Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen (Englisch)
- Neue Suche nach: Diomede, P.
- Neue Suche nach: Longo, S.
- Neue Suche nach: Economou, D.J.
- Neue Suche nach: Capitelli, M.
- Neue Suche nach: Diomede, P.
- Neue Suche nach: Longo, S.
- Neue Suche nach: Economou, D.J.
- Neue Suche nach: Capitelli, M.
In:
Journal of Physics D: Applied Physics
;
45
, 17
;
175204/1-175204/14
;
2012
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen
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Beteiligte:Diomede, P. ( Autor:in ) / Longo, S. ( Autor:in ) / Economou, D.J. ( Autor:in ) / Capitelli, M. ( Autor:in )
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Erschienen in:Journal of Physics D: Applied Physics ; 45, 17 ; 175204/1-175204/14
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Verlag:
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Erscheinungsdatum:2012
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Format / Umfang:14 Seiten, 102 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 45, Ausgabe 17
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