Trends in Recent Minienvironment Installations (Englisch)
- Neue Suche nach: Gath, H. C.
- Neue Suche nach: Honold, A.
- Neue Suche nach: Csatary, P.
- Neue Suche nach: Institute of Environmental Sciences
- Neue Suche nach: Gath, H. C.
- Neue Suche nach: Honold, A.
- Neue Suche nach: Csatary, P.
- Neue Suche nach: Institute of Environmental Sciences
In:
Minienvironments
;
200-204
;
1995
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Trends in Recent Minienvironment Installations
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Beteiligte:Gath, H. C. ( Autor:in ) / Honold, A. ( Autor:in ) / Csatary, P. ( Autor:in ) / Institute of Environmental Sciences
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Kongress:Symposium; 41st Annual technical meeting, Minienvironments ; 1995 ; Anaheim; CA
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Erschienen in:Minienvironments ; 200-204ANNUAL TECHNICAL MEETING- INSTITUTE OF ENVIRONMENTAL SCIENCES ; 41//pt1 ; 200-204
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Verlag:
- Neue Suche nach: The Institute
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Erscheinungsdatum:01.01.1995
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Format / Umfang:5 pages
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Anmerkungen:Theme title "Developing future leaders of technology"
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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Trace Water Determination in Gases by Infrared SpectroscopyStallard, B. R. / Espinoza, L. H. / Niemczyk, T. M. / Institute of Environmental Sciences et al. | 1995
- 1
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Regional and Worldwide Atmospheric Profiles for MeritFiorino, S. T. / Parks, D. L. / Institute of Environmental Sciences et al. | 1995
- 6
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A Method of Creating Regional and Worldwide Data Sets of Extreme and Average Climatic ValuesSquires, M. T. / Beitler, B. A. / Fiorino, S. T. / Parks, D. L. / Institute of Environmental Sciences et al. | 1995
- 9
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Real-Time Detection of Airborne Contaminants in DUV Lithographic Processing EnvironmentsDean, K. R. / Carpio, R. A. / Institute of Environmental Sciences et al. | 1995
- 12
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Prediction of Dynamic Environments for Airborne External Stores During Aircraft Straight and Level FlightHeaton, P. / Czuchna, J. / Institute of Environmental Sciences et al. | 1995
- 17
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The Evaluation of Thermal Decomposition Characteristics of Active Speciality Gases on Various Metal Surfaces Using FT-IR MethodShirai, Y. / Lee, S.-K. / Miyoshi, S. / Ohmi, T. / Institute of Environmental Sciences et al. | 1995
- 18
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A Comparison of Techniques for Modeling External Store Vibration During Aircraft Maneuver FlightCzuchna, J. S. / Pado, L. E. / Williams, F. R. / Institute of Environmental Sciences et al. | 1995
- 22
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Particle Beam Mass Spectrometry of Submicron Particles Formed During LPCVD of Polysilicon FilmsZiemann, P. J. / Liu, P. / Nijhawan, S. / Kittelson, D. B. / Institute of Environmental Sciences et al. | 1995
- 25
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Fatigue and Time-Compression Methodologies for Power-Law Non-Linear SystemsLambert, R. G. / Institute of Environmental Sciences et al. | 1995
- 30
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Monitoring and Identification of Particles Formed During Pressure ReductionReents, W. D. / Wang, H.-C. / Udischas, R. / Institute of Environmental Sciences et al. | 1995
- 35
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Oxide Etch Dusty Plasma Studies in the GEC Reference Cell Using Dynamic Laser Light Scattering TechniquesAnderson, H. M. / Radovanov, S. / Institute of Environmental Sciences et al. | 1995
- 43
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Spectroscopic Study of Correlation Between RF Plasma Structure and Particle DynamicsMakabe, T. / Kitajima, T. / Institute of Environmental Sciences et al. | 1995
- 49
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Aspects of Thermodynamic Aging Process in Reliability PhysicsFeinberg, A. A. / Institute of Environmental Sciences et al. | 1995
- 50
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An Investigation into Particle Transport within Plasma EtchersUtter, C. E. / Knollenberg, S. C. / Knollenberg, R. G. / Institute of Environmental Sciences et al. | 1995
