachinePetersen, R. / Rothe, H. / Huser, D. et al. | 2001
- 152
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The current status in the determination of the measurement uncertainty with the Virtual InterferometerBai, A. / Bitte, F. / Pfeifer, T. et al. | 2001
- 158
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Measuring the topography of large flats: a step towards sub-nm uncertaintyGeckeler, R. / Weingartner, I. et al. | 2001
- 166
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Laser interferometric techniques for vibration analysisDontsov, D. / Jager, G. / Buchner, H. / Gerhard, U. et al. | 2001
- 174
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Compact absolute length measuring machine by combining regular crystalline surface and laser interferometryAketagawa, M. / Perkkumsup, P. / Takada, K. / Takagi, T. / Watanabe, T. / Sadakata, S. et al. | 2001
- 178
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A new tool for the calibration of Scanning Probe MicroscopesJager, G. / Manske, E. / Welter, M. et al. | 2001
- 185
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Si cantilever with integrated piezo resistive elements as micro force transfer standardsDoering, L. / Brand, U. et al. | 2001
- 193
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Calibration and examination of piezoresistive Wheatstone bridge cantilevers for Scanning Probe MicroscopyGotszalk, T. / Grabiec, P. / Rangelow, I. W. et al. | 2001
- 198
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Comparison of different methods of dark field scanning optical microscopy for the dimensional measurements on etched silicon structuresBodermann, B. / Michaelis, W. / Diener, A. / Mirande, W. et al. | 2001
- 204
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Bridging the gap between nanometer and meterMeyer, M. / Koglin, J. / Fries, T. et al. | 2001
- 208
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Step height measurement with a dual probe SPM and atomic referenceFujii, T. / Imabori, K. / Kawakatsu, H. / Watanabe, S. / Bleuler, H. et al. | 2001
- 209
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Optical addition of path differences of several interferometersWurzbacher, H. / Manske, E. / Jager, G. et al. | 2001