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Surfaces of polymers treated by Ar and N2 plasma and of glow discharge polymerized polymers were investigated by Electron Spectroscopy for Chemical Analysis (ESCA). A method to coat the inside of small diameter tubing was established and the distribution of coating in a tube was examined. It is possible to coat the inside of 8-10 mm I.D. tubing of length 12 in. by the method. The internal stress build up in the coating layer formed by glow discharge polymerization was investigated by the measuring curling of a composite film. Using this method, characteristic internal stress in some plasma polymers were compared. Glow discharge polymer of tetramethyldisiloxane seems to yield relatively less internal stress compared to other monomers.