Three-dimensional measurements of photo-curing process with photo-curable resin for UV-Nanoimprint by Micro-digital-Holographic-PTV (Englisch)
- Neue Suche nach: Satake, Shin-ichi
- Neue Suche nach: Sorimachi, Gaku
- Neue Suche nach: Kanai, Takahiro
- Neue Suche nach: Taniguchi, Jun
- Neue Suche nach: Unno, Noriyuki
- Neue Suche nach: Satake, Shin-ichi
- Neue Suche nach: Sorimachi, Gaku
- Neue Suche nach: Kanai, Takahiro
- Neue Suche nach: Taniguchi, Jun
- Neue Suche nach: Unno, Noriyuki
In:
Transactions of the ASME. Journal of Electronic Packaging
;
132
, 3
;
031003/1-031003/5
;
2010
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Three-dimensional measurements of photo-curing process with photo-curable resin for UV-Nanoimprint by Micro-digital-Holographic-PTV
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Beteiligte:Satake, Shin-ichi ( Autor:in ) / Sorimachi, Gaku ( Autor:in ) / Kanai, Takahiro ( Autor:in ) / Taniguchi, Jun ( Autor:in ) / Unno, Noriyuki ( Autor:in )
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Erschienen in:Transactions of the ASME. Journal of Electronic Packaging ; 132, 3 ; 031003/1-031003/5
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Verlag:
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Erscheinungsdatum:2010
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Format / Umfang:5 Seiten, 5 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 132, Ausgabe 3
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