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The magnetic properties and microstructure of Co-CoO evaporated film, which is one of the most promising candidates for perpendicular magnetic recording media, are examined. Large perpendicular anisotropy and coercivity are caused by introducing oxygen into a Co film. The examined films consist of a mixture of metallic hexagonal closed packing Co crystallites and Co mono-oxide crystallites of a columnar structure 10 nm wide. The c-axis of the Co crystallites has a tendency to orient perpendicularly to the film plane. To investigate the origin of the perpendicular anisotropy, the magnetic anisotropy due to the columnar structure is calculated and compared with experimental results. As a result, it is found that the dependence of the perpendicular anisotropy on saturation magnetization can be explained by taking into account both the magnetocrystalline and shape anisotropy.