Interferometric calibration of microdisplacement actuators [5190-37] (Englisch)
- Neue Suche nach: Picotto, G. B.
- Neue Suche nach: International Society for Optical Engineering
- Neue Suche nach: Picotto, G. B.
- Neue Suche nach: Decker, Jennifer E
- Neue Suche nach: Brown, Nicholas
- Neue Suche nach: International Society for Optical Engineering
In:
Recent developments in traceable dimensional measurements
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355-360
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2003
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Interferometric calibration of microdisplacement actuators [5190-37]
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Beteiligte:
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Kongress:Conference; 2nd, Recent developments in traceable dimensional measurements
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Erschienen in:PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 5190 ; 355-360
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.01.2003
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Format / Umfang:6 pages
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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Principal length specifying parameters of material artifacts, their physical meaning, methods for their measurements, and typical uncertainties [5190-01]Titov, A. / Malinovsky, I. / Massone, C. A. / International Society for Optical Engineering et al. | 2003
- 1
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Principal length specifying parameters of material artifacts, their physical meaning, methods for their measurements, and typical uncertaintiesTitov, Alexander / Malinovsky, Igor / Massone, Carlos A. et al. | 2003
- 14
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Next-generation Kosters interferometer [5190-02]Decker, J. E. / Schodel, R. / Bonsch, G. / International Society for Optical Engineering et al. | 2003
- 14
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Next-generation Kosters interferometerDecker, Jennifer E. / Schodel, Rene / Bonsch, Gerhard et al. | 2003
- 24
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Primary level gauge block interferometers for realization of the SI length unitTitov, Alexaundre / Malinovsky, Igor / Belaidi, H. / Franca, R. S. / Erin, M. et al. | 2003
- 24
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Primary level gauge block interferometers for realization of the SI length unit [5190-03]Titov, A. / Malinovsky, I. / Belaidi, H. / Franca, R. S. / Erin, M. / International Society for Optical Engineering et al. | 2003
- 34
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Minimizing interferometer misalignment errors for measurement of subnanometer length changesSchoedel, Rene / Nicolaus, Arnold / Boensch, Gerhard et al. | 2003
- 34
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Minimizing interferometer misalignment errors for measurement of subnanometer length changes [5190-04]Schodel, R. / Nicolaus, A. / Bonsch, G. / International Society for Optical Engineering et al. | 2003
- 43
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Wringing deformation effects in basic length measurements by optical interferometryTitov, Alexander / Malinovsky, Igor / Massone, Carlos A. et al. | 2003
- 43
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Wringing deformation effects in basic length measurements by optical interferometry [5190-05]Titov, A. / Malinovsky, I. / Massone, C. A. / International Society for Optical Engineering et al. | 2003
- 54
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Low-coherence tandem interferometer for remote calibration of gauge blocksHirai, Akiko / Matsumoto, Hirokazu et al. | 2003
- 54
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Low-coherence tandem interferometer for remote calibration of gauge blocks [5190-06]Hirai, A. / Matsumoto, H. / International Society for Optical Engineering et al. | 2003
- 62
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Issues and advantages of gauge block calibration by mechanical comparisonThalmann, Ruedi / Baechler, Hugo et al. | 2003
- 62
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Issues and advantages of gauge block calibration by mechanical comparison [5190-07]Thalmann, R. / Baechler, H. / International Society for Optical Engineering et al. | 2003
- 70
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Static calibrations of LVDT sensors for traceable gauge blocksTang, Chung-chi / Cheng, Kai-Yu / Huang, Huang-Chi et al. | 2003
- 70