- 56
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Useful Statistics for On-Line Particle CountingCooper, D. W. / Institute of Environmental Sciences et al. | 1995
- 57
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Use of Physics of Failure for Reliability Assessments in Support of Commercial Circuit Card Use in Military SystemsStadterman, T. / Hum, B. / Deckert, M. / Mortin, D. / Institute of Environmental Sciences et al. | 1995
- 62
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Monitoring Particulate Contaminants in a Chemical Downstream Etch SystemKhawaja, Y. / Mahdavi, O. / Durham, J. / Pope, J. / Institute of Environmental Sciences et al. | 1995
- 63
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A Physics-of-Failure Case Study for Accelerated Testing of Electronic PackagesRothman, T. P. / Dasgupta, A. / Binder, M. C. / Institute of Environmental Sciences et al. | 1995
- 68
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In-Situ Particle Monitor at LPCVD Poly FurnaceFang, S. / Hallett, B. / Merriam, A. / Musilli, C. / Institute of Environmental Sciences et al. | 1995
- 72
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Test Cycle Time Reduction and Improved Quality by Using Accelerated Testing TechniquesMcKenney, K. / Institute of Environmental Sciences et al. | 1995
- 74
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AMT P5000 W CVD Reactor Diagnosis and Control with ISPMWinter, T. / Woodward, R. / Niemyski, P. / Fu, T. / Institute of Environmental Sciences et al. | 1995
- 80
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Reliability Achievement Through the Technical Risk AssessmentKrasich, M. / Institute of Environmental Sciences et al. | 1995
- 82
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Feasibility of an In-Situ Particle Monitor on a Tungsten LPCVD ReactorFardi, B. / MacGibbon, B. S. / Tripathi, S. / Moghadam, F. / Institute of Environmental Sciences et al. | 1995
- 86
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Tailoring and Highly Accelerated Life Testing, Two Contradictory or Two Complementary Testing Philosophies?Sherf, Z. / Hopstone, P. / Institute of Environmental Sciences et al. | 1995
- 91
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Feasibility of an In-Situ Particle Monitor on a PECVD ILD ReactorFardi, B. / Sirovy, C. / Huff, B. / Moghadam, F. / Institute of Environmental Sciences et al. | 1995
- 94
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Reliability Growth Projections with Applications to Integrated TestingCrow, L. H. / Institute of Environmental Sciences et al. | 1995
- 96
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In-Situ Process Monitoring-Data ManagementBunkofske, R. / Institute of Environmental Sciences et al. | 1995
- 102
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Effect of Thermophoresis on Contamination in a CVD ReactorMacGibbon, B. S. / Busnaina, A. A. / Institute of Environmental Sciences et al. | 1995
- 104
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Reliability Growth Test PlanningFreind, H. / Institute of Environmental Sciences et al. | 1995
- 107
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Design Criteria for 300mm Silicon Wafer Carriers, Material Handling Systems and ToolsMartin, R. / Fosnight, B. / Shackleton, C. / Slocum, A. / Institute of Environmental Sciences et al. | 1995
- 111
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Physics-of-Failure: An Approach to Reliable Product DevelopmentPecht, M. / Dasgupta, A. / Institute of Environmental Sciences et al. | 1995
- 118
-
A Systematic Approach to Hardware QualificationBarela, P. R. / Cornford, S. / Institute of Environmental Sciences et al. | 1995
- 118
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The Impact of Minienvironment on Fab Capacity and YieldShu, C.-Y. / Institute of Environmental Sciences et al. | 1995
- 124
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The Role of Minienvironment and Automation in the New TSMC's 200mm Sub-Half-Micron FacilityTu, L. C. / Tsai, R. / Institute of Environmental Sciences et al. | 1995
- 127
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Rationale for Durability Temperature Test CompressionCaruso, H. / Institute of Environmental Sciences et al. | 1995
- 130
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The Role of Minienvironments in Redefining Microelectronic Manufacturing EconomicsO'Reilly, H. / Rhine, B. / Institute of Environmental Sciences et al. | 1995
