Integrated micro ring resonator displacement sensor for scanning probe microscopies (Englisch)
- Neue Suche nach: Kiyat, I.
- Neue Suche nach: Kocabas, C.
- Neue Suche nach: Aydinli, A.
- Neue Suche nach: Kiyat, I.
- Neue Suche nach: Kocabas, C.
- Neue Suche nach: Aydinli, A.
In:
Journal of Micromechanics and Microengineering
;
14
, 3
;
374-381
;
2004
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Integrated micro ring resonator displacement sensor for scanning probe microscopies
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Beteiligte:
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Erschienen in:Journal of Micromechanics and Microengineering ; 14, 3 ; 374-381
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Verlag:
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Erscheinungsdatum:2004
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Format / Umfang:8 Seiten, 10 Bilder, 1 Tabelle, 28 Quellen
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 14, Ausgabe 3
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