Patterning of diamond microstructures on Si substrate by bulk and surface micromachining [4230-20] (Englisch)
- Neue Suche nach: Fu, Y.
- Neue Suche nach: Du, H.
- Neue Suche nach: Miao, J.
- Neue Suche nach: Liu, Y.
- Neue Suche nach: SPIE
- Neue Suche nach: Nanyang Technological University
- Neue Suche nach: Fu, Y.
- Neue Suche nach: Du, H.
- Neue Suche nach: Miao, J.
- Neue Suche nach: Liu, Y.
- Neue Suche nach: Chau, K.
- Neue Suche nach: Parameswaran, A. M.
- Neue Suche nach: Tay, F. E. H.
- Neue Suche nach: SPIE
- Neue Suche nach: Nanyang Technological University
In:
Micromachining and microfabrication
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164-169
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2000
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Patterning of diamond microstructures on Si substrate by bulk and surface micromachining [4230-20]
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Beteiligte:Fu, Y. ( Autor:in ) / Du, H. ( Autor:in ) / Miao, J. ( Autor:in ) / Liu, Y. ( Autor:in ) / Chau, K. / Parameswaran, A. M. / Tay, F. E. H. / SPIE / Nanyang Technological University
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Kongress:Conference, Micromachining and microfabrication ; 2000 ; Singapore
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Erschienen in:Micromachining and microfabrication ; 164-169PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4230 ; 164-169
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.01.2000
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Format / Umfang:6 pages
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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Tools and processes for MEMS and nanotechnology [4230-31]Prewett, P. D. / Huq, S. E. / Ward, M. C. / SPIE / Nanyang Technological University et al. | 2000
- 1
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Tools and processes for MEMS and nanotechnologyPrewett, Philip D. / Huq, Syed E. / Ward, M. C. L. et al. | 2000
- 10
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Electroplated solenoid-type inductors for CMOS rf CONam, Chul / Choi, Wonseo / Chun, KukJin et al. | 2000
- 10
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Electroplated solenoid-type inductors for CMOS rf VCO [4230-01]Nam, C. / Choi, W. / Chun, K. / SPIE / Nanyang Technological University et al. | 2000
- 18
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Frequency tunable micromachined rf oscillatorsLoke, Yee C. / Liew, Kim M. / Zou, Q. / Liu, Ai Q. et al. | 2000
- 18
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Frequency tunable micromachined rf oscillators [4230-02]Loke, Y. C. / Liew, K. M. / Zou, Q. / Liu, A. Q. / SPIE / Nanyang Technological University et al. | 2000
- 26
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MEMS variable capacitor for one-chip rf front endSeok, Seonho / Nam, Chul / Chun, KukJin et al. | 2000
- 26
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MEMS variable capacitor for one-chip rf front end [4230-03]Seok, S. / Nam, C. / Chun, K. / SPIE / Nanyang Technological University et al. | 2000
- 34
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High-frequency rf microswitches using MEMS-integrated fabrication process [4230-04]Liu, A. Q. / Ng, G. I. / Lam, Y. L. / Chew, S. T. / Ting, S. K. / SPIE / Nanyang Technological University et al. | 2000
- 34
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High-frequency rf microswitches using MEMS-integrated fabrication processLiu, Ai Q. / Ng, Geok I. / Lam, Yee Loy / Chew, S. T. / Ting, S. K. et al. | 2000
- 43
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Microfabrication technology for high-speed Si-based systemsIshii, Hiromu / Yagi, Shouji / Saito, Kunio / Hirata, Akihiko / Kudou, Kazuhisa / Yano, Masaki / Nagatsuma, Tadao / Machida, Katsuyuki / Kyuragi, Hakaru et al. | 2000
- 43
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Microfabrication technology for high-speed Si-based systems [4230-05]Ishii, H. / Yagi, S. / Saito, K. / Hirata, A. / Kudo, K. / Yano, M. / Nagatsuma, T. / Machida, K. / Kyuragi, H. / SPIE et al. | 2000
- 53
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Microfabrication of 32x32 uncooled IR focal plane arrayLiu, Weiguo / Sun, Lingling / Zhu, Weiguang / Tan, Ooi K. et al. | 2000
- 53
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Microfabrication of 32x32 uncooled IR focal plane array [4230-06]Liu, W. / Sun, L. / Zhu, W. / Tan, O. K. / SPIE / Nanyang Technological University et al. | 2000
- 58
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Improvements of an x-ray microcalorimeter for detecting cosmic raysYokoyama, Yuichi / Shoji, Shuichi / Mitsuda, Kazuhisa / Fujimoto, Ryuichi / Miyazaki, Toshiyuki / Oshima, Tohru / Yamazaki, Masahiro / Iyomoto, Naoko / Futamoto, Kazuo / Ishizaki, Yoshinao et al. | 2000
