Sputter-assisted plasma CVD of polymer-like amorphous CNx:H films using supermagnetron plasma (Englisch)
- Neue Suche nach: Kinoshita, H.
- Neue Suche nach: Ikuta, R.
- Neue Suche nach: Sakurai, K.
- Neue Suche nach: Kinoshita, H.
- Neue Suche nach: Ikuta, R.
- Neue Suche nach: Sakurai, K.
In:
Thin Solid Films
;
515
, 9
;
4121-4124
;
2007
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Sputter-assisted plasma CVD of polymer-like amorphous CNx:H films using supermagnetron plasma
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Beteiligte:
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Erschienen in:Thin Solid Films ; 515, 9 ; 4121-4124
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Verlag:
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Erscheinungsdatum:2007
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Format / Umfang:4 Seiten, 17 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 515, Ausgabe 9
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