- 134
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Cost Reduction of Cleanrooms with 100% MinienvironmentsBarnett, W. J. / Castrucci, P. / Schneider, R. K. / Williams, M. M. / Institute of Environmental Sciences et al. | 1995
- 137
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Cost-Effective Methodology for Evaluating Reliability and MaintainabilityJokubaitis, L. K. / Institute of Environmental Sciences et al. | 1995
- 142
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New Minienvironment Standards and an Overview of Standards in PreparationSchliesser, J. / Institute of Environmental Sciences et al. | 1995
- 146
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Quality in an Environmental Testing LaboratoryTorstensson, H. / Nilsson, U. / Institute of Environmental Sciences et al. | 1995
- 147
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Qualification of Pods and Storage Boxes Concerning Inorganic Contamination According to Semi Document #2389Streckfuss, N. / Pfitzner, L. / Oechsner, R. / Kroninger, P. / Institute of Environmental Sciences et al. | 1995
- 154
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Training of Laboratory Staff in Respect of QualityNilsson, U. / Stjernman, G. / Torstensson, H. / Institute of Environmental Sciences et al. | 1995
- 155
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Determination of Organic Contamination from Minienvironments According to Semi Document #2238: First ResultsBudde, K. J. / Holzapfel, W. J. / Beyer, M. M. / Institute of Environmental Sciences et al. | 1995
- 159
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Reliability and Logistics Considerations for Non-Developmental Materiel Purchased from Foreign GovernmentsLipp, L. / Institute of Environmental Sciences et al. | 1995
- 162
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Low Temperature Screening to Contain a Particle Contamination Problem (A Case Study)McKenney, K. / Cormack, M. / Institute of Environmental Sciences et al. | 1995
- 163
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Performance Evaluation of Five Aqueous and Four CO2 200mm Smif Pod Cleaning MethodsKnoth, G. W. / Institute of Environmental Sciences et al. | 1995
- 168
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Environmental Stress Screening of Electro-Optical Systems-The Importance of Diagnostic CoverageKallis, J. M. / Ramirez, J. A. / Institute of Environmental Sciences et al. | 1995
- 171
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Assessing Requirements for Wafer Environment ControlFosnight, W. / Jensen, D. L. / Martin, R. / Institute of Environmental Sciences et al. | 1995
- 173
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Reliability Enhancement of a New Computer by ESSKyser, E. L. / Collins, T. W. / Institute of Environmental Sciences et al. | 1995
- 178
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Transportation Technology of Si Wafer Without Accompanying Carbon ContaminationKojima, T. / Ojima, S. / Kubo, K. / Yabune, T. / Institute of Environmental Sciences et al. | 1995
- 180
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Environmental Test Philosophies in ProductionRasp, R. A. / Institute of Environmental Sciences et al. | 1995
- 185
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Consideration for the Sustenance of Surface Cleanliness in Wafer TransportationSuenaga, T. / Nose, M. / Ojima, S. / Kubo, K. / Institute of Environmental Sciences et al. | 1995
- 189
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Vibration Damping of the Cassini Spacecraft StructureBergen, T. F. / Institute of Environmental Sciences et al. | 1995
- 191
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A Portable Nitrogen Purged Microenvironment: Design Specification and Preliminary Field Test DataDraper, C. W. / Ellis, R. / Dolcin, J. / LaDuca, A. / Institute of Environmental Sciences et al. | 1995
- 196
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A Stochastic Model for the Pulse Method-Part I: Large Deterministic ComponentMerritt, R. G. / Institute of Environmental Sciences et al. | 1995
- 200
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Trends in Recent Minienvironment InstallationsGath, H. C. / Honold, A. / Csatary, P. / Institute of Environmental Sciences et al. | 1995
- 205
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Future Smif-Integration for Semiconductor FabricationKlumpp, B. / Schliesser, J. / Herzog, O. / Staudt-Fischbach, P. / Institute of Environmental Sciences et al. | 1995