- 58
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Improvements of an x-ray microcalorimeter for detecting cosmic rays [4230-07]Yokoyama, Y. / Shoji, S. / Mitsuda, K. / Fujimoto, R. / Miyazaki, T. / Oshima, T. / Yamazaki, M. / Iyomoto, N. / Futamoto, K. / Ishizaki, Y. et al. | 2000
- 66
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Microsensor for noncontact temperature measurement [4230-08]Li, X. P. / Chan, W. F. / SPIE / Nanyang Technological University et al. | 2000
- 66
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Microsensor for noncontact temperature measurementLi, Xiaoping / Chan, W. F. et al. | 2000
- 76
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Thermal modeling of low-power micromachined solid state integrated gas sensor [4230-09]Liu, Y. / Du, H. / Fu, Y. / SPIE / Nanyang Technological University et al. | 2000
- 76
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Thermal modeling of low-power micromachined solid state integrated gas sensorLiu, Yanju / Du, Hejun / Fu, Yongqing et al. | 2000
- 84
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Novel self-oscillating anemometer with capacitance-based sensingKong, Yen-Peng / Tay, Francis E. / Xu, Yuan et al. | 2000
- 84
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Novel self-oscillating anemometer with capacitance-based sensing [4230-11]Kong, Y. / Tay, F. E. H. / Xu, Y. / SPIE / Nanyang Technological University et al. | 2000
- 89
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MEMS atomizer based on Rayleigh instability-driven breakup of filaments [4230-12]Kong, Y. / Tay, F. E. H. / Xu, Y. / SPIE / Nanyang Technological University et al. | 2000
- 89
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MEMS atomizer based on Rayleigh instability-driven breakup of filamentsKong, Yen-Peng / Tay, Francis E. / Xu, Yuan et al. | 2000
- 100
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Micromachined muscle cell analysis chipWang, Weijie / Li, Paul C. H. / Parameswaran, M. et al. | 2000
- 100
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Micromachined muscle cell analysis chip [4230-13]Wang, W. / Li, P. C. H. / Parameswaran, A. M. / SPIE / Nanyang Technological University et al. | 2000
- 109
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New design concept for vibrating microgyroscope [4230-14]Logeeswaran, V. J. / Ng, D. C. K. / Tay, F. E. H. / SPIE / Nanyang Technological University et al. | 2000
- 109
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New design concept for vibrating microgyroscopeLogeeswaran, V. J. / Ng, David C. / Tay, Francis E. et al. | 2000
- 119
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Optimized layout generator for microgyroscopeTay, Francis E. / Li, Shifeng / Logeeswaran, V. J. / Ng, David C. et al. | 2000
- 119
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Optimized layout generator for microgyroscope [4230-15]Tay, F. E. H. / Li, S. / Logeeswaran, V. J. / Ng, D. C. K. / SPIE / Nanyang Technological University et al. | 2000
- 128
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Optimization methodology for low-g microaccelerometerTay, Francis E. / Jun, Xu / Logeeswaran, V. J. et al. | 2000
- 128
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Optimization methodology for low-g microaccelerometer [4230-16]Tay, F. E. H. / Jun, X. / Logeeswaran, V. J. / SPIE / Nanyang Technological University et al. | 2000
- 140
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Preparation of crystalline TiNi shape-memory alloy thin film for MEMS applicationsFu, Yongqing / Du, Hejun / Huang, Weiming / Huang, Xu / Miao, Jianmin / Liu, Yong et al. | 2000
- 140
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Preparation of crystalline TiNi shape-memory alloy thin film for MEMS applications [4230-17]Fu, Y. / Du, H. / Huang, W. / Huang, X. / Miao, J. / Liu, Y. / SPIE / Nanyang Technological University et al. | 2000
- 147
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High-aspect-ratio structure formation in x-ray lithographyKudryashov, Vladimir A. / Lee, Sing et al. | 2000
- 147
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High-aspect-ratio structure formation in x-ray lithography [4230-18]Kudryashov, V. / Lee, S. / SPIE / Nanyang Technological University et al. | 2000
- 156
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Laser patterning indium tin oxide (ITO) coated on PET substrateTsai, Hong-Yin / Yang, Hsiharng / Pan, Chengtang / Chou, Min-Chieh et al. | 2000
- 156
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Laser patterning indium tin oxide (ITO) coated on PET substrate [4230-19]Tsai, H.-Y. / Yang, H. / Pan, C.-T. / Chou, M.-C. / SPIE / Nanyang Technological University et al. | 2000
