Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems [5641-32] (Englisch)
- Neue Suche nach: Jang, Y.-H.
- Neue Suche nach: Lee, K.-N.
- Neue Suche nach: Shin, D.-S.
- Neue Suche nach: Lee, Y.-S.
- Neue Suche nach: Kim, Y.-K.
- Neue Suche nach: SPIE
- Neue Suche nach: Chinese Optical Society
- Neue Suche nach: Jang, Y.-H.
- Neue Suche nach: Lee, K.-N.
- Neue Suche nach: Shin, D.-S.
- Neue Suche nach: Lee, Y.-S.
- Neue Suche nach: Kim, Y.-K.
- Neue Suche nach: Ma, Zhichun
- Neue Suche nach: Jin, Guofan
- Neue Suche nach: Chen, Xuyuan
- Neue Suche nach: SPIE
- Neue Suche nach: Chinese Optical Society
In:
MEMS/MOEMS technologies and applications II
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102-111
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2004
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems [5641-32]
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Beteiligte:Jang, Y.-H. ( Autor:in ) / Lee, K.-N. ( Autor:in ) / Shin, D.-S. ( Autor:in ) / Lee, Y.-S. ( Autor:in ) / Kim, Y.-K. ( Autor:in ) / Ma, Zhichun / Jin, Guofan / Chen, Xuyuan / SPIE / Chinese Optical Society
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Kongress:Conference; 2nd, MEMS/MOEMS technologies and applications II ; 2004 ; Beijing, China
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Erschienen in:PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 5641 ; 102-111
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.01.2004
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Format / Umfang:10 pages
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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Electromagnetic MEMs eight-channel variable optical attenuator arrayDai, Xuhan / Zhao, Xiaolin / Ding, Guifu / Cai, Bingchu et al. | 2004
- 1
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Electromagnetic MEMs eight-channel variable optical attenuator array (Invited Paper) [5641-01]Dai, X. / Zhao, X. / Ding, G. / Cai, B. / SPIE / Chinese Optical Society et al. | 2004
- 7
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Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applicationsShanmugan, Vicknesh / Shah, Mithilesh A. / Teo, S. L. / Ramam, Akkipeddi et al. | 2004
- 7
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Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications [5641-03]Shanmugan, V. / Shah, M. A. / Teo, S. L. / Ramam, A. / SPIE / Chinese Optical Society et al. | 2004
- 19
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Structure design of Si-based M-Z interference acceleration seismic geophone [5641-05]Wu, B. / Chen, C. / Zhang, X. / Cui, Y. / Ma, G. / Zhang, Y. / Zhong, J. / SPIE / Chinese Optical Society et al. | 2004
- 19
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Structure design of Si-based M-Z interference acceleration seismic geophoneWu, Bo / Chen, Caihe / Zhang, Xiaoling / Cui, Yuming / Ma, Guangpeng / Zhang, Yanjun / Zhong, Juanjuan et al. | 2004
- 26
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Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applicationsShah, Mithilesh A. / Shanmugan, Vicknesh / Ramam, Akkipeddi et al. | 2004
- 26
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Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications [5641-07]Shah, M. A. / Shanmugan, V. / Ramam, A. / SPIE / Chinese Optical Society et al. | 2004
- 37
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The application of laser micromachining technology in fiber optic sensing (Invited Paper) [5641-08]Jiang, D. / Xin, S. / Wei, R. / Huang, J. / SPIE / Chinese Optical Society et al. | 2004
- 37
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The application of laser micromachining technology in fiber optic sensingJiang, Desheng / Xin, Sijin / Wei, Renxuan / Huang, Jun et al. | 2004
- 48
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The study on the compound x-ray refractive lens using LIGA technique [5641-09]Liang, J. / Le, Z. / Peng, L. / Wang, W. / Lan, W. / Ming, A. / Yi, F. / Ye, J. / Quan, B. / Yao, J. et al. | 2004
- 48
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The study on the compound x-ray refractive lens using LIGA techniqueLiang, Jingqiu / Le, Zichun / Peng, Liangqiang / Wang, Weibiao / Lan, Weihua / Ming, Anjie / Yi, Futing / Ye, Jian / Quan, Bisheng / Yao, Jinsong et al. | 2004
- 56
