Basic research on polishing with ice bonded nanoabrasive pad (Englisch)
- Neue Suche nach: Zuo, Dunwen
- Neue Suche nach: Zuo, Dunwen
- Neue Suche nach: Sun, Yuli
- Neue Suche nach: Zhao, Yufei
- Neue Suche nach: Zhu, Yongwei
In:
Journal of vacuum science and technology / B
;
27
, 3
; 1514-1519
;
2009
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Basic research on polishing with ice bonded nanoabrasive pad
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Beteiligte:
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Erschienen in:Journal of vacuum science and technology / B ; 27, 3 ; 1514-1519
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Verlag:
- Neue Suche nach: Inst.
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Erscheinungsort:New York, NY
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Erscheinungsdatum:2009
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ISSN:
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ZDBID:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 51.30 / 50.94 / 53.55 / 53.56
- Weitere Informationen zu Basisklassifikation
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Schlagwörter:
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Klassifikation:
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Datenquelle:
Inhaltsverzeichnis – Band 27, Ausgabe 3
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