- 164
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Patterning of diamond microstructures on Si substrate by bulk and surface micromachiningFu, Yongqing / Du, Hejun / Miao, Jianmin / Liu, Yanju et al. | 2000
- 164
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Patterning of diamond microstructures on Si substrate by bulk and surface micromachining [4230-20]Fu, Y. / Du, H. / Miao, J. / Liu, Y. / SPIE / Nanyang Technological University et al. | 2000
- 170
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4x4 nonblocking matrix switch based on MOEMS [4230-21]Dellmann, L. / Marxer, C. / de Rooij, N. F. / SPIE / Nanyang Technological University et al. | 2000
- 170
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4x4 nonblocking matrix switch based on MOEMSDellmann, Laurent / Marxer, Cornel / de Rooij, Nico F. et al. | 2000
- 174
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4x4 MEMS optical cross-connections (OXCs)Liu, Ai Q. / Zhang, Xu M. / Lam, Yee Loy et al. | 2000
- 174
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4x4 MEMS optical cross-connections (OXCs) [4230-22]Liu, A. Q. / Zhang, X. M. / Lam, Y. L. / SPIE / Nanyang Technological University et al. | 2000
- 180
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Dynamic characteristics measurement system for optical scanning micromirrorChiou, J.C. / Lin, Yu-Chen / Chang, Yi-Cheng et al. | 2000
- 180
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Dynamic characteristics measurement system for optical scanning micromirror [4230-23]Chiou, J. C. / Lin, Y.-C. / Chang, Y.-C. / SPIE / Nanyang Technological University et al. | 2000
- 187
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Integrated WDM frequency tuner using polysilicon surface micromachining process [4230-24]Zhang, X. M. / Lam, Y. L. / Liu, A. Q. / SPIE / Nanyang Technological University et al. | 2000
- 187
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Integrated WDM frequency tuner using polysilicon surface micromachining processZhang, Xu M. / Lam, Yee Loy / Liu, Ai Q. et al. | 2000
- 198
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Tunable Fabry-Perot cavities [4230-25]Winchester, K. J. / Spaargaren, S. M. R. / Dell, J. M. / SPIE / Nanyang Technological University et al. | 2000
- 198
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Tunable Fabry-Perot cavitiesWinchester, Kevin J. / Spaargaren, Sue M. / Dell, John M. et al. | 2000
- 210
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Realization of multifiber ferrule mold inserts fabricated by the LIGA process [4230-26]Shyu, R. F. / Yang, H. / Chou, M.-C. / SPIE / Nanyang Technological University et al. | 2000
- 210
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Realization of multifiber ferrule mold inserts fabricated by the LIGA processShyu, Ruey F. / Yang, Hsiharng / Chou, Min-Chieh et al. | 2000
- 218
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Study on mask technology of CVD diamond thin films by RIE etchingYang, Chunsheng / Ding, Guifu / Yao, Xiang / Zhao, Xiaolin et al. | 2000
- 218
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Study on mask technology of CVD diamond thin films by RIE etching [4230-27]Yang, C.-S. / Ding, G.-F. / Yao, X. / Zhao, X.-L. / SPIE / Nanyang Technological University et al. | 2000
- 224
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Reactive ion etching of CVD diamond films for MEMS applicationsDing, Guifu / Zhao, Xiaolin / Yu, Aibin / Yang, Chunsheng / Cai, Bingchu / Yao, Xiang et al. | 2000
- 224
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Reactive ion etching of CVD diamond films for MEMS applications [4230-28]Ding, G.-F. / Zhao, X.-L. / Yu, A. / Yang, C.-S. / Cai, B. / Yao, X. / SPIE / Nanyang Technological University et al. | 2000
- 231
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Process monitoring of LPCVD silicon nitride and polysilicon by variable-angle spectroscopic ellipsometry [4230-29]Loh, S. Y. / Wong, T. K. S. / Tse, M. S. / Goh, W. L. / SPIE / Nanyang Technological University et al. | 2000
- 231
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Process monitoring of LPCVD silicon nitride and polysilicon by variable-angle spectroscopic ellipsometryLoh, Soon Y. / Wong, Terence K. S. / Tse, Man S. / Goh, Wang L. et al. | 2000
- 241
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Micro-metal-forming technology using specially designed microtoolAoki, Isamu / Sasada, Masahiro et al. | 2000
- 241
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Micro-metal-forming technology using specially designed microtool [4230-30]Aoki, I. / Sasada, M. / SPIE / Nanyang Technological University et al. | 2000