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Static calibrations of LVDT sensors for traceable gauge blocks [5190-08]Tang, C. / Cheng, K.-Y. / Huang, H.-C. / International Society for Optical Engineering et al. | 2003
- 80
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New capabilities of the CEM-TEK 1200 interferometric comparator for calibrating long gauges, step gauges, and now line scales [5190-09]Prieto, E. / Rodriguez, J. / International Society for Optical Engineering et al. | 2003
- 80
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New capabilities of the CEM-TEK 1200 interferometric comparator for calibrating long gauges, step gauges, and now line scalesPrieto, Emilio / Rodriguez, Joaquin et al. | 2003
- 93
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Image processing automatic interferometric calibration system for line scales [5190-10]Gonzalez, H. / Galvan, C. / Munoz, J. A. / International Society for Optical Engineering et al. | 2003
- 93
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Image processing automatic interferometric calibration system for line scalesGonzalez, Hector / Galvan, Carlos / Muñoz, J. A. et al. | 2003
- 103
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Laser interferometer for calibration of a line scale module with analog outputFujima, Ichiro / Fujimoto, Yasuaki / Sasaki, Kaoru / Yoshimori, Hideaki / Iwasaki, Shigeo / Telada, Souichi / Matsumoto, Hirokazu et al. | 2003
- 103
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Laser interferometer for calibration of a line scale module with analog output [5190-11]Fujima, I. / Fujimoto, Y. / Sasaki, K. / Yoshimori, H. / Iwasaki, S. / Telada, S. / Matsumoto, H. / International Society for Optical Engineering et al. | 2003
- 111
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Ultrahigh-resolution Cartesian absolute optical encoder [5190-52]Leviton, D. B. / Kirk, J. / Lobsinger, L. / International Society for Optical Engineering et al. | 2003
- 111
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Ultrahigh-resolution Cartesian absolute optical encoderLeviton, Douglas B. / Kirk, Jeff / Lobsinger, Luke et al. | 2003
- 122
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Line scale comparison Nano3 [5190-12]Bosse, H. / Hassler-Grohne, W. / Flugge, J. / Koning, R. / International Society for Optical Engineering et al. | 2003
- 122
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Line scale comparison Nano3Bosse, Harald / Haessler-Grohne, Wolfgang / Fluegge, Jens / Koening, Rainer et al. | 2003
- 134
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Defining the measurand in radius of curvature measurements [5190-13]Davies, A. / Schmitz, T. L. / International Society for Optical Engineering et al. | 2003
- 134
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Defining the measurand in radius of curvature measurementsDavies, Angela / Schmitz, Tony L. et al. | 2003
- 146
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Angle metrology using AAMACS and two small-angle measurement systemsStone, Jack A. / Amer, Mohamed / Faust, Bryon / Zimmerman, Jay et al. | 2003
- 146
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Angle metrology using AAMACS and two small-angle measurement systems [5190-14]Stone, J. A. / Amer, M. / Faust, B. / Zimmerman, J. / International Society for Optical Engineering et al. | 2003
- 156
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Pitch calibration by reflective laser diffraction [5190-15]Chen, C.-J. / Pan, S.-P. / Chang, L.-C. / Peng, G.-S. / International Society for Optical Engineering et al. | 2003
- 156
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Pitch calibration by reflective laser diffractionChen, Chao-Jung / Pan, Shen-Peng / Chang, Liang-Chih / Peng, Gwo-Sheng et al. | 2003
- 165
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Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applicationsHasche, Klaus / Thomsen-Schmidt, Peter / Krumrey, Michael / Ade, George / Ulm, Gerhard / Stuempel, Juergen / Schaedlich, Stefan / Frank, Wilfried / Procop, Mathias / Beck, Uwe et al. | 2003
- 165
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Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications [5190-16]Hasche, K. / Thomsen-Schmidt, P. / Krumrey, M. / Ade, G. / Ulm, G. / Stuempel, J. / Schaedlich, S. / Frank, W. / Procop, M. / Beck, U. et al. | 2003
- 173
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Developments on the NMi-VSL traceable scanning probe microscope [5190-17]Dirscherl, K. / Koops, K. R. / International Society for Optical Engineering et al. | 2003
- 173
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Developments on the NMi-VSL traceable scanning probe microscopeDirscherl, Kai / Koops, K. R. et al. | 2003
