Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas (Englisch)
- Neue Suche nach: Moon, Jun-Hyeon
- Neue Suche nach: Moon, Jun-Hyeon
- Neue Suche nach: Kim, Kyung-Hyun
- Neue Suche nach: Lin, Ming-Chieh
- Neue Suche nach: Chung, Chin-Wook
In:
Physics of plasmas
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23
, 11
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2016
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas
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Beteiligte:
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Erschienen in:Physics of plasmas ; 23, 11
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Verlag:
- Neue Suche nach: AIP
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Erscheinungsort:Melville, NY
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Erscheinungsdatum:2016
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ISSN:
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ZDBID:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 33.80
- Weitere Informationen zu Basisklassifikation
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Klassifikation:
BKL: 33.80 Plasmaphysik -
Datenquelle:
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