The Effect of Surface Chemistry on MEMS Stiction in an Ultralow-humidity Environment (Englisch)
- Neue Suche nach: Sammoura, F.
- Neue Suche nach: Hancer, M.
- Neue Suche nach: Yang, Ken
- Neue Suche nach: Sammoura, F.
- Neue Suche nach: Hancer, M.
- Neue Suche nach: Yang, Ken
In:
Journal of Microelectromechanical Systems
;
20
, 2
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522-526
;
2011
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:The Effect of Surface Chemistry on MEMS Stiction in an Ultralow-humidity Environment
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Beteiligte:
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Erschienen in:Journal of Microelectromechanical Systems ; 20, 2 ; 522-526
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Verlag:
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Erscheinungsdatum:2011
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Format / Umfang:5 Seiten, 14 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 20, Ausgabe 2
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Table of contents| 2011
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Journal of Microelectromechanical Systems publication information| 2011
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Call for papers for MMB2011| 2011