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Silicon scanning mirror with 54.74° slanted reflective surface for fluorescence scanning systemLee, Kook-Nyung / Jang, Yun-Ho / Choi, Jaeho / Kim, Hoseoung / Lee, Yoon-Sik / Kim, Yong-Kweon et al. | 2004
- 56
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Silicon scanning mirror with 54.74^o slanted reflective surface for fluorescence scanning system [5641-10]Lee, K.-N. / Jang, Y.-H. / Choi, J. / Kim, H. / Lee, Y.-S. / Kim, Y.-K. / SPIE / Chinese Optical Society et al. | 2004
- 67
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BioMEMS for high-throughput handling and microinjection of embryosBernstein, Ralph W. / Scott, Matthew / Solgaard, Olav et al. | 2004
- 67
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BioMEMS for high-throughput handling and microinjection of embryos (Invited Paper) [5641-22]Bernstein, R. W. / Scott, M. / Solgaard, O. / SPIE / Chinese Optical Society et al. | 2004
- 74
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Torsion-mirror optical actuators with compound driving structures [5641-23]Wu, W. / Chen, Q. / Yan, G. / Hao, Y. / SPIE / Chinese Optical Society et al. | 2004
- 74
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Torsion-mirror optical actuators with compound driving structuresWu, Wengang / Chen, Qinghua / Yan, Guizhen / Hao, Yilong et al. | 2004
- 82
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A high-g overload-protected accelerometer with a novel microstructureChen, Weiping / Wang, Wei / Tian, Lei / Liu, Xiaowei / Huo, Mingxue / Zhang, Ruichao / Zhang, Deyin et al. | 2004
- 82
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A high-g overload-protected accelerometer with a novel microstructure [5641-26]Chen, W. / Wang, W. / Tian, L. / Liu, X. / Huo, M. / Zhang, R. / Zhang, D. / SPIE / Chinese Optical Society et al. | 2004
- 87
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Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonators [5641-27]Zhang, S. / Liu, Y. / SPIE / Chinese Optical Society et al. | 2004
- 87
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Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonatorsZhang, Shaojun / Liu, Yueming et al. | 2004
- 95
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Polymer-derived ceramics-based fuel atomizersMa, Zhichun / An, Linan / Chen, Xuyuan / Hays, A. et al. | 2004
- 95
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Polymer-derived ceramics-based fuel atomizers (Invited Paper) [5641-30]Ma, Z. / An, L. / Chen, X. Y. / Hays, A. / SPIE / Chinese Optical Society et al. | 2004
- 102
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Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systemsJang, Yun-Ho / Lee, Kook-Nyung / Shin, Dong-Sik / Lee, Yoon-Sik / Kim, Yong-Kweon et al. | 2004
- 102
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Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems [5641-32]Jang, Y.-H. / Lee, K.-N. / Shin, D.-S. / Lee, Y.-S. / Kim, Y.-K. / SPIE / Chinese Optical Society et al. | 2004
- 112
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Microfluidic dye laser integration in a lab-on-a-chip deviceKou, Qingli / Yesilyurt, Ilker / Escalier, Guilhem / Galas, Jean Christophe / Coureau, Laurent / Chen, Yong et al. | 2004
- 112
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Microfluidic dye laser integration in a lab-on-a-chip device [5641-33]Kou, Q. / Yesilyurt, I. / Escalier, G. / Galas, J.-C. / Coureau, L. / Chen, Y. / SPIE / Chinese Optical Society et al. | 2004
- 116
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Origin mechanism of residual stresses in porous silicon film (Invited Paper) [5641-12]Lei, Z. / Kang, Y. / Hu, M. / Qiu, Y. / Cen, H. / SPIE / Chinese Optical Society et al. | 2004
- 116
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Origin mechanism of residual stresses in porous silicon filmLei, Zhenkun / Kang, Yilan / Hu, Ming / Qiu, Yu / Cen, Hao et al. | 2004
- 124
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Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering [5641-13]Zhu, Y. / Gu, P. / Ye, H. / Shen, W. / SPIE / Chinese Optical Society et al. | 2004
- 124
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Optical properties study of silicon oxynitride films deposited by RF magnetron sputteringZhu, Yong / Gu, Peifu / Ye, Hui / Shen, Weidong et al. | 2004
- 130
