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The parallel mechanism is one of the best candidates in the application of 6 DOF (Degree Of Freedom) high precision motion stage, since it has advantages over the conventional serial mechanisms or the Cartesian type mechanisms. One of the major objectives of this research is to develop a high precision motion stage in the application of micro machining of a high performance optical lens. The motion stage will move an optical lens with arbitrarily curved surface to draw micro patterns of diffraction gratings with laser. Four types of fixed linear actuation parallel mechanisms are proposed for this purpose, and they are compared in terms of workspace and motion range by using a newly proposed evaluation index. The analysis results show that the delta type is the most appropriate for the application.