Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity [4176-04] (Englisch)
- Neue Suche nach: Li, X.
- Neue Suche nach: Lin, R.
- Neue Suche nach: Kek, H.
- Neue Suche nach: SPIE
- Neue Suche nach: Li, X.
- Neue Suche nach: Lin, R.
- Neue Suche nach: Kek, H.
- Neue Suche nach: Paul, O.
- Neue Suche nach: Peeters, E.
- Neue Suche nach: SPIE
In:
Micromachined devices and components
;
59-67
;
2000
-
ISBN:
-
ISSN:
- Aufsatz (Konferenz) / Print
-
Titel:Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity [4176-04]
-
Beteiligte:
-
Kongress:Conference; 6th, Micromachined devices and components ; 2000 ; Santa Clara, CA
-
Erschienen in:
-
Verlag:
- Neue Suche nach: SPIE
-
Erscheinungsdatum:01.01.2000
-
Format / Umfang:9 pages
-
ISBN:
-
ISSN:
-
Medientyp:Aufsatz (Konferenz)
-
Format:Print
-
Sprache:Englisch
-
Schlagwörter:
-
Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 2
-
MEMS/MOEMS for lightwave networks: Can little machines make it big?Bishop, David J. / Aksyuk, Vladimir A. / Bolle, Cristian A. / Giles, C. Randy / Pardo, Flavio / Walker, James A. et al. | 2000
- 2
-
MEMS/MOEMS for lightwave networks: can little machines make it big? [4176-200]Bishop, D. J. / Aksyuk, V. A. / Bolle, C. A. / Giles, C. R. / Pardo, F. / Walker, J. A. / SPIE et al. | 2000
- 6
-
Bulk micromachining for sensors and actuatorsEsashi, Masayoshi et al. | 2000
- 6
-
Bulk micromachining for sensors and actuators [4176-201]Esashi, M. / SPIE et al. | 2000
- 16
-
Microsystems for diverse applications using recently developed microfabrication techniquesDellmann, Laurent / Akiyama, Terunobu / Briand, Danick / Gautsch, Sebastien / Guenat, Olivier T. / Guldimann, Benedikt / Luginbuhl, Philippe / Marxer, Cornel / Staufer, Urs / van der Schoot, Bart et al. | 2000
- 16
-
Microsystems for diverse applications using recently developed microfabrication techniques [4176-202]Dellmann, L. / Akiyama, T. / Briand, D. / Gautsch, S. / Guenat, O. T. / Guldimann, B. / Luginbuhl, P. / Marxer, C. / Staufer, U. / van der Schoot, B. et al. | 2000
- 30
-
Review of viscous damping in micromachined structures (Invited Paper) [4176-01]Li, G. X. / Hughes, H. G. / SPIE et al. | 2000
- 30
-
Review of viscous damping in micromachined structuresLi, Gary X. / Hughes, Henry G. et al. | 2000
- 47
-
High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution [4176-03]Zwijze, R. A. F. / Wiegerink, R. J. / Krijnen, G. J. M. / Berenschot, J. W. / de Boer, M. J. / Elwenspoek, M. C. / SPIE et al. | 2000
- 47
-
High-force 10-kN piezoresistive silicon force sensor with output independent of force distributionZwijze, Robert A. / Wiegerink, Remeo J. / Krijnen, G. J. M. / Berenschot, J. W. / de Boer, Meint J. / Elwenspoek, Miko C. et al. | 2000
- 59
-
Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivityLi, Xinxin / Lin, Rongming / Kek, Huatsoon et al. | 2000
- 59
-
Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity [4176-04]Li, X. / Lin, R. / Kek, H. / SPIE et al. | 2000
- 68
-
New fabrication techniques for high dynamic range tunneling sensors [4176-07]Chang, D. T. / Stratton, F. P. / Kubena, R. L. / Vickers-Kirby, D. J. / Joyce, R. J. / Schimert, T. R. / Gooch, R. W. / SPIE et al. | 2000
- 68
-
New fabrication techniques for high dynamic range tunneling sensorsChang, David T. / Stratton, Fred P. / Kubena, Randall L. / Vickers-Kirby, Deborah J. / Joyce, Richard J. / Schimert, Thomas R. / Gooch, Roland W. et al. | 2000
- 74
-