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Lumped model for the comb-finger capacitance and electrostatic forceChen, Xuyuan / Ma, Zhichun / Jensen, Geir U. et al. | 2004
- 130
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Lumped model for the comb-finger capacitance and electrostatic force [5641-14]Chen, X. Y. / Ma, Z. / Jensen, G. U. / SPIE / Chinese Optical Society et al. | 2004
- 138
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Simulation and comparison of movable membrane design for MEMS Fabry-Perot tunable filter [5641-15]Jiang, W. / Cui, F. / Sun, Y. / SPIE / Chinese Optical Society et al. | 2004
- 138
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Simulation and comparison of movable membrane design for MEMS Fabry-Perot tunable filterJiang, Wei / Cui, Fang / Sun, Yu-nan et al. | 2004
- 145
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The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay [5641-17]Hong, H. / Hu, G. / Chen, G. / Liu, W. / SPIE / Chinese Optical Society et al. | 2004
- 145
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The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelayHong, Huinan / Hu, Guoqing / Chen, Guangwen / Liu, Wenyan et al. | 2004
- 152
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3D align overlay verification using glass wafersSmeets, Eric M. J. / Bijnen, Frans G. C. / Slabbekoorn, John / van Zeijl, Henk W. et al. | 2004
- 152
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3D align overlay verification using glass wafers [5641-18]Smeets, E. M. J. / Bijnen, F. G. C. / Slabbekoorn, J. / van Zeijl, H. W. / SPIE / Chinese Optical Society et al. | 2004
- 163
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Analysis of the structures and characteristics for an InP-based micromechanical tunable filterChen, Bin / Zhou, Zhen / Huang, Yongqing / Ren, Xiaomin et al. | 2004
- 163
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Analysis of the structures and characteristics for an InP-based micromechanical tunable filter [5641-20]Chen, B. / Zhou, Z. / Huang, Y. / Ren, X. / SPIE / Chinese Optical Society et al. | 2004
- 172
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Study on application and analysis of a microaccelerometer with magnetorheological fluidsLin, Zhonghua / Hong, Huinan / Hu, Guoqing / Liu, Wenyan / Zhang, Huijie / Lin, Lingling et al. | 2004
- 172
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Study on application and analysis of a microaccelerometer with magnetorheological fluids [5641-21]Lin, Z. / Hong, H. / Hu, G. / Liu, W. / Zhang, H. / Lin, L. / SPIE / Chinese Optical Society et al. | 2004
- 179
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Development of microfabrication technology for MEMS/MOEMS applications (Invited Paper) [5641-34]Cui, Z. / SPIE / Chinese Optical Society et al. | 2004
- 179
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Development of microfabrication technology for MEMS/MOEMS applicationsCui, Zheng et al. | 2004
- 188
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Two new types of microneedle array fabricated by x-ray lithography [5641-35]Li, Y. / Sugiyama, S. / SPIE / Chinese Optical Society et al. | 2004
- 188
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Two new types of microneedle array fabricated by x-ray lithographyLi, Yigui / Sugiyama, Susumu et al. | 2004
- 196
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Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon methodZhao, Yue / Lai, Jianjun / Zhou, Hong / Yi, Xinjian et al. | 2004
- 196
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Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon method [5641-36]Zhao, Y. / Lai, J. / Zhou, H. / Yi, X. / SPIE / Chinese Optical Society et al. | 2004
- 201
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Electrochemical etching of deep-macropore array on p-type silicon wafers [5641-37]Gao, Y. / Wang, G. / Duanmu, Q. / Tian, J. / SPIE / Chinese Optical Society et al. | 2004
- 201
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Electrochemical etching of deep-macropore array on p-type silicon wafersGao, Yanjun / Wang, Guozheng / Duanmu, Qingduo / Tian, Jingquan et al. | 2004
- 205
-
The microfabrication using powder materials with excimer laserChen, Jimin / Yue, Canfu / Zhang, Yu / Wang, Xubao / Zuo, Tiechuan et al. | 2004
- 205
