Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression (Englisch)
- Neue Suche nach: Masters, N. D.
- Neue Suche nach: De Boer, M. P.
- Neue Suche nach: Jensen, B. D.
- Neue Suche nach: Baker, M. S.
- Neue Suche nach: Koester, D.
- Neue Suche nach: American Society for Testing and Materials
- Neue Suche nach: Masters, N. D.
- Neue Suche nach: De Boer, M. P.
- Neue Suche nach: Jensen, B. D.
- Neue Suche nach: Baker, M. S.
- Neue Suche nach: Koester, D.
- Neue Suche nach: Muhlstein, C. L.
- Neue Suche nach: Brown, S. B.
- Neue Suche nach: American Society for Testing and Materials
In:
Mechanical properties of structural film
;
168-202
;
2001
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression
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Beteiligte:Masters, N. D. ( Autor:in ) / De Boer, M. P. ( Autor:in ) / Jensen, B. D. ( Autor:in ) / Baker, M. S. ( Autor:in ) / Koester, D. ( Autor:in ) / Muhlstein, C. L. / Brown, S. B. / American Society for Testing and Materials
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Kongress:Symposium, Mechanical properties of structural film ; 2000 ; Orlando, FL
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Erschienen in:Mechanical properties of structural film ; 168-202ASTM SPECIAL TECHNICAL PUBLICATION ; 168-202
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Verlag:
- Neue Suche nach: ASTM
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Erscheinungsort:W. Conshohocken, PA
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Erscheinungsdatum:01.01.2001
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Format / Umfang:35 pages
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 3
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Surface Topology and Fatigue in Si MEMS StructuresAllameh, S. M. / Gally, B. / Brown, S. / Soboyejo, W. O. / American Society for Testing and Materials et al. | 2001
- 16
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Cross Comparison of Direct Strength Testing Techniques on Polysilicon FilmsLavan, D. A. / Tsuchiya, T. / Coles, G. / Knauss, W. G. / Chasiotis, I. / Read, D. / American Society for Testing and Materials et al. | 2001
- 28
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Fatigue and Fracture in Membranes for MEMS Power GenerationBahr, D. F. / Crozier, B. T. / Richards, C. D. / Richards, R. F. / American Society for Testing and Materials et al. | 2001
- 37
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Effects of Microstructure on the Strength and Fracture Toughness of Polysilicon: A Wafer Level Testing ApproachBallarini, R. / Kahn, H. / Tayebi, N. / Heuer, A. H. / American Society for Testing and Materials et al. | 2001
- 52
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Fatigue Crack Growth of a Ni-P Amorphous Alloy Thin FilmTakashima, K. / Shimojo, M. / Higo, Y. / Swain, M. V. / American Society for Testing and Materials et al. | 2001
- 62
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Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test SystemLavan, D. A. / Jackson, K. / Mckenzie, B. / Glass, S. J. / Friedmann, T. A. / Sullivan, J. P. / Buchheit, T. E. / American Society for Testing and Materials et al. | 2001
- 72
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Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin FilmTakashima, K. / Shimojo, M. / Higo, Y. / Swain, M. V. / American Society for Testing and Materials et al. | 2001
- 85
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Integrated Platform for Testing MEMS Mechanical Properties at the Wafer Scale by the IMaP MethodologyDe Boer, M. P. / Smith, N. F. / Masters, N. D. / Sinclair, M. B. / Pryputniewicz, E. J. / American Society for Testing and Materials et al. | 2001
- 96
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Influence of the Film Thickness on Texture, Residual Stresses and Cracking Behavior of PVD Tungsten Coatings Deposited on a Ductile SubstrateGanne, T. / Farges, G. / Crepin, J. / Pradeilles-Duval, R.-M. / Zaoui, A. / American Society for Testing and Materials et al. | 2001
- 109
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High Accuracy Measurement of Elastic Constants of Thin Films by Surface Brillouin ScatteringBeghi, M. G. / Bottani, C. E. / Pastorelli, R. / American Society for Testing and Materials et al. | 2001
- 127
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Effect of Nitrogen Feedgas Addition on the Mechanical Properties of Nano-Structured Carbon CoatingsCatledge, S. A. / Vohra, Y. K. / American Society for Testing and Materials et al. | 2001
- 139
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Characterization of the Young's Modulus of CMOS Thin FilmsHossain, N. / Ju, J. W. / Warneke, B. / Pister, K. S. J. / American Society for Testing and Materials et al. | 2001
- 152
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Derivation of Elastic Properties of Thin Films from Measured Acoustic VelocitiesPastorelli, R. / Tarantola, S. / Beghi, M. G. / Bottani, C. E. / Saltelli, A. / American Society for Testing and Materials et al. | 2001
- 168
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Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual CompressionMasters, N. D. / De Boer, M. P. / Jensen, B. D. / Baker, M. S. / Koester, D. / American Society for Testing and Materials et al. | 2001
- 203
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Mechanical Tests of Free-Standing Aluminum Microbeams for MEMS ApplicationZhang, P. / Lee, H.-J. / Bravman, J. C. / American Society for Testing and Materials et al. | 2001
- 214
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Tensile Testing of Thin Films Using Electrostatic Force GripTsuchiya, T. / Sakata, J. / American Society for Testing and Materials et al. | 2001
- 229
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Tensile Tests of Various Thin FilmsSharpe, W. N. / Jackson, K. M. / Coles, G. / Eby, M. A. / Edwards, R. L. / American Society for Testing and Materials et al. | 2001
- 249
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Ductile Thin Foils of Ni~3AlDemura, M. / Kishida, K. / Umezawa, O. / George, E. P. / Hirano, T. / American Society for Testing and Materials et al. | 2001
- 262
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Microstructural and Mechanical Characterization of Electrodeposited Gold FilmsLong, G. S. / Read, D. T. / McColskey, J. D. / Crago, K. / American Society for Testing and Materials et al. | 2001
- 278
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Determining the Strength of Brittle Thin Films for MEMSJohnson, G. C. / Jones, P. T. / Wu, M.-T. / Honda, T. / American Society for Testing and Materials et al. | 2001
- 293
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Thermomechanical Characterization of Nickel-Titanium-Copper Shape Memory Alloy FilmsSeward, K. P. / Ramsey, P. B. / Krulevitch, P. / American Society for Testing and Materials et al. | 2001
- 306
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Deformation and Stability of Gold/Polysilicon Layered MEMS Plate Structures Subjected to Thermal LoadingDunn, M. L. / Zhang, Y. / Bright, V. M. / American Society for Testing and Materials et al. | 2001
- 318
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The Effects of Radiation on the Mechanical Properties of Polysilicon and Polydiamond Thin FilmsNewton, R. L. / Davidson, J. L. / American Society for Testing and Materials et al. | 2001