Wafer-scale fabrication of penetrating neural microelectrode arrays (Englisch)
- Neue Suche nach: Bhandari, Rajmohan
- Neue Suche nach: Negi, Sandeep
- Neue Suche nach: Solzbacher, Florian
- Neue Suche nach: Bhandari, Rajmohan
- Neue Suche nach: Negi, Sandeep
- Neue Suche nach: Solzbacher, Florian
In:
Biomedical Microdevices. BioMEMS and Biomedical Nanotechnology
;
12
, 5
;
797-807
;
2010
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Wafer-scale fabrication of penetrating neural microelectrode arrays
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Weitere Titelangaben:Herstellung penetrierender neuronaler Mikroelektroden-Arrays im Wafermaßstab
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Beteiligte:
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Erschienen in:Biomedical Microdevices. BioMEMS and Biomedical Nanotechnology ; 12, 5 ; 797-807
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Verlag:
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Erscheinungsdatum:2010
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Format / Umfang:11 Seiten
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:Aspektverhältnis , Biokompatibilität , Einkristallsilicium , elektrische Eigenschaft , Elektroden-Array , Fertigungsverfahren , geometrische Eigenschaft , Iridiumoxid , Massenfertigung , MEMS (mikroelektromechanisches System) , Metallisieren , Mikroelektrode , Mikrofertigung , Nadelspitze , Nervenprothese , Neurologie , Neurostimulation , Parylen , p-Halbleiter , Photolack , Platinbeschichten , Qualitätssteigerung , Sägen , Sputtern , Titan , Toleranz , Verglasung (Produkt) , Wafer (Halbleiterplättchen) , Wolfram
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Datenquelle:
Inhaltsverzeichnis – Band 12, Ausgabe 5
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