Erscheinungsjahr
Medientyp
Fach
Format
Lizenz
Sprache
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In-line Raman spectroscopy for stacked nanosheet device manufacturing
British Library Conference Proceedings | 2021| -
High-precision ultrashort pulsed laser processing of metal foils using an advanced multibeam optic
British Library Conference Proceedings | 2020| -
Investigating process variability at ppm level using advanced massive eBeam CD metrology and contour analysis
British Library Conference Proceedings | 2019| -
Temperature field simulation on Ti6Al4V and lnconel718 heated by continuous infrared laser [9281-120]
British Library Conference Proceedings | 2014| -
Research development of thermal aberration in 193nm lithography exposure system [9283-32]
British Library Conference Proceedings | 2014| -
Uncertainties evaluations in the ray-tracing algorithm based on Monte Carlo method [9283-9]
British Library Conference Proceedings | 2014| -
Study on optical polishing experiment of zerodur mirror [9281-66]
British Library Conference Proceedings | 2014| -
Lightening techniques applied in reflect mirror [9281-122]
British Library Conference Proceedings | 2014| -
Effect of elastic modulus of PMMA films on its machinability by AFM-based nanoscratching method [9283-10]
British Library Conference Proceedings | 2014| -
Scatterometry performance improvement by parameter and spectrum feed-forward [9050-100]
British Library Conference Proceedings | 2014| -
Enhanced optical CD metrology by hybridization and azimuthal scatterometry [9050-50]
British Library Conference Proceedings | 2014| -
Axle counter for high-speed railway based on fibre Bragg grating sensor and algorithm optimization for peak searching [9285-5]
British Library Conference Proceedings | 2014| -
The tunable property of complementary frequency selective surface with rotationally symmetric element [9285-2]
British Library Conference Proceedings | 2014| -
Comparison of the sensitive property between soman and its simulant DMMP by hydrogen-bond acidic polymer coated SAW sensor [9285-15]
British Library Conference Proceedings | 2014| -
Fault tolerance control of phase current in permanent magnet synchronous motor control system [9285-21]
British Library Conference Proceedings | 2014| -
An improved gradient-integral method with hybrid iteration for surface measurement of free-form large astronomical mirrors [9282-47]
British Library Conference Proceedings | 2014| -
Three dimensional detection of rail shape based on self-adaptive filtering [9282-28]
British Library Conference Proceedings | 2014| -
Metrology research on PDMS phantoms for evaluating resolution performance of OCT systems [9282-55]
British Library Conference Proceedings | 2014| -
Optimized imaging polarimeter for measuring polarization properties of hyper number aperture lithography tools [9282-108]
British Library Conference Proceedings | 2014|
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