Erscheinungsjahr
Fach
Format
Lizenz
Sprache
-
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
New design and improvements of an MR-compatible respiratory fiber-optic sensor
British Library Conference Proceedings | 2023| -
Optical sensor for NO2 gas detection using an external cavity diode laser
British Library Conference Proceedings | 2023| -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Stokes polarimeter using vector diffractive optical elements
British Library Conference Proceedings | 2023| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Reflectance biosensor platform using residual-layer-free nanoimprint lithography
British Library Conference Proceedings | 2023| -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Bending fiber sensor based on capillary hollow-core fiber
British Library Conference Proceedings | 2023| -
Functionalization of nanostructured surfaces for optical sensor platforms
British Library Conference Proceedings | 2023| -
Optimal snapshot full-Stokes imaging polarimeter in the visible band based on division-of-aperture
British Library Conference Proceedings | 2023| -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Phase-frequency time-gated reflectometry for absolute measurements
British Library Conference Proceedings | 2021| -
Stabilizing Brillouin fiber laser for applications in distributed BOTDA sensing
British Library Conference Proceedings | 2021| -
Research of UV radiometer based on fiber spectroradiometer
British Library Conference Proceedings | 2021| -
Permeable diffractive optical elements for real-time sensing of running fluids
British Library Conference Proceedings | 2023| -
Automated atrial flutter detection using photoplethysmography
British Library Conference Proceedings | 2023| -
Improvement of image characteristics of intraoral and panoramic radiographs by utilizing OCT as a control method
British Library Conference Proceedings | 2023| -
Single-particle sensing capabilities of cylindrical microresonators based on optical fibers
British Library Conference Proceedings | 2021| -
Principles of experimental research of sensitivity inhomogeneity of matrix sensors
British Library Conference Proceedings | 2021| -
Advanced ILT solutions to manufacture photonics designs
British Library Conference Proceedings | 2021| -
Surface-enhanced sensitivity from tunable plasmonic nanostructures arrays
British Library Conference Proceedings | 2021| -
Fibre Bragg grating inscription into a seven core fibre and its application as a vector bending sensor
British Library Conference Proceedings | 2021| -
Determination of Stokes velocities and sedimentation rate by a photonic resonant surface signal
British Library Conference Proceedings | 2021| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Design of single-polarization single-mode photonic nanowire [9170-42]
British Library Conference Proceedings | 2014|
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