Erscheinungsjahr
Fach
Format
Lizenz
Synonyme wurden verwendet für: Elektronenstrahllithografie
Suche ohne Synonyme: keywords:("Elektronenstrahllithografie")
Verwendete Synonyme:
- e beam lithography
- electron beam lithography
- elektronenlithografie
- elektronenlithographie
- elektronenstrahllithographie
-
Stooped Nanohairs: Geometry‐Controllable, Unidirectional, Reversible, and Robust Gecko‐like Dry Adhesive
Wiley | 2009|Schlagwörter: Electron‐beam lithography -
Patterning Magnetic Regions in Hydrogenated Graphene Via E‐Beam Irradiation
Wiley | 2015|Schlagwörter: e‐beam lithography -
Electron Beam Lithography of Magnetic Skyrmions
Wiley | 2020|Schlagwörter: electron beam lithography -
Formation of ferroelectic domain stuctures in $ LiTaO_{3} $ crystals formed by direct electron-beam repolarization
Online Contents | 2014|Schlagwörter: electron-beam lithography -
Electron Beam Projection Nanopatterning Using Crystal Lattice Images Obtained from High Resolution Transmission Electron Microscopy
Wiley | 2007|Schlagwörter: Electron‐beam lithography -
Characterization of e-beam patterned grating structures using Mueller matrix based scatterometry
SPIE | 2013|Schlagwörter: e-beam lithography -
Guided Formation of a Sub‐10 nm Silicide Dot Array on an Area Patterned by Electron‐Beam Lithography
Wiley | 2007|Schlagwörter: Electron‐beam lithography -
Controlling gold nanoparticle assembly on electron beam-reduced nitrophenyl self-assembled monolayers via electron dose
Elsevier | 2013|Schlagwörter: Electron beam lithography -
Stitch aware detailed placement for multiple E-beam lithography
Elsevier | 2017|Schlagwörter: Multiple electron beam lithography -
Fabrication and Structural Evaluation of Beaded Inorganic Nanostructures Using Soft‐Electron‐Beam Lithography
Wiley | 2007|Schlagwörter: Electron‐beam lithography -
Electron beam patterned Nafion membranes for DMFC applications
Elsevier | 2012|Schlagwörter: Electron beam lithography -
Direct growth of sub-micron diamond structures
Elsevier | 2011|Schlagwörter: Electron beam lithography -
Process monitoring of electron-beam based writing of semiconductor mask patterns
Elsevier | 2022|Schlagwörter: Electron beam lithography -
Fabrication of soft x-ray zone plates using carbon, titanium as sacrificial layer
Elsevier | 2016|Schlagwörter: Electron beam lithography -
Review of metal-containing resists in electron beam lithography: perspectives for extreme ultraviolet patterning
Freier ZugriffSPIE | 2022|Schlagwörter: electron beam lithography -
Fabrication of sub-100nm IDT SAW devices on insulating, semiconducting and conductive substrates
Elsevier | 2011|Schlagwörter: E-beam lithography -
Micro-contacted self-assembled tungsten oxide nanorods for hydrogen gas sensing
Elsevier | 2016|Schlagwörter: Electron beam lithography -
Polymeric Nanohairs: Stooped Nanohairs: Geometry‐Controllable, Unidirectional, Reversible, and Robust Gecko‐like Dry Adhesive (Adv. Mater. 22/2009)
Wiley | 2009|Schlagwörter: Electron‐beam lithography -
Absolute two-dimensional sub-micron metrology for electron beam lithography
A calibration theory with applicationsElsevier | 1985|Schlagwörter: electron beam lithography -
Rapid Fabrication of Uniformly Sized Nanopores and Nanopore Arrays for Parallel DNA Analysis
Wiley | 2006|Schlagwörter: Electron‐beam lithography -
Study on physical model of resist surface charge in multi-beam mask writer and single variable-shaped beam writers
SPIE | 2021|Schlagwörter: electron beam lithography -
Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
American Institute of Physics | 2013|Schlagwörter: electron beam lithography -
High-fidelity fabrication of plasmonic nanoholes array via ion-beam planarization for extraordinary transmission applications
Elsevier | 2020|Schlagwörter: Electron-beam lithography -
Combinatorial Optimization of a Molecular Glass Photoresist System for Electron Beam Lithography
Wiley | 2011|Schlagwörter: electron beam lithography -
Full‐Thickness Characterization of Plasma Polymerized Hexane Films Irradiated by an Electron Beam
Wiley | 2012|Schlagwörter: electron beam lithography -
Dopant based electron beam lithography in CuxTiSe2
Elsevier | 2010|Schlagwörter: Electron beam lithography -
Water developable non-chemically amplified photoresist for electron beam and extreme ultraviolet lithography
SPIE | 2022|Schlagwörter: e-beam lithography -