Dual beam-mass structure gyroscope micromachined by deep RIE processYang, Heng / Bao, Minhang / Yin, Hao / Shen, Shaoqun et al. | 2000
- 74
-
Dual beam-mass structure gyroscope micromachined by deep RIE process [4176-06]Yang, H. / Bao, M. / Yin, H. / Shen, S. / SPIE et al. | 2000
- 84
-
Micromechanical detectors for ferromagnetic resonance spectroscopyMoreland, John / Kabos, Pavel / Jander, Albrecht / Loehndorf, Markus / McMichael, Robert / Lee, Chan-Gyu et al. | 2000
- 84
-
Micromechanical detectors for ferromagnetic resonance spectroscopy [4176-08]Moreland, J. / Kabos, P. / Jander, A. / Lohndorf, M. / McMichael, B. / Lee, C.-G. / SPIE et al. | 2000
- 96
-
Microresonator modified as magnetic sensorLokhre, S. G. / Apte, Prakash R. / Raajeev, R. / Lal, R. et al. | 2000
- 96
-
Microresonator modified as magnetic sensor [4176-09]Lokhre, S. G. / Apte, P. R. / Raajeev, R. / Lal, R. / SPIE et al. | 2000
- 106
-
Toward thermal flow-sensing with pL/s resolutionTas, Niels R. / Lammerink, Theo S. J. / Leussink, Pele J. / Berenschot, J. W. / de Bree, H. E. / Elwenspoek, Miko C. et al. | 2000
- 106
-
Toward thermal flow-sensing with pL/s resolution (Invited Paper) [4176-10]Tas, N. R. / Lammerink, T. S. J. / Leussink, P. J. / Berenschot, J. W. / de Bree, H.-E. / Elwenspoek, M. C. / SPIE et al. | 2000
- 122
-
AirJet paper mover: an example of mesoscale MEMSBiegelsen, David K. / Berlin, Andrew A. / Cheung, Patrick / Fromherz, Markus P. / Goldberg, David / Jackson, Warren B. / Preas, Bryan / Reich, James / Swartz, Lars E. et al. | 2000
- 122
-
AirJet paper mover: an example of mesoscale MEMS (Invited Paper) [4176-11]Biegelsen, D. K. / Berlin, A. A. / Cheung, P. / Fromherz, M. / Goldberg, D. / Jackson, W. B. / Preas, B. / Reich, J. / Swartz, L. E. / SPIE et al. | 2000
- 130
-
Spiral wound transducerElliott, Paul C. / Bobbio, Stephen M. / Pennington, Michael A. / Smith, Stephen W. / Zara, Jason M. / Hudak, John A. / Pagan, Jennifer / Rouse, Buchanan J. et al. | 2000
- 130
-
Spiral wound transducer [4176-12]Elliott, P. C. / Bobbio, S. M. / Pennington, M. A. / Smith, S. W. / Zara, J. / Hudak, J. A. / Pagan, J. / Rouse, B. J. / SPIE et al. | 2000
- 140
-
Large deflection of out-of-plane magnetic actuators using surface micromachiningHuang, J.-M. / Liew, Kim M. / Liu, Ai Q. et al. | 2000
- 140
-
Large deflection of out-of-plane magnetic actuators using surface micromachining [4176-13]Huang, J.-M. / Liew, K. M. / Liu, A. Q. / SPIE et al. | 2000
- 148
-
Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators [4176-14]Allen, P. B. / Boydston, N. C. / Howard, J. T. / Ko, S. Y. / Kolesar, E. S. / Ruff, M. D. / Wilken, J. M. / Wilks, R. J. / SPIE et al. | 2000
- 148
-
Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuatorsAllen, Peter B. / Boydston, Noah C. / Howard, Jeffrey T. / Ko, Simon Y. / Kolesar, Edward S. / Ruff, Matthew D. / Wilken, Josh M. / Wilks, Richard J. et al. | 2000
- 160
-
From research to product: the CMOS MEMS case (Invited Paper) [4176-15]Baltes, H. / SPIE et al. | 2000
- 160
-
From research to product: the CMOS MEMS caseBaltes, Henry et al. | 2000
- 168
-
Investigation of thermopile using CMOS compatible process and front-side Si bulk etching [4176-16]Du, C.-H. / Lee, C. / SPIE et al. | 2000
- 168
-
Investigation of thermopile using CMOS compatible process and front-side Si bulk etchingDu, Chen-Hsun / Lee, Cheng-Kuo et al. | 2000
- 180
-
