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PRINCE provides an environment for design and management of MEMS fabrication processes. To ensure that the results of the processing match the design the process flow has to be verified. The presented work is the first step in integrating process simulation tools into the PRINCE environment. A cellular automata approach was chosen and first tests have already shown promising results. It is expected that the usage of grid technology will improve the performance of the simulation in a way that the design process won't be interrupted by too much lag-time. Within the European project PROMENADE (Pr.No.507965) the link to commercial TCAD (process simulation) from SILVACO as a leading vendor will be established and process data from leading European MEMS companies (e.g. Robert Bosch GmbH) and institutes (e.g. IMEC) will be incorporated.