Enhancement of the crystalline quality of reactively sputtered yttria-stabilized zirconia by oxidation of the metallic target surface (Englisch)
- Neue Suche nach: Hana, S.
- Neue Suche nach: Nishioka, K.
- Neue Suche nach: Horita, S.
- Neue Suche nach: Hana, S.
- Neue Suche nach: Nishioka, K.
- Neue Suche nach: Horita, S.
In:
Thin Solid Films
;
517
, 20
;
5830-5836
;
2009
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Enhancement of the crystalline quality of reactively sputtered yttria-stabilized zirconia by oxidation of the metallic target surface
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Beteiligte:
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Erschienen in:Thin Solid Films ; 517, 20 ; 5830-5836
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Verlag:
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Erscheinungsdatum:2009
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Format / Umfang:7 Seiten, 46 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 517, Ausgabe 20
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