-
17a86 Low-Dielectric Constant Fluorocarbon Films Deposited in Hexafluorobenzene (C~6F~6) Inductively Coupled Plasmas
British Library Conference Proceedings | 2001| -
17a84 Effects of Electrons and Positivie Ions on Dissociation of Polyethylene in Argon Plasma
British Library Conference Proceedings | 2001| -
17a81 Deposition of Etch Products and Profile Evolution during Overetch of Polysilicon Gate Etching in High-Density HBr/O~2 Plasmas
British Library Conference Proceedings | 2001| -
17a71 Behavior of a Particle Injected in Ion Sheath of Electropositive and Electronegative Gas Discharges
British Library Conference Proceedings | 2001| -
17a44 Calculated Ion and Neutral Fluxes to the Surface in Plasma Display Panels Cells for Different Xe/Ne Gas Mixtures
British Library Conference Proceedings | 2001| -
17a40 Beam Experiment on Fluorocarbon-Based Etching of Si and SiO~2 Surfaces
British Library Conference Proceedings | 2001| -
17a34 Effect of Surface Material and Temperature on a Heat Power Transferred with Ion Flux from Low-pressure Plasmas
British Library Conference Proceedings | 2001| -
17a31 Effects of Rotating Helical Magnetic Field on Hydrogen Recycling in Long Time Tokamak Discharge
British Library Conference Proceedings | 2001| -
17a1 Absorption of Lower and Upper Hybrid Pump Waves in Inhomogeneous Plasma
British Library Conference Proceedings | 2001| -
VUV to UV Laser Spectroscopy of Atomic Species in Processing Plasmas
British Library Conference Proceedings | 2001| -
17p77 Microwave Heating of Pure Metal Arc Plasma under High Vacuum
British Library Conference Proceedings | 2001| -
17p75 Electron Acceleration by an Oscillating Electrostatic Potential
British Library Conference Proceedings | 2001| -
17p52 Solitary Electric Potential Hump Formation, Trapping Electron Plasma in Magnetised Conductive Tube
British Library Conference Proceedings | 2001| -
17p45 Effect of Resonance Light Irradiation on Thermionic Energy Converter
British Library Conference Proceedings | 2001| -
17p34 An Asymptotic Solution of the Transport Equations for Twin Ionic Species in a Cylindrical Domain
British Library Conference Proceedings | 2001| -
17p22 Spatial Concentration Profiles of O Atoms in an Oxygen RF Discharge
British Library Conference Proceedings | 2001| -
17p12 On the Ponderomotive Force in a Low Pressure Inductive Discharge
British Library Conference Proceedings | 2001| -
17p1 Abnormal Glow Discharges in Argon: Experiment and Modeling
British Library Conference Proceedings | 2001| -
17a89 Formation of SiN~x:F Gate Dielectric Films Using ECR-PECVD Employing N~2/SiF~4/H~2 Gases
British Library Conference Proceedings | 2001| -
17a88 Behavior of N, H Radicals and Etching of Organic Low-k Film Employing N~2/H~2 and N~2/NH~3 Plasmas
British Library Conference Proceedings | 2001|
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