Effects of duty cycle and oxygen flow rate on the formation and properties of vanadium oxide films deposited by pulsed reactive sputtering (Englisch)
- Neue Suche nach: Dong, Xiang
- Neue Suche nach: Wu, Zhiming
- Neue Suche nach: Xu, Xiangdong
- Neue Suche nach: Wang, Tao
- Neue Suche nach: Jiang, Yadong
- Neue Suche nach: Dong, Xiang
- Neue Suche nach: Wu, Zhiming
- Neue Suche nach: Xu, Xiangdong
- Neue Suche nach: Wang, Tao
- Neue Suche nach: Jiang, Yadong
In:
Vacuum
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104
;
97-104
;
2014
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Effects of duty cycle and oxygen flow rate on the formation and properties of vanadium oxide films deposited by pulsed reactive sputtering
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Beteiligte:Dong, Xiang ( Autor:in ) / Wu, Zhiming ( Autor:in ) / Xu, Xiangdong ( Autor:in ) / Wang, Tao ( Autor:in ) / Jiang, Yadong ( Autor:in )
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Erschienen in:Vacuum ; 104 ; 97-104
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Verlag:
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Erscheinungsdatum:2014
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Format / Umfang:8 Seiten, 46 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Editorial Board & Publication Information| 2014