Cubic boron nitride based metastable coatings and nanocomposites (Englisch)
- Neue Suche nach: Ulrich, Sven
- Neue Suche nach: Jian, Ye
- Neue Suche nach: Stueber, Michael
- Neue Suche nach: Ziebert, Carlos
- Neue Suche nach: Ulrich, Sven
- Neue Suche nach: Jian, Ye
- Neue Suche nach: Stueber, Michael
- Neue Suche nach: Ziebert, Carlos
In:
Thin Solid Films
;
518
, 5
;
1443-1450
;
2009
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Cubic boron nitride based metastable coatings and nanocomposites
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Beteiligte:Ulrich, Sven ( Autor:in ) / Jian, Ye ( Autor:in ) / Stueber, Michael ( Autor:in ) / Ziebert, Carlos ( Autor:in )
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Erschienen in:Thin Solid Films ; 518, 5 ; 1443-1450
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Verlag:
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Erscheinungsdatum:2009
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Format / Umfang:8 Seiten, 90 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:Adhäsion , Borverbindung , Beschichtung (Überzug) , Drei-Fünf-Verbindung , Eigenspannung , Ionenstrahleffekt , Nanoverbundwerkstoff , Plasma-CVD , Halbleiterwachstum , Halbleiterdünnschicht , Sputterabscheidung , Halbleiter mit großer Energielücke , Dünnschicht , Ionenbeschuss , Druckspannung , Magnetronzerstäubung , Bornitrid
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Datenquelle:
Inhaltsverzeichnis – Band 518, Ausgabe 5
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