- 178
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Calibration of nanotransducer by a monolithic x-ray interferometer [5190-18]Park, J. W. / Byun, S. H. / Eom, C. I. / International Society for Optical Engineering et al. | 2003
- 178
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Calibration of nanotransducer by a monolithic x-ray interferometerPark, Jin Won / Eom, Cheon Il / Byun, Sang H. et al. | 2003
- 185
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Miniature interferometers for applications in microtechnology and nanotechnology [5190-19]Jager, G. / Manske, E. / Hausotte, T. / Fussl, R. / Grunwald, R. / Buchner, H. / Schott, W. / Dontsov, D. / International Society for Optical Engineering et al. | 2003
- 185
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Miniature interferometers for applications in microtechnology and nanotechnologyJager, Gerd / Manske, Eberhard / Hausotte, Tino / Fußl, Roland / Grunwald, Rainer / Buchner, Hans / Schott, Walter / Dontsov, Denys et al. | 2003
- 193
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Improved shape measurement in optical profilerSchmit, Joanna / Novak, Erik et al. | 2003
- 193
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Improved shape measurement in optical profiler [5190-20]Schmit, J. / Novak, E. / International Society for Optical Engineering et al. | 2003
- 203
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Method for approximate noise elimination in form and roughness measurementsHaitjema, Han / Morel, Michel A. A. et al. | 2003
- 203
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Method for approximate noise elimination in form and roughness measurements [5190-21]Haitjema, H. / Morel, M. A. A. / International Society for Optical Engineering et al. | 2003
- 211
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High-accuracy form measurement of large optical surfacesSchulz, Michael / Geckeler, Ralf D. / Illemann, Jens et al. | 2003
- 211
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High-accuracy form measurement of large optical surfaces [5190-22]Schulz, M. / Geckeler, R. D. / Illemann, J. / International Society for Optical Engineering et al. | 2003
- 221
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Contact model of the probe in form measurement [5190-23]Saenz-Nuno, M. A. / International Society for Optical Engineering et al. | 2003
- 221
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Contact model of the probe in form measurementSaenz-Nuno, Maria A. et al. | 2003
- 232
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Investigation into applying self-calibration techniques to measuring large optical components on a CMM [5190-24]Howick, E. F. / International Society for Optical Engineering et al. | 2003
- 232
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Investigation into applying self-calibration techniques to measuring large optical components on a CMMHowick, Eleanor F. et al. | 2003
- 242
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Canister-free videogrammetry system for thermal vacuum and space applicationsRoose, Stephane / Stockman, Yvan / Bolsee, Jean-Christophe / Doyle, Dominic / Ulbrich, Gerd et al. | 2003
- 242
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Canister-free videogrammetry system for thermal vacuum and space applications [5190-25]Roose, S. / Stockman, Y. / Bolsee, J.-C. / Doyle, D. / Ulbrich, G. / International Society for Optical Engineering et al. | 2003
- 253
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Precision metrology system for the Hubble Space Telescope Wide Field Camera 3 instrumentToland, Ronald W. et al. | 2003
- 253
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Precision metrology system for the Hubble Space Telescope Wide Field Camera 3 instrument [5190-26]Toland, R. W. / International Society for Optical Engineering et al. | 2003
- 265
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Fully traceable miniature CMM with submicrometer uncertaintyLewis, Andrew J. et al. | 2003
- 265
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Fully traceable miniature CMM with submicrometer uncertainty [5190-28]Lewis, A. J. / International Society for Optical Engineering et al. | 2003
- 277
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Measurements of large silicon spheres using the NIST M48 coordinate measuring machineStoup, John / Doiron, Theodore et al. | 2003
- 277
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Measurements of large silicon spheres using the NIST M48 coordinate measuring machine [5190-29]Stoup, J. / Doiron, T. / International Society for Optical Engineering et al. | 2003
- 289
