Piezoelectric coefficients of thin film aluminum nitride characterizations using capacitance measurements (Englisch)
- Neue Suche nach: Mahmoud Al Ahmad
- Neue Suche nach: Plana, R.
- Neue Suche nach: Mahmoud Al Ahmad
- Neue Suche nach: Plana, R.
In:
IEEE Microwave and Wireless Components Letters
;
19
, 3
;
140-142
;
2009
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Piezoelectric coefficients of thin film aluminum nitride characterizations using capacitance measurements
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Beteiligte:Mahmoud Al Ahmad ( Autor:in ) / Plana, R. ( Autor:in )
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Erschienen in:IEEE Microwave and Wireless Components Letters ; 19, 3 ; 140-142
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Verlag:
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Erscheinungsdatum:2009
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Format / Umfang:3 Seiten, 15 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 19, Ausgabe 3
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Table of contents| 2009
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IEEE Microwave and Wireless Components Letters publication information| 2009
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Editorial board| 2009