Synonyme wurden verwendet für: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Suche ohne Synonyme: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Verwendete Synonyme:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Verwendete Synonyme:
- fur
Verwendete Synonyme:
- angewandte optik
- optische technik
- technische optik
Verwendete Synonyme:
- gesellschaft
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Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The ArF laser for the next generation multiple-patterning immersion lithography supporting green operations and leading edge processes [10147-44]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Experimental characterization of NTD resist shrinkage [10147-14]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Improving the topography performance of ion implantation resist [10147-48]
British Library Conference Proceedings | 2017 -
Full chip hierarchical inverse lithography: a solution with perfect symmetry [10147-20]
British Library Conference Proceedings | 2017 -
Eliminate the vibration defect for laser interference lithography using an optical chopper system [10147-51]
British Library Conference Proceedings | 2017 -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Resist 3D aware mask solution with ILT for hotspot repair [10147-25]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Spectrally effective mitigation of polarization mode dispersion in optical fibers
British Library Conference Proceedings | 2023| -
Statistical learning method for modal analysis of optical fibers
British Library Conference Proceedings | 2023| -
Temperature-dependence of cross-relaxation coefficient of the thulium-doped silica fibers
British Library Conference Proceedings | 2023| -
Specialty fiber fabrication using carbon monoxide laser heating
British Library Conference Proceedings | 2023| -
Humidity responsivity of CYTOP-XYLEX fibre Bragg grating sensors
British Library Conference Proceedings | 2023| -
Concept for a passive athermalization of additively manufactured and monolithic mounting structures
British Library Conference Proceedings | 2023| -
Ultra-low numerical aperture counter-propagating intracavity optical tweezers
British Library Conference Proceedings | 2023| -
Femtosecond inscription of a spectral array of four fiber Bragg gratings at the same spot, using a single uniform phase-mask
British Library Conference Proceedings | 2023| -
Electrical characterization of plasmonic nanopores excited with light
British Library Conference Proceedings | 2023| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
A physical model for innovative laser direct write lithography [10147-28]
British Library Conference Proceedings | 2017 -
The ultra-violet partial coherence modulation transfer function for lithography [10147-57]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Development of the next-generation ArF excimer laser with ultra-narrow stable spectral bandwidth for multiple patterning immersion lithography [10147-59]
British Library Conference Proceedings | 2017 -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Fiber management for high-density connectivity In co-packaged switches
British Library Conference Proceedings | 2022| -
Inverse designed broadband on-chip photonic couplers and polarization-independent wavelength demultiplexing
British Library Conference Proceedings | 2022| -
Glass-molded optical interposers for wafer scale photonic integrated circuit packaging in 800G modules and co-packaged optics
British Library Conference Proceedings | 2022| -
Chip-to-chip optical interconnect using direct optical wire bonding
British Library Conference Proceedings | 2022| -
Optical phased array based on subwavelength grating antennas
British Library Conference Proceedings | 2022| -
Transceiver circuits for high-baudrate optical interconnects
British Library Conference Proceedings | 2022| -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Compact modeling for the negative tone development processes [10147-63]
British Library Conference Proceedings | 2017 -
Interlayer verification methodology for multi-patterning processes [10147-18]
British Library Conference Proceedings | 2017 -
Performance analyses of plasmonic lithography [10147-29]
British Library Conference Proceedings | 2017 -
FSO link attenuation measurement in extreme winter conditions for secure 5G applications
British Library Conference Proceedings | 2023|
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