- 208
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Recommended Practices for PyroshockBateman, V. I. / Davie, N. T. / Institute of Environmental Sciences et al. | 1995
- 211
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Smif Integration of a Wafer Prober by Components of Jenoptik GMBHScheler, W. / Vorberg, P. / Schneider, H. / Fabian, P. / Institute of Environmental Sciences et al. | 1995
- 217
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Characteristics of a Piezoresistive Accelerometer in Shock Environments Up to 150,000 GBateman, V. I. / Davie, N. T. / Brown, F. A. / Institute of Environmental Sciences et al. | 1995
- 218
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An Optimized Procedure for Process Equipment and Minienvironment Specification with PWP MeasurementSchliesser, J. / Klumpp, B. / Mayer, S. / Institute of Environmental Sciences et al. | 1995
- 225
-
The Effects of Differential Pressure on Particulate Levels in MinienvironmentsPariseau, D. / Institute of Environmental Sciences et al. | 1995
- 225
-
Processing Effects on 1/F Noise and Other Data ArtifactsWise, J. H. / Institute of Environmental Sciences et al. | 1995
- 233
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Baseline: Performance of a Wet Bench Equipped with a MinienvironmentLivingston, J. / Smith, L. / Roche, T. / Lutz, D. / Institute of Environmental Sciences et al. | 1995
- 240
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Airflow and Chemical Migration in a Wetstation MinienvironmentMacGibbon, B. S. / Marvell, G. / Benson, D. / Busnaina, A. A. / Institute of Environmental Sciences et al. | 1995
- 240
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Using Thermal Imaging to Improve Product ReliabilityHershkovitch, M. / Institute of Environmental Sciences et al. | 1995
- 245
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Design Health Monitoring of Mechanical Dynamic StructuresBallinger, R. S. / Herrin, D. W. / Institute of Environmental Sciences et al. | 1995
- 246
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Ion Exchange Chemical Filter for Ultra Clean EnvironmentKawazu, H. / Institute of Environmental Sciences et al. | 1995
- 253
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Simplified Methods of Computing Fatigue Life/Damage for Gaussian Random StressYoung, R. K. / Lambert, R. G. / Institute of Environmental Sciences et al. | 1995
- 254
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Determining the Capacity of New CleanroomsKemp, J. S. / Institute of Environmental Sciences et al. | 1995
- 258
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Cleanable Hepa Filters: The Mycobacterium Tuberculosis (T.B.) ApplicationKaiser, D. / Scholler, R. / Institute of Environmental Sciences et al. | 1995
- 260
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Random Vibration and Shock of Circuit Card Surface Mounted DevicesBastien, G. J. / Institute of Environmental Sciences et al. | 1995
- 265
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Sterility Assurance for Cleanroom WipersCooper, D. W. / Institute of Environmental Sciences et al. | 1995
- 266
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Climatic Testing of Cardboard PackagingZiegahn, K.-F. / Institute of Environmental Sciences et al. | 1995
- 273
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International Microcontamination Control Standardization at ISO and CEN Level: An IntroductionSchicht, H. H. / Institute of Environmental Sciences et al. | 1995
- 275
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Effects of Air Pollution on Materials: Two New Technical Rules of the Commission on Air Pollution/Prevention of VDI and DINGrefen, K. / Thiel, W. R. / Institute of Environmental Sciences et al. | 1995
- 278
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Trends: Industrial Sterilization Methods, International Sterilization Standards DevelopmentBooth, A. F. / Institute of Environmental Sciences et al. | 1995
- 280
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Effects of Climatic Tests: A Comparison Between MIL-STD-810 and -331Dumelin, M. B. / Pulfer, C. / Berger, B. A. / Institute of Environmental Sciences et al. | 1995
- 288
-
Operational Evaluation of Pressure Transducers at High Temperatures and High Acoustic LevelsBanaszak, D. / Camden, M. P. / Institute of Environmental Sciences et al. | 1995
- 291
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Liquid-Borne Particle Standards and Implementation ProceduresLieberman, A. / Institute of Environmental Sciences et al. | 1995