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Extension of traceable calibration for electronic distance measuring instruments beyond the length of the laboratory [5190-30]Forde, L. C. / Howick, E. F. / International Society for Optical Engineering et al. | 2003
- 289
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Extension of traceable calibration for electronic distance measuring instruments beyond the length of the laboratoryForde, Lucy C. / Howick, Eleanor F. et al. | 2003
- 300
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Automated calibration system for laser interferometersTang, Chung-Chi / Cheng, Kai-Yu et al. | 2003
- 300
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Automated calibration system for laser interferometers [5190-31]Tang, C. / Cheng, K.-Y. / International Society for Optical Engineering et al. | 2003
- 308
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High-precision long-distance measurement using a frequency comb of a femtosecond mode-locked laserMatsumoto, Hirokazu / Minoshima, Kaoru / Telada, Souichi et al. | 2003
- 308
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High-precision long-distance measurement using a frequency comb of a femtosecond mode-locked laser [5190-32]Matsumoto, H. / Minoshima, K. / Telada, S. / International Society for Optical Engineering et al. | 2003
- 316
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Acoustic method for the determination of the effective temperature and refractive index of airLassila, Antti / Korpelainen, Virpi et al. | 2003
- 316
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Acoustic method for the determination of the effective temperature and refractive index of air [5190-33]Lassila, A. / Korpelainen, V. / International Society for Optical Engineering et al. | 2003
- 327
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Wavelength-tracking capabilities of a Fabry-Perot cavity [5190-34]Stone, J. A. / Stejskal, A. / International Society for Optical Engineering et al. | 2003
- 327
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Wavelength-tracking capabilities of a Fabry-Perot cavityStone, Jack A. / Stejskal, Alois et al. | 2003
- 339
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Improved second-harmonic two-wavelength interferometer with refractive index correction without effect modulation [5190-35]Bodermann, B. / Flugge, J. / Meiners-Hagen, K. / International Society for Optical Engineering et al. | 2003
- 339
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Improved second-harmonic two-wavelength interferometer with refractive index correction without effect modulationBodermann, Bernd / Flugge, Jens / Meiners-Hagen, Karl et al. | 2003
- 347
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Improving a commercially available heterodyne laser interferometer to sub-nm uncertaintyHaitjema, Han / Cosijns, Suzanne J. A. G. / Roset, N. J. J. / Jansen, Maarten J. et al. | 2003
- 347
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Improving a commercially available heterodyne laser interferometer to sub-nm uncertainty [5190-36]Haitjema, H. / Cosijns, S. J. A. G. / Roset, N. J. J. / Jansen, M. J. / International Society for Optical Engineering et al. | 2003
- 355
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Interferometric calibration of microdisplacement actuatorsPicotto, Gian Bartolo et al. | 2003
- 355
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Interferometric calibration of microdisplacement actuators [5190-37]Picotto, G. B. / International Society for Optical Engineering et al. | 2003
- 361
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Absolute distance measurement with the MSTAR sensorLay, Oliver P. / Dubovitsky, Serge / Peters, Robert D. / Burger, Johan / Ahn, Seh-Won / Steier, William H. / Fetterman, Harold R. / Chang, Yian et al. | 2003
- 361
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Absolute distance measurement with the MSTAR sensor [5190-38]Lay, O. P. / Dubovitsky, S. / Peters, R. D. / Burger, J. / Ahn, S.-W. / Steier, W. H. / Fetterman, H. R. / Chang, Y. / International Society for Optical Engineering et al. | 2003
- 373
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Analytical solution of excess fractions method in absolute distance interferometryAgurok, Ilya P. et al. | 2003
- 373
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Analytical solution of excess fractions method in absolute distance interferometry [5190-39]Agurok, I. P. / International Society for Optical Engineering et al. | 2003
- 381
