公开了一种1,1,1‑三(有机氨基)二硅烷化合物和一种制备所述1,1,1‑三(有机氨基)二硅烷化合物的方法。所述方法包括用包含有机胺化合物的胺化剂将1,1,1‑三卤代二硅烷胺化,得到包含所述1,1,1‑三(有机氨基)二硅烷化合物的反应产物,从而制备所述1,1,1‑三(有机氨基)二硅烷化合物。还公开了一种成膜组合物。所述成膜组合物包含所述1,1,1‑三(有机氨基)二硅烷化合物。还公开了一种用所述成膜组合物形成的膜和一种形成所述膜的方法。形成所述膜的所述方法包括在基材存在下使包含所述1,1,1‑三(有机氨基)二硅烷化合物的所述成膜组合物经受沉积条件,从而在所述基材上形成所述膜。
A 1,1,1-tris(organoamino)disilane compound and a method of preparing the 1,1,1-tris(organoamino)disilane compound are disclosed. The method comprises aminating a 1,1,1-trihalodisilane with an aminating agent comprising an organoamine compound to give a reaction product comprising the 1,1,1-tris(organoamino)disilane compound, thereby preparing the 1,1,1-tris(organoamino)disilane compound. A film-forming composition is also disclosed. The film-forming composition comprises the 1,1,1-tris(organoamino)disilane compound. A film formed with the film-forming composition, and a method of forming the film, are also disclosed. The method of forming the film comprises subjecting the film-forming composition comprising the 1,1,1-tris(organoamino)disilane compound to a deposition condition in the presence of a substrate, thereby forming the film on the substrate.