- 296
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Considerations for the Design and Development of Mixed-Mode Vibration Control SystemsSinn, L. A. / Underwood, M. A. / Institute of Environmental Sciences et al. | 1995
- 297
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Validation of Form, Fill and Seal Aseptic ProcessZazueta, M. / Institute of Environmental Sciences et al. | 1995
- 302
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Cleaning ValidationMcArthur, P. / Vasilevsky, M. / Institute of Environmental Sciences et al. | 1995
- 309
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Environment Friendly Economy by Closed LoopsSchubert, H. / Ziegahn, K.-F. / Institute of Environmental Sciences et al. | 1995
- 310
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Comparison of the Effectiveness of Reliability Processes on Three ProductsChesney, K. / Institute of Environmental Sciences et al. | 1995
- 315
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Dimension Criteria for Tanks for Dangerous GoodsSvensson, T. / Torstensson, H. / Institute of Environmental Sciences et al. | 1995
- 316
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Cleanroom Air Monitoring Using Scrubbing and Adsorption MethodologiesBalazs, M. K. / Camenzind, M. / Fucsko, J. / Institute of Environmental Sciences et al. | 1995
- 321
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An Examination of the Effects of Instrument Flow Rate, Sensitivity, and Background Noise on Cleanroom Particle Count StatisticsKnollenberg, R. G. / Haley, B. T. / Steidtmann, D. E. / Institute of Environmental Sciences et al. | 1995
- 336
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Contamination Analysis for a Telecommunication SatelliteMa, P. T. / Lee, A. L. / Institute of Environmental Sciences et al. | 1995
- 344
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Pore Size Characteristics of Microporous Membrane Filters by Air Flow Porosimetry and Particulate Loading StudiesLee, J.-K. / Liu, B. Y. H. / Rubow, K. L. / Zahka, J. G. / Institute of Environmental Sciences et al. | 1995
- 354
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Calibration of Variable-Area Flow Meters for Use in Measuring Contamination in High Purity Semiconductor Process LiquidsBlackford, D. B. / Grant, D. C. / Neher, N. / Franz, J. S. / Institute of Environmental Sciences et al. | 1995
- 361
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Use of a Submicron Liquidborne Particle Counter to Assess Surface Cleanliness and Cleanability of Component PartsNagarajan, R. / Institute of Environmental Sciences et al. | 1995
- 375
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The Correlation Between Particle Contamination and Air Flow Distribution in the CleanroomTakahashi, M. / Institute of Environmental Sciences et al. | 1995
- 384
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Measurement of Air Pollution Acidic Gases in a Class 10 CleanroomPoon, W. S. / Pui, D. Y. H. / Liu, B. Y. H. / Hwang, J.-S. / Institute of Environmental Sciences et al. | 1995
- 390
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Optimizing Cleanroom Operating EfficienciesDodd, R. A. / Knollenberg, R. G. / Haley, B. T. / Institute of Environmental Sciences et al. | 1995
- 399
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Electrostatic Discharge (ESD)-An Important Quality Aspect of Product ReliabilityTrost, T. / Institute of Environmental Sciences et al. | 1995
- 414
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Post Aluminum Etch Processing for Optimal Corrosion Control in a Lam Research 9600 SystemThornton, J. / Quijada, J. / Gonzales, S. / Woodburn, R. / Institute of Environmental Sciences et al. | 1995
- 421
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An Integrated Container Manufacturing and Packaging Facility for High Purity Semiconductor ChemicalsHackett, T. / Hatcher, Z. / Cawthon, M. / Institute of Environmental Sciences et al. | 1995
- 435
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The Dilute HCL Integrated Pre-Gate CleanO'Brien, S. / Hurd, T. Q. / Tipton, C. / Institute of Environmental Sciences et al. | 1995
- 441
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Establishment of Complete Cleaning Technology for Hydrocarbon Contamination on Si Wafer SurfaceOjima, S. / Kubo, K. / Nose, M. / Ohmi, T. / Institute of Environmental Sciences et al. | 1995
- 447