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Recent work at NML to establish traceability for survey electronic distance measurement (EDM)Brown, Nicholas / Veugen, Rob / van der Beek, Gert-Jan / Hugers, Ronald F. H. et al. | 2003
- 381
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Recent work at NML to establish traceability for survey electronic distance measurement (EDM) [5190-40]Brown, N. / Veugen, R. / van der Beek, G.-J. / Hugers, R. F. H. / International Society for Optical Engineering et al. | 2003
- 391
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Recent activities at PTB nanometer comparatorFlugge, Jens / Koning, Rainer / Bosse, Harald et al. | 2003
- 391
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Recent activities at PTB nanometer comparator [5190-41]Flugge, J. / Koning, R. / Bosse, H. / International Society for Optical Engineering et al. | 2003
- 400
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Automatic high-precision calibration system for angle encoder (II) [5190-42]Watanabe, T. / Fujimoto, H. / Nakayama, K. / Masuda, T. / Kajitani, M. / International Society for Optical Engineering et al. | 2003
- 400
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Automatic high-precision calibration system for angle encoder (II)Watanabe, Tsukasa / Fujimoto, Hiroyuki / Nakayama, Kan / Masuda, Tadashi / Kajitani, Makoto et al. | 2003
- 410
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Traceability in metrology and uncertainty evaluation of a calibration system for GPS receiversLee, Chiung-Wu / Yeh, Ta-Kang / Peng, Gwo-Sheng et al. | 2003
- 410
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Traceability in metrology and uncertainty evaluation of a calibration system for GPS receivers [5190-44]Lee, C.-W. / Yeh, T.-K. / Peng, G.-S. / International Society for Optical Engineering et al. | 2003
- 419
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5-m measurement system for traceable measurements of tapes and rulesYandayan, Tanfer / Ozgur, Bulent et al. | 2003
- 419
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5-m measurement system for traceable measurements of tapes and rules [5190-45]Yandayan, T. / Ozgur, B. / International Society for Optical Engineering et al. | 2003
- 431
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Stability of the reference flat used in Fizeau interferometer and its contribution to measurement uncertaintyTakatsuji, Toshiyuki / Osawa, Sonko / Kuriyama, Yutaka / Kurosawa, Tomizo et al. | 2003
- 431
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Stability of the reference flat used in Fizeau interferometer and its contribution to measurement uncertainty [5190-46]Takatsuji, T. / Osawa, S. / Kuriyama, Y. / Kurosawa, T. / International Society for Optical Engineering et al. | 2003
- 440
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Device for calibration of the height micrometers and the squareness standards [5190-47]Eom, T. B. / International Society for Optical Engineering et al. | 2003
- 440
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Device for calibration of the height micrometers and the squareness standardsEom, Tae Bong et al. | 2003
- 448
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Simple rubidium stabilized diode laser for gauge block interferometerBitou, Youichi / Inaba, Hajime / Onae, Atsushi et al. | 2003
- 448
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Simple rubidium stabilized diode laser for gauge block interferometer [5190-48]Bitou, Y. / Inaba, H. / Onae, A. / International Society for Optical Engineering et al. | 2003
- 456
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Alternative measuring modes for scanning probe instrumentation [5190-50]Koops, K. R. / Dirscherl, K. / International Society for Optical Engineering et al. | 2003
- 456
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Alternative measuring modes for scanning probe instrumentationKoops, K. R. / Dirscherl, Kai et al. | 2003
- 460
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Development of a digital controller for iodine stabilized lasersKoops, K. R. / Bergmans, Robbert / van den Berg, Steven et al. | 2003
- 460
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Development of a digital controller for iodine stabilized lasers [5190-51]Koops, K. R. / Bergmans, R. / van den Berg, S. / International Society for Optical Engineering et al. | 2003
- 468
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Ultrahigh resolution absolute Cartesian electronic autocollimator [5190-53]Leviton, D. B. / International Society for Optical Engineering et al. | 2003
- 468
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Ultrahigh resolution absolute Cartesian electronic autocollimatorLeviton, Douglas B. et al. | 2003