-
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Samarium-doped TiO2 photoanodes for the molecular devices for solar energy conversion
British Library Conference Proceedings | 2021| -
Line edge roughness reduction for 7nm metals [10587-7]
British Library Conference Proceedings | 2018 -
Simulations and first manufacturing steps of a fully integrated WDM-element in the visible spectrum [8884-71]
British Library Conference Proceedings | 2013| -
Development of a high specification coating [8884-42]
British Library Conference Proceedings | 2013| -
Conformal window manufacturing process development and demonstration for polycrystalline materials [8884-24]
British Library Conference Proceedings | 2013| -
Metrology and deep learning integrated solution to drive OPC model accuracy improvement
British Library Conference Proceedings | 2019| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Modeling of dynamic image performance for lithographic projection lens
British Library Conference Proceedings | 2019| -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021|
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