Mechanical-thermal noise in micromachined acoustic and vibration sensors (Englisch)
- Neue Suche nach: Gabrielson, T.B.
- Neue Suche nach: Gabrielson, T.B.
In:
IEEE Transactions on Electron Devices
;
40
, 5
;
903-909
;
1993
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Mechanical-thermal noise in micromachined acoustic and vibration sensors
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Weitere Titelangaben:Mechanisch-thermische Störung in mikromaschinellen Akustik- und Vibrationssensoren
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Beteiligte:Gabrielson, T.B. ( Autor:in )
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Erschienen in:IEEE Transactions on Electron Devices ; 40, 5 ; 903-909
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Verlag:
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Erscheinungsdatum:1993
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Format / Umfang:7 Seiten, 5 Bilder, 32 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 40, Ausgabe 5
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