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The EELM process which is a novel process for micropatterning and microstructunng, is presented in this paper. When a laser beam is irradiated on a stainless steel surface, the characteristics of the surface are investigated by XPS and XRD analysis. It can be noted that the laser marking process results in the formation of thick oxide and the phase transformation of grain structures at the marked surface area. Due to these characteristics, the anodic dissolution rate of laser marked surface is substantially lower than that of the unmarked surface during electrochemical etching. So the laser marked surface can be temporarily used as a mask. For formation of the protective layer a laser masking process that was based on laser marking was successfully used instead of a photo lithography process. The micropattern was machined by single-step EELM. More over multilayered structures of various sizes that contained gridpatterned grooves were fabricated through multi-step EELM. Also a three-stoned tower and three-stoned tower array were fabricated successfully. Finally, a deep cavity with a depth of 55 micrometer was fabricated by multi-step EELM. The EELM process can be applied in various fields such as surface texturing and the fabrication of micromoulds or complex features.