Erscheinungsjahr
Fach
Format
Lizenz
Sprache
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Optochemical sensor-based systems for the analysis of cell metabolism and bioenergetics: an overview
British Library Conference Proceedings | 2023| -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Semi-analytical computation method for propagation loss of hollow-core anti-resonant fiber
British Library Conference Proceedings | 2023| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Constructing freeform source through the combination of neural network and binary ant colony optimization [10147-58]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Estimation of pore sizes using laser absorption in molecular oxygen gas enclosed in mesoporous alumina
British Library Conference Proceedings | 2019| -
Elimination of temperature cross-sensitivity for polymer FBG-based humidity sensor by gamma radiation treatment
British Library Conference Proceedings | 2023| -
Nucleolin protein-mediated specific detection of circulating cancer cells by U-bent optical fiber sensor
British Library Conference Proceedings | 2023| -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Analysis of the shaft behaviour in aircraft engines using tip clearance data and custom designed laser sensors
British Library Conference Proceedings | 2021| -
Qualification of small alignment mark by on-product overlay performance
British Library Conference Proceedings | 2021|
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