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Data for "3D micro printed capillary electrospray thruster with a fully modular integrated extraction electrode"
Freier ZugriffDataCite | 2023|Schlagwörter: 3D Microlithography -
TEM validation of CD AFM image reconstruction [6518-135]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Accuracy in optical image modeling [6518-39]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Development of advanced mask inspection optics with transmitted and reflected light image acquisition [6518-64]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Detailed analysis of capability and limitations of CD scatterometry measurements for 65- and 45-nm nodes [6518-30]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Fundamental limits of optical critical dimension metrology: a simulation study (Invited Paper) [6518-29]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Image simulation and surface reconstruction of undercut features in atomic force microscopy [6518-36]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Influence of resist process on the best focus shift due to lens spherical aberration [4000-143]
British Library Conference Proceedings | 2000|Schlagwörter: optical microlithography, microlithography -
Variable-threshold optical proximity correction (OPC) models for high-performance 0.18-mum process [4000-110]
British Library Conference Proceedings | 2000|Schlagwörter: optical microlithography, microlithography -
Exposure latitude analysis for dense line and space patterns by using diffused aerial image model [4000-66]
British Library Conference Proceedings | 2000|Schlagwörter: optical microlithography, microlithography -
Predicting electrical measurements by applying scatterometry to complex spacer structures [6518-75]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Optimization of lithography process to improve image deformation of contact hole sub-90 nm technology node [6518-146]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
High-resolution in-die metrology using beam profile reflectometry and ellipsometry [6518-123]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Device metrology with high-performance scanning ion beams [6518-52]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Modeling the effect of line profile variation on optical critical dimension metrology [6518-34]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
3D anisotropic semiconductor grooves measurement simulations (scatterometry) using FDTD methods [6518-168]
British Library Conference Proceedings | 2007|Schlagwörter: Microlithography -
Properties and potential of VUV lithographic thin film materials [4000-170]
British Library Conference Proceedings | 2000|Schlagwörter: optical microlithography, microlithography -
Fluoropolymers for 157-nm lithography: optical properties from VUV absorbance and ellipsometry measurements [4000-164]
British Library Conference Proceedings | 2000|Schlagwörter: optical microlithography, microlithography -
Effects of off-axis illumination and scattering-bar optical proximity correction on the impact of lens aberration on 130-nm polygate mask: a simulation study [4000-175]
British Library Conference Proceedings | 2000|Schlagwörter: optical microlithography, microlithography -
Phase-mask effects by dark-field lithography [4000-34]
British Library Conference Proceedings | 2000|Schlagwörter: optical microlithography, microlithography
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