Effect of non-Maxwellian electron energy distribution functions on the simulation of an inductively coupled Ar–Hg discharge (Englisch)
- Neue Suche nach: Liu, Yang
- Neue Suche nach: Zissis, Georges
- Neue Suche nach: Chen, Yuming
- Neue Suche nach: Liu, Yang
- Neue Suche nach: Zissis, Georges
- Neue Suche nach: Chen, Yuming
In:
Plasma Sources Science and Technology
;
22
, 3
;
035002/1-035002/11
;
2013
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Effect of non-Maxwellian electron energy distribution functions on the simulation of an inductively coupled Ar–Hg discharge
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Beteiligte:
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Erschienen in:Plasma Sources Science and Technology ; 22, 3 ; 035002/1-035002/11
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Verlag:
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Erscheinungsdatum:2013
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Format / Umfang:11 Seiten, 48 Quellen
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 22, Ausgabe 3
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