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The microfabrication using powder materials with excimer laser (Invited Paper) [5641-38]Chen, J. / Yue, C. / Zhang, Y. / Wang, X. / Zuo, T. / SPIE / Chinese Optical Society et al. | 2004
- 211
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Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniquesLiu, Yueming / Esashi, Masayoshi / Tian, Weijian et al. | 2004
- 211
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Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniques [5641-39]Liu, Y. / Esashi, M. / Tian, W. / SPIE / Chinese Optical Society et al. | 2004
- 219
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Microfabrication assisted by laser-trapped microparticle tools [5641-40]Bai, J. / Zhu-ge, Z. / Wang, X. / Hou, X. / Yang, G. / SPIE / Chinese Optical Society et al. | 2004
- 219
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Microfabrication assisted by laser-trapped microparticle toolsBai, Jian / Zhu-ge, Zen-rong / Wang, Xiao-na / Hou, Xiyun / Yang, Guoguang et al. | 2004
- 227
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Fabrication of PDMS (poly-dimethyl siloxane) molding and 3D structure by two-photon absorption induced by an ultrafast laser [5641-41]Yi, S. W. / Lee, S. K. / Cho, M. J. / Kong, H. J. / Yang, D.-Y. / Park, S. / Lim, T. / Kim, R. H. / Lee, K.-S. / SPIE et al. | 2004
- 227
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Fabrication of PDMS (poly-dimethyl siloxane) molding and 3D structure by two-photon absorption induced by an ultrafast laserYi, Shin Wook / Lee, Seong Ku / Cho, Mi Jung / Kong, Hong Jin / Yang, Dong-Yol / Park, Sang-hu / Lim, Tae-woo / Kim, Ran Hee / Lee, Kwang-Sup et al. | 2004
- 238
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Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm [5641-42]Li, M. / Wang, M. / Wang, T. / Rong, H. / Chen, X. / SPIE / Chinese Optical Society et al. | 2004
- 238
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Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragmLi, Ming / Wang, Ming / Wang, Tinting / Rong, Hua / Chen, Xuxing et al. | 2004
- 246
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A novel system to measure MEMS motionLeng, Changlin / Zhang, Guoxiong / Yu, Fusheng / Jiang, Chengzhi / Zhong, Ying et al. | 2004
- 246
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A novel system to measure MEMS motion [5641-19]Leng, C. / Zhang, G. / Yu, F. / Jiang, C. / Zhong, Y. / SPIE / Chinese Optical Society et al. | 2004
- 255
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Theoretical calculation of light-induced forces and torques on complex microrotorsLiu, Yuxiang / Zhu, Anding / Huang, Wenhao et al. | 2004
- 255
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Theoretical calculation of light-induced forces and torques on complex microrotors [5641-47]Liu, Y. / Zhu, A. / Huang, W. / SPIE / Chinese Optical Society et al. | 2004
- 264
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Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technologyCui, Feng / Chen, Wenyuan / Su, Yufeng / Zhang, Weiping / Zhao, Xiaolin et al. | 2004
- 264
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Design of electrostatically levitated micromachined rotational gyroscope based on UVLIGA technology [5641-48]Cui, F. / Chen, W. / Su, Y. / Zhang, W. / Zhao, X. / SPIE / Chinese Optical Society et al. | 2004
- 276
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Parallel valveless micropump with two flexible diaphragms [5641-50]Su, Y. / Chen, W. / Cui, F. / Zhang, W. / SPIE / Chinese Optical Society et al. | 2004
- 276
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Parallel valveless micropump with two flexible diaphragmsSu, Yufeng / Chen, Wenyuan / Cui, Feng / Zhang, Weiping et al. | 2004
- 283
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Theoretical analysis of grating light valveZhang, J. / Fu, H. / Zhu, Y. / Chen, W. / Huang, S. et al. | 2004
- 283
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Theoretical analysis of grating light valve [5641-53]Zhang, J. / Fu, H. / Zhu, Y. / Chen, W. / Huang, S. / SPIE / Chinese Optical Society et al. | 2004
- 289
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Microfluid oscillator based on thermocapillarity [5641-54]Huang, T.-C. / Shen, Y.-B. / Liu, X. / Bai, J. / Hou, X.-Y. / Ye, H. / Lou, D. / SPIE / Chinese Optical Society et al. | 2004