Interactions of Serum Derived Proteins with Sub‐Micrometer Structured Surfaces
Wiley | 2014|Schlagwörter: electron beam lithography -
Fabrication of self-aligned, nanoscale, complex oxide varactors
SPIE | 2015|Schlagwörter: e-beam lithography -
Cross Sections of Scattering Processes in Electron-Beam Lithography
Springer Verlag | 2023|Schlagwörter: electron beam lithography -
Numerical simulation of hollow waveguide arrays as polarization converting elements and experimental verification
Online Contents | 2017|Schlagwörter: Electron beam lithography -
Formation of ferroelectic domain stuctures in LiTaO3 crystals formed by direct electron-beam repolarization
Springer Verlag | 2014|Schlagwörter: electron-beam lithography -
Unveiling Active Sites for the Hydrogen Evolution Reaction on Monolayer MoS2
Wiley | 2017|Schlagwörter: e‐beam lithography -
3D Nanostar Dimers with a Sub‐10‐nm Gap for Single‐/Few‐Molecule Surface‐Enhanced Raman Scattering
Wiley | 2014|Schlagwörter: electron‐beam lithography -
e‐Beam Nanopatterned Photo‐Responsive Bacteriorhodopsin‐Containing Hydrogels
Wiley | 2007|Schlagwörter: Electron‐beam lithography -
Surface morphology and structural analysis of fluorocarbon nano-rings formation through EBL and SiO2 plasma etching
Elsevier | 2011|Schlagwörter: Electron beam lithography -
Two-Stage Layout Decomposition for Hybrid E-Beam and Triple Patterning Lithography
Online Contents | 2017|Schlagwörter: e-beam lithography -
Direct Nanopatterning of 3D Chemically Active Structures for Biological Applications
Wiley | 2007|Schlagwörter: Electron‐beam lithography -
Stabilizing γ‐MgH2 at Nanotwins in Mechanically Constrained Nanoparticles
Wiley | 2021|Schlagwörter: electron beam lithography -
Free-standingC 60nanowire fabricated usingXe F 2sacrificial dry etching
SPIE | 2009|Schlagwörter: electron beam lithography -
Technischer Kurzbericht zum MNPQ-Projekt "Modellierungsinfrastruktur für die qualitative Verbesserung der Ergebnisse ultrapräziser Elektronenlithographie-Anlagen bei Strukturgrößen von 22 nm und darunter" : (Kurzname ModELitho)
TIBKAT | 2011|Schlagwörter: Elektronenstrahllithografie -
Optimized lithography process for through-silicon vias-fabrication using a double-sided (structured) photomask for mask aligner lithography
Freier ZugriffSPIE | 2015|Schlagwörter: e-beam lithography -
Row-structure stencil planning approaches for E-beam lithography with overlapped characters
Elsevier | 2016|Schlagwörter: E-beam lithography -
Fabrication and performance evaluation of an in-membrane micro-fuel cell
Elsevier | 2013|Schlagwörter: Electron beam lithography -
Characterization of charging-induced pattern positioning errors in advanced mask making
SPIE | 2016|Schlagwörter: e-beam lithography -
Electron-beam lithography with character projection technique for high-throughput exposure with line-edge quality control
SPIE | 2016|Schlagwörter: electron-beam lithography -
Subwavelength transmission gratings for polarization separation in the infrared
SPIE | 2016|Schlagwörter: electron beam lithography -
Fabrication of high quality two-dimensional photonic crystal mask layer patterns
Online Contents | 2009|Schlagwörter: Electron beam lithography -
A micro-spectroscopy study on the influence of chemical residues from nanofabrication on the nitridation chemistry of Al nanopatterns
Elsevier | 2012|Schlagwörter: e-Beam lithography -
30‐4: Low‐voltage Driving Liquid Crystal Lens with Precise Control of Pretilt Angles using E‐beam Lithography
Wiley | 2016|Schlagwörter: E‐beam lithography
Meine Suche schicken an (beta)
Schicken Sie ihre Suchanfrage (Suchterm ohne Filter) an andere Datenbanken, Portale und Kataloge, um ggf. weitere interessante Treffer zu finden:
Dimensions ist eine Datenbank für Abstracts und Zitate, die Informationen zu Forschungsförderungen mit daraus resultierenden Veröffentlichungen, Studien und Patenten verknüpft.
Im TIB AV-Portal können audiovisuelle Medien aus Wissenschaft und Lehre recherchiert und eigene wissenschaftliche Videos publiziert werden.
Im FID move kann nach fachspezifischer Literatur, Forschungsdaten und weitere Informationen aus der Mobilitäts- und Verkehrsforschung gesucht werden.
Der Open Research Knowledge Graph liefert strukturiert beschriebene Forschungsinhalte und macht diese vergleichbar.
Frei zugänglicher Ausschnitt der Verbunddatenbank K10plus des GBV und des SWB mit für die Fernleihe und Direktlieferdienste relevanten Materialien.