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Considerations for Optimizing SC1 Particle Removal ProcessesAlbaugh, K. B. / Basiliere, S. / Estes, S. / Fleming, M. J. / Institute of Environmental Sciences et al. | 1995
- 451
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The Use of In-Situ Liquid Particle Counting in Pre-Diffusion CleaningOwens, L. / Hendrix, R. / Witowski, B. / Institute of Environmental Sciences et al. | 1995
- 457
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Analysis of PPB-Level Impurities in Silane Gas Using Apims: Comparison of Purified and Unpurified Silane ProductsSiefering, K. / Whitlock, W. / Institute of Environmental Sciences et al. | 1995
- 463
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Interactions of Moisture Impurity on Anodized AluminumMa, C. / Shero, E. / Gilbert, S. L. / Shadman, F. / Institute of Environmental Sciences et al. | 1995
- 468
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Apims Testing of Room Temperature Inert Gas PurifiersKetkar, S. N. / Booth, T. M. / Institute of Environmental Sciences et al. | 1995
- 474
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Environmentally Friendly Chlorine During OxidationMertens, P. W. / Bermeire, B. / Depas, M. / McGeary, M. J. / Institute of Environmental Sciences et al. | 1995
- 480
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Reduction in Emission of Perfluorinated Compounds Through Optimization of PECVD Chamber Cleans Using Nitrogen TrifluorideRidgeway, R. G. / Langan, J. G. / Huling, B. A. / Pearce, R. V. / Institute of Environmental Sciences et al. | 1995
- 487
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Development of an Environmentally Friendly HCL Gas-Phase CleanElsmore, C. / Meuris, M. / Mertens, P. W. / Hurd, T. Q. / Institute of Environmental Sciences et al. | 1995
- 494
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Comparative Corrosion Studies for HCL- and HBR- Gas Distribution SystemsWang, H.-C. / Doddi, G. / Chesters, S. / Institute of Environmental Sciences et al. | 1995
- 500
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Cost-Effective Ultra High Pure Gas Delivery System in CleanroomsDubey, G. C. / Purohit, R. K. / Institute of Environmental Sciences et al. | 1995
- 509
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Analysis of Hydrogen Chloride for Metals ContaminationStanescu, M. S. / Conroy, M. / Institute of Environmental Sciences et al. | 1995
- 517
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Patterned Wafer Defect Standard to Meet 0.24 Logic and Memory Device Inspection NeedsScheer, B. / Smith, R. / Institute of Environmental Sciences et al. | 1995
- 528
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Alignment Fiducial Work on Unpatterned Silicon Particle Monitor Wafers for Increased Sem Review ThroughputHuffman, K. / Williams, E. / Smith, R. / Institute of Environmental Sciences et al. | 1995
- 537
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The Application of Residual Gas Analyzers for Defect Reduction in Semiconductor Process EquipmentLeggett, G. H. / Williams, R. / Institute of Environmental Sciences et al. | 1995
- 542
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Fundamentals of Moisture Interaction with EP Stainless Steel and Silicon Wafer SurfacesShero, E. / Ma, C. / Shadman, F. / Institute of Environmental Sciences et al. | 1995
- 549
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Behavior of Adsorbed Moisture on Solid SurfacesIzumi, H. / Nakagawa, Y. / Nakamura, M. / Ohmi, T. / Institute of Environmental Sciences et al. | 1995
- 557
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The Effect of Baking on the Dry Down of UHP Distribution Systems: From Laboratory to Industrial Scale Via Numerical SimulationJurcik, B. / McAndrew, J. / Znamensky, D. / Institute of Environmental Sciences et al. | 1995
- 564
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Practical Approach to Particle Reduction in LPCVD Nitride DepositionJong Gon Lee / Seung Woo Shin / Hyun Moon Park / Hyun Woo Lee / Institute of Environmental Sciences et al. | 1995
- 570
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An In-Depth Evaluation of Particle Performance of Slit Valves on a PECVD Dielectric Process EquipmentFardi, B. / Sirovy, C. / Huff, B. / Novbakhtian, R. / Institute of Environmental Sciences et al. | 1995
- 577
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Particulate Contamination Evaluation of Screw Torque Retention and Antigalling Techniques for Hard Disk Drive ApplicationWalter Prater, P. E. / Stone, G. / Vargas, M. / Institute of Environmental Sciences et al. | 1995