"beta-SiC on SiO~2 Formed by Ion Implantation and Bonding for Micromechanics Applications" (Englisch)
- Neue Suche nach: Serre, C.
- Neue Suche nach: Perez-Rodriguez, A.
- Neue Suche nach: Romano-Rodriguez, A.
- Neue Suche nach: Morante, J. R.
- Neue Suche nach: Fonseca, L.
- Neue Suche nach: Acero, M. C.
- Neue Suche nach: Esteve, J.
- Neue Suche nach: Kogler, R.
- Neue Suche nach: Skorupa, W.
- Neue Suche nach: Serre, C.
- Neue Suche nach: Perez-Rodriguez, A.
- Neue Suche nach: Romano-Rodriguez, A.
- Neue Suche nach: Morante, J. R.
- Neue Suche nach: Fonseca, L.
- Neue Suche nach: Acero, M. C.
- Neue Suche nach: Esteve, J.
- Neue Suche nach: Kogler, R.
- Neue Suche nach: Skorupa, W.
- Neue Suche nach: Hemment, P. L. F.
- Neue Suche nach: Nazarov, A. N.
In:
Perspectives, science and technologies for novel silicon on insulator devices
;
121-126
;
2000
-
ISBN:
- Aufsatz (Konferenz) / Print
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Titel:"beta-SiC on SiO~2 Formed by Ion Implantation and Bonding for Micromechanics Applications"
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Beteiligte:Serre, C. ( Autor:in ) / Perez-Rodriguez, A. ( Autor:in ) / Romano-Rodriguez, A. ( Autor:in ) / Morante, J. R. ( Autor:in ) / Fonseca, L. ( Autor:in ) / Acero, M. C. ( Autor:in ) / Esteve, J. ( Autor:in ) / Kogler, R. ( Autor:in ) / Skorupa, W. ( Autor:in ) / Hemment, P. L. F.
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Kongress:NATO Advanced Research Workshop, Perspectives, science and technologies for novel silicon on insulator devices ; 1998 ; Kyiv, Ukraine
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Erschienen in:NATO ASI SERIES 3 HIGH TECHNOLOGY ; 73 ; 121-126
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Verlag:
- Neue Suche nach: Kluwer
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Erscheinungsdatum:01.01.2000
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Format / Umfang:6 pages
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
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