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Machining of precision parts and micro molds is generally regarded as an important key technology of the 21st Century. The need to produce micro components in a mass scale introduces new production requirements in terms of availability, cost-effectiveness and reliability. The growing markets of micro technologies and micro systems will give a high potential for engineering tasks in micro and precision mold manufacturing. Therefore, an overall optimum has to be achieved for micro manufacturing processes. The machining of down scaled structures has to be actively carried out within the field of process technologies, measuring and testing, and quality assurance as well as the production environment. Important technological advances in a number of disciplines are necessary for further advances including the development of ultra-precision processes, machines, and control systems which can achieve sub-micron tolerances and nanometer surface finishes as well as new analytical techniques that can observe, measure and provide 3-dimensional images of features at the sub-micrometer level. Main objective in research and development is to increase the quality and reliability of micro products and, therefore, actual research is focusing on aspects of tooling, materials and processes as well as the optimization of entire process chains. Tooling includes development of new enhanced materials and further improvement of geometry for cutting tools like milling and grinding tools and micro molds strongly affected and determined by the underlying scaling effects in micro manufacturing. To extend life time of tools as well as increase reproducibility and reliability of production facilities is the most severe point from the perspective of the processes involved. Nevertheless, it can be concluded that novel mechanical processes for machining and replication offer a great potential as enabling technologies in micro fabrication provided that a holistic view for the complete micro manufacturing process chain is adopted.