MEMS device for mass market gas and chemical sensors [4176-17]Kinkade, B. R. / Daly, J. T. / Johnson, E. A. / SPIE et al. | 2000
- 180
-
MEMS device for mass market gas and chemical sensorsKinkade, Brian R. / Daly, James T. / Johnson, Edward A. et al. | 2000
- 188
-
Rapid micro-PCR system for hepatitis C virus amplificationLin, Yu-Cheng / Huang, Ming-Yuan / Young, Kung-Chia / Chang, Ting-Tsung / Wu, Ching-Yi et al. | 2000
- 188
-
Rapid micro-PCR system for hepatitis C virus amplification [4176-18]Lin, Y.-C. / Huang, M.-Y. / Young, K.-C. / Chang, T.-T. / Wu, C.-Y. / SPIE et al. | 2000
- 196
-
Prospective applications of MEMS in wireless communicationsDe Los Santos, Hector J. et al. | 2000
- 196
-
Prospective applications of MEMS in wireless communications (Invited Paper) [4176-19]De Los Santos, H. J. / SPIE et al. | 2000
- 204
-
Optimization of surface-micromachined patch antennaWong, S. M. / Ooi, Ban L. / Kooi, Pang S. / Ng, Tiong-Huat / Liu, Ai Q. et al. | 2000
- 204
-
Optimization of surface-micromachined patch antenna [4176-21]Wong, S. / Ooi, B. L. / Kooi, P. S. / Ng, T. H. / Liu, A. Q. / SPIE et al. | 2000
- 214
-
High frequency of micromechanical resonator via structural modification [4176-22]Loke, Y. C. / Zou, Q. / Liew, K. M. / Liu, A. Q. / SPIE et al. | 2000
- 214
-
High frequency of micromechanical resonator via structural modificationLoke, Yee C. / Zou, Q. / Liew, Kim M. / Liu, Ai Q. et al. | 2000
- 226
-
Nano-spring arrays for high-density interconnect (Invited Paper) [4176-23]Fork, D. K. / Chua, C. L. / Kim, P. / Romano, L. T. / Lau, R. / Wong, L. / Alimonda, A. / Geluz, V. / Teepe, M. / Haemer, J. et al. | 2000
- 226
-
Nano-spring arrays for high-density interconnectFork, David K. / Chua, Christopher L. / Kim, Patrick / Romano, Linda T. / Lau, Rachel / Wong, Lai / Alimonda, Andrew / Geluz, Vicki / Teepe, Mark / Haemer, Joe et al. | 2000
- 236
-
Wafer-level surface-mountable chip size packaging for MEMS and ICs [4176-24]Renard, S. / SPIE et al. | 2000
- 236
-
Wafer-level surface-mountable chip size packaging for MEMS and ICsRenard, Stephane et al. | 2000
- 244
-
Development of silicon ultrasonic transducer using micromachining [4176-25]Caliano, G. / Galanello, F. / Foglietti, V. / Cianci, E. / Caronti, A. / SPIE et al. | 2000
- 244
-
Development of silicon ultrasonic transducer using micromachiningCaliano, Giosue / Galanello, Fabio / Foglietti, Vittorio / Cianci, Elena / Caronti, Alessandro et al. | 2000
- 253
-
Low-power micromachined structures for gas sensors with improved robustnessGracia, Isabel / Goetz, Andreas / Plaza, Jose A. / Cane, Carles / Roetsch, Patrice / Boettner, Harald / Seibert, Klaus et al. | 2000
- 253
-
Low-power micromachined structures for gas sensors with improved robustness [4176-26]Gracia, I. / Gotz, A. / Plaza, J. A. / Cane, C. / Roetsch, P. / Bottner, H. / Seibert, K. / SPIE et al. | 2000
- 264
-
Planar latch-up microactuator driven by thermoelastic forceLee, Jong-Hyun / Lee, Myung-Lae / Jang, Won-Ick / Choi, Chang-Auck / Kim, Youn Tae et al. | 2000
- 264
-
Planar latch-up microactuator driven by thermoelastic force [4176-27]Lee, J. H. / Lee, M. L. / Jang, W. I. / Choi, C. A. / Kim, Y. T. / SPIE et al. | 2000
- 272
-
Novel technique of thin photoresist micromachining for submillimeter wave circuitsLiu, Wai Y. / Harkar, A. et al. | 2000
- 272
-
Novel technique of thin photoresist micromachining for submillimeter wave circuits [4176-28]Liu, W. Y. / Harkar, A. / SPIE et al. | 2000