-
17a87 Microcrystalline Silicon Seeds from SiCl~4/H~2 and SiH~2Cl~2/H~2 Plasmas and Their Function on Crystallization of Amorphous Silicon Thin Films
British Library Conference Proceedings | 2001| -
17a82 Control of High-Energy Electron Density by Grid Bias in Magnetron RF Discharge
British Library Conference Proceedings | 2001| -
17a75 Studies of Polymorphous Si Thin Films Deposited by Radiofrequency Dusty Plasmas
British Library Conference Proceedings | 2001| -
17a68 Development of H-assisted Plasma CVD Reactor for Cu Interconnects
British Library Conference Proceedings | 2001| -
17a51 Time-Dependent Investigation of the Conversion Process of Chlorinated Hydrocarbons in Pulsed Non-Equilibrium Hydrogen Plasmas
British Library Conference Proceedings | 2001| -
17a41 Oxidation Enhanced by Low Energy Plasma at Pressure Boundary Materials of Nuclear Equipment
British Library Conference Proceedings | 2001| -
17a24 Heating Mode Transition in Capacitive RF Ar/CF~4 Plasmas
British Library Conference Proceedings | 2001| -
17a17 Electron-Temperature Control by Shifting Phase of Radio Frequency Voltage Applied to a Grid
British Library Conference Proceedings | 2001| -
17a11 Development of Low Power 13.56Mhz Ion Source Family
British Library Conference Proceedings | 2001| -
17p65 The Isotope Anomaly in an ECR Ion Source in ^1^5N/^1^4N Mixtures
British Library Conference Proceedings | 2001| -
17p44 Plasma-bridged Gap Switch Using the High-Pressure Laser Plasma Produced by XeCl Excimer Laser
British Library Conference Proceedings | 2001| -
17p17 Simulation of an Argon Glow Discharge Surrounded by a Conducting Wall
British Library Conference Proceedings | 2001| -
17p2 Initial Stage Dynamics of N2/O2 Glow Discharges with a Reactive Cathode
British Library Conference Proceedings | 2001| -
17a86 Low-Dielectric Constant Fluorocarbon Films Deposited in Hexafluorobenzene (C~6F~6) Inductively Coupled Plasmas
British Library Conference Proceedings | 2001| -
17a84 Effects of Electrons and Positivie Ions on Dissociation of Polyethylene in Argon Plasma
British Library Conference Proceedings | 2001| -
17a81 Deposition of Etch Products and Profile Evolution during Overetch of Polysilicon Gate Etching in High-Density HBr/O~2 Plasmas
British Library Conference Proceedings | 2001| -
17a71 Behavior of a Particle Injected in Ion Sheath of Electropositive and Electronegative Gas Discharges
British Library Conference Proceedings | 2001| -
17a44 Calculated Ion and Neutral Fluxes to the Surface in Plasma Display Panels Cells for Different Xe/Ne Gas Mixtures
British Library Conference Proceedings | 2001| -
17a40 Beam Experiment on Fluorocarbon-Based Etching of Si and SiO~2 Surfaces
British Library Conference Proceedings | 2001| -
17a34 Effect of Surface Material and Temperature on a Heat Power Transferred with Ion Flux from Low-pressure Plasmas
British Library Conference Proceedings | 2001| -
17a31 Effects of Rotating Helical Magnetic Field on Hydrogen Recycling in Long Time Tokamak Discharge
British Library Conference Proceedings | 2001| -
17a1 Absorption of Lower and Upper Hybrid Pump Waves in Inhomogeneous Plasma
British Library Conference Proceedings | 2001| -
VUV to UV Laser Spectroscopy of Atomic Species in Processing Plasmas
British Library Conference Proceedings | 2001| -
17p71 Mass Spectrometry in Weakly-Ionized Plasmas Using a GM-Cryocooled Superconducting Magnet
British Library Conference Proceedings | 2001| -
17p59 Stationary Plasma Thruster (SPT) Performance under Operation on Kripton
British Library Conference Proceedings | 2001| -
17p55 Experimental Study on ICRF Heating for a Plasma Propulsion System
British Library Conference Proceedings | 2001| -
17p29 Generation and Properties of Self-Sustained Volume Discharges in Strongly Electronegative Gases
British Library Conference Proceedings | 2001| -
17p26 Structure Observed in Measured Bi-Maxwellian Electron Energy Distribution Functions in Direct Current Oxygen Reflex Plasmas
British Library Conference Proceedings | 2001| -
17p3 Spectroscopic Investigations of the Plasma of a Pseudospark Discharge
British Library Conference Proceedings | 2001| -
17a83 Electron Temperature Control by Admixing Rare Gas in High Density Plasma
British Library Conference Proceedings | 2001| -
17a77 Preparation of Hydro-Oxygenated Amorphous TiOx Thin Film by Remote Plasma Enhanced Chemical Vapor Deposition in Hydrogen/Oxygen Mixture Gas
British Library Conference Proceedings | 2001| -
17a76 Diagnostics of Catalytic and Chemical Surface Processes in Nonequilibrium Plasmas Using Scanning Calorimetry
British Library Conference Proceedings | 2001| -
17a55 Railway Wheel Resource under Plasma Hardening and Nitriding Treatment
British Library Conference Proceedings | 2001| -
17a39 Effects of High Energy Particles on Nucleation Processes of Mercury Atoms in Plasma
British Library Conference Proceedings | 2001| -
17a13 Effects of Pulse Repetition and Duration on the Electron Energy of Pulsed RF Discharge in Nitrogen
British Library Conference Proceedings | 2001| -
17a9 Penning Effect in Capacitively Coupled RF Breakdown of Neon-Nitrogen Gas Mixture
British Library Conference Proceedings | 2001| -
17a6 Characteristics of Lower Hybrid Wave Plasma Source for Ashing Processes
British Library Conference Proceedings | 2001| -
Low Temperature Plasma Diagnostics by Laser Spectroscopy
British Library Conference Proceedings | 2001| -
17p73 Determination of ArII and NII Transition Probabilities Using Excited State Populations in Highly Ionized Plasmas
British Library Conference Proceedings | 2001| -
17p68 Ion Source Based on Penning Cell with Improved Current Efficiency
British Library Conference Proceedings | 2001| -
17p61 Basic Characteristics of the Plasma near the Hall Thruster of the Spacecraft
British Library Conference Proceedings | 2001| -
17p47 Spectroscopic Characterization and Laser-Induced Changes of Ionization State in Laser-Ablation Plasma
British Library Conference Proceedings | 2001| -
17p39 Electron Acceleration in the Anode Fall of Glow Discharge with a Hot Cathode
British Library Conference Proceedings | 2001| -
17p16 Electrostatic Fluctuations in a DC Planar Magnetron Plasma
British Library Conference Proceedings | 2001| -
17p15 Spatially Resolved Kinetics of the Electrons in the Anode Region of Glow Discharges
British Library Conference Proceedings | 2001| -
17p11 The Study of the Plasma Formation which Appears in the Contact Region between Two Negative Glow Discharges
British Library Conference Proceedings | 2001| -
17a78 High Rate Deposition of Micro- and Poly-Crystalline Silicon Films by a Surface Wave Plasma
British Library Conference Proceedings | 2001| -
17a69 Deposition of a-Axis Oriented ZnO Thin Films and Their Crystallographic and Optical Properties
British Library Conference Proceedings | 2001|
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