- 289
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Microfluid oscillator based on thermocapillarityHuang, Teng-chao / Shen, Yi-bing / Liu, Xu / Bai, Jian / Hou, Xiyun / Ye, Hui / Lou, Di et al. | 2004
- 294
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Preparation of multimode fiber grating by microprocessing modification and their temperature-sensing properties [5641-55]Xin, S. / Jiang, D. / Li, J. / Huang, J. / SPIE / Chinese Optical Society et al. | 2004
- 294
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Preparation of multimode fiber grating by microprocessing modification and their temperature-sensing propertiesXin, Sijin / Jiang, Desheng / Li, Jianzhi / Huang, Jun et al. | 2004
- 300
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Optimization of torque on an optically driven micromotor by manipulation of the index of refractionWing, Frank M. / Mahajan, Satish / Collett, Walter et al. | 2004
- 300
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Optimization of torque on an optically driven micromotor by manipulation of the index of refraction [5641-56]Wing, F. M. / Mahajan, S. / Collett, W. / SPIE / Chinese Optical Society et al. | 2004
- 309
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Fabrication and application of a novel freestanding stencil bi-material cantilever structure [5641-57]Wang, W. / Chen, D. / Ye, T. / Pan, L. / Zhang, Q. / Wu, X. / SPIE / Chinese Optical Society et al. | 2004
- 309
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Fabrication and application of a novel freestanding stencil bi-material cantilever structureWang, Weibing / Chen, Dapeng / Ye, Tianchun / Pan, Liang / Zhang, Qingchuan / Wu, Xiaoping et al. | 2004
- 316
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X-ray lithography mask fabricated by excimer laser processLi, Yigui / Sugiyama, Susumu et al. | 2004
- 316
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X-ray lithography mask fabricated by excimer laser process [5641-58]Li, Y. / Sugiyama, S. / SPIE / Chinese Optical Society et al. | 2004
- 323
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Study on optical parts of MOEMS optical switch with low-insertion loss [5641-59]Ming, A. / Liang, J. / Lan, W. / Dong, W. / Yao, J. / Wang, W. / Le, Z. / Chen, W. / Wang, L. / SPIE et al. | 2004
- 323
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Study on optical parts of MOEMS optical switch with low insertion lossMing, Anjie / Liang, Jingqiu / Lan, Weihua / Dong, Wei / Yao, Jinsong / Wang, Weibiao / Le, Zichun / Chen, Weiyou / Wang, Lijun et al. | 2004
- 333
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Extraction of exposure modeling parameters of thick resist [5641-61]Liu, C. / Du, J. / Liu, S. / Duan, X. / Luo, B. / Zhu, J. / Guo, Y. / Du, C. / SPIE / Chinese Optical Society et al. | 2004
- 333
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Extraction of exposure modeling parameters of thick resistLiu, Chi / Du, Jinglei / Liu, Shijie / Duan, Xi / Luo, Boliang / Zhu, Jianhua / Guo, Yongkang / Du, Chunlei et al. | 2004
- 344
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Silicon microhole array prepared by ICPDuanmu, Qingduo / Zhang, Anping / Wang, Guozheng / Gao, Yanjun / Li, Ye / Jiang, Delong / Fu, Lichen / Tian, Jingquan et al. | 2004
- 344
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Silicon microhole array prepared by ICP [5641-62]Duanmu, Q. / Zhang, A. / Wang, G. / Gao, Y. / Li, Y. / Jiang, D. / Fu, L. / Tian, J. / SPIE / Chinese Optical Society et al. | 2004
- 348
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Progress in large-range and nanoscale micromotion stageChen, Benyong / Wang, Junru / Lei, Yong et al. | 2004
- 348
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Progress in large-range and nanoscale micromotion stage [5641-64]Chen, B. / Wang, J. / Lei, Y. / SPIE / Chinese Optical Society et al. | 2004
- 354
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A model for the microfabrication with selective laser sintering metal powders [5641-65]Yue, C. / Chen, J. / Zuo, T. / SPIE / Chinese Optical Society et al. | 2004
- 354
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A model for the microfabrication with selective laser sintering metal powdersYue, Canfu / Chen, Jimin / Zuo, Tiechuan et al. | 2004