Design of a micropower generator [5717-29] (Englisch)
- Neue Suche nach: Wen, Z.-Q.
- Neue Suche nach: Wen, Z.-Y.
- Neue Suche nach: Li, X.
- Neue Suche nach: Liu, X.-H.
- Neue Suche nach: Chen, G.
- Neue Suche nach: SPIE-- the International Society for Optical Engineering
- Neue Suche nach: Wen, Z.-Q.
- Neue Suche nach: Wen, Z.-Y.
- Neue Suche nach: Li, X.
- Neue Suche nach: Liu, X.-H.
- Neue Suche nach: Chen, G.
- Neue Suche nach: Henning, Albert K.
- Neue Suche nach: SPIE-- the International Society for Optical Engineering
In:
MEMS/MOEMS components and their applications II
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230-237
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2005
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Design of a micropower generator [5717-29]
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Beteiligte:Wen, Z.-Q. ( Autor:in ) / Wen, Z.-Y. ( Autor:in ) / Li, X. ( Autor:in ) / Liu, X.-H. ( Autor:in ) / Chen, G. ( Autor:in ) / Henning, Albert K. / SPIE-- the International Society for Optical Engineering
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Kongress:Conference; 2nd, MEMS/MOEMS components and their applications II ; 2005 ; San Jose, CA
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Erschienen in:PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 5717 ; 230-237
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.01.2005
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Format / Umfang:8 pages
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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Aerospace applications of MEMSJanson, Siegfried W. et al. | 2005
- 1
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Aerospace applications of MEMS (Invited Paper) [5717-01]Janson, S. W. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 14
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Fabrication and characterization of vertical travel linear microactuatorToda, Risaku / Yang, Eui-Hyeok et al. | 2005
- 14
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Fabrication and characterization of vertical travel linear microactuator [5717-02]Toda, R. / Yang, E.-H. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 21
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Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes [5717-03]Hishinuma, Y. / Yang, E.-H. / Levine, B. M. / Bloemhof, E. E. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 21
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Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopesHishinuma, Yoshikazu / Yang, Eui-Hyeok / Levine, Bruce M. / Bloemhof, Eric E. et al. | 2005
- 30
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MEMS adaptive optics system on multiple telescopes: experimental results [5717-04]Restaino, S. R. / Andrews, J. R. / Wilcox, C. C. / Payne, D. M. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 30
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MEMS adaptive optics system on multiple telescopes: experimental resultsRestaino, Sergio R. / Andrews, Jonathan R. / Wilcox, Christopher C. / Payne, Don M. et al. | 2005
- 36
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Mounting a deformable mirror onto a controllable tip/tilt platform [5717-05]Wilcox, C. C. / Restaino, S. R. / Andrews, J. R. / Payne, D. M. / Teare, S. W. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 36
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Mounting a deformable mirror onto a controllable tip/tilt platformWilcox, Christopher C. / Restaino, Sergio R. / Andrews, Jonathan R. / Payne, Don M. / Teare, Scott W. et al. | 2005
- 43
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Status of the MEMS industryEloy, J. C. / Mounier, E. et al. | 2005
- 43
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Status of the MEMS industry [5717-06]Eloy, J. C. / Mounier, E. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 50
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RF MEMS: status of the industry and roadmaps [5717-07]Bouchaud, J. / Wicht, H. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 50
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RF MEMS: status of the industry and roadmapsBouchaud, Jeremie / Wicht, Henning et al. | 2005
- 55
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Compact and high-accuracy RF MEMS capacitive series devicesRottenberg, Xavier / Nauwelaers, Bart / De Raedt, Walter / Tilmans, Harrie A. C. et al. | 2005
- 55
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Compact and high-accuracy RF MEMS capacitive series devices [5717-08]Rottenberg, X. / Nauwelaers, B. / De Raedt, W. / Tilmans, H. A. C. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 66
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Benzocyclobutene (BCB)-based spiral inductor for wireless applicationLee, Kee-Keun / Kim, Bruce C. et al. | 2005
- 66
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Benzocyclobutene (BCB)-based spiral inductor for wireless application [5717-09]Lee, K.-K. / Kim, B. C. / He, J. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 71
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Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation [5717-10]Stalford, H. L. / Epp, D. S. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 71
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Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuationStalford, Harold L. / Epp, David S. et al. | 2005
- 79
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Optical MEMS: boom, bust, and beyondPayne, Richard S. et al. | 2005
- 79
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Optical MEMS: boom, bust, and beyond (Invited Paper) [5717-11]Payne, R. S. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 89
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Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common process [5717-12]Tsai, C.-C. / Cheng, P.-T. / Tseng, Y.-C. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 89
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Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common processTsai, Chien-Chung / Cheng, Pao-Ting / Tseng, Yao-Chen et al. | 2005
- 99
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Design and fabrication of pitch-tunable blaze gratingYang, Yu-Sheng / Liu, Cheng-Hsien et al. | 2005
- 99
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Design and fabrication of pitch-tunable blaze grating [5717-13]Yang, Y.-S. / Liu, C.-H. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 108
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Large silicon micromirror modeling and fabrication [5717-15]Marchese, A. / Camon, H. / Ganibal, C. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 108
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Large silicon micromirror modeling and fabricationMarchese, Alexandre / Camon, Henri / Ganibal, Christian et al. | 2005
- 117
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Novel Hadamard transform spectrometer realized using a dynamically driven micromirror array as a light modulator [5717-16]Hanf, M. / Schaporin, A. V. / Hahn, R. / Dotzel, W. / Gessner, T. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 117
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Novel Hadamard transform spectrometer realized using a dynamically driven micromirror array as a light modulatorHanf, Marian / Schaporin, Alexey V. / Hahn, Ramon / Doetzel, Wolfram / Gessner, Thomas et al. | 2005
- 127
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Discrete microactuator of arbitrary positioning for linearization of VOA characteristicLee, Jong H. / Kim, Man G. et al. | 2005
- 127
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Discrete microactuator of arbitrary positioning for linearization of VOA characteristic [5717-17]Lee, J. H. / Kim, M. G. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 134
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Fabrication of out-of-plane refractive concave and convex microlens arrays [5717-18]Yang, R. / Soper, S. A. / Wang, W. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 134
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Fabrication of out-of-plane refractive concave and convex microlens arraysYang, Ren / Soper, Steven A. / Wang, Wanjun et al. | 2005
- 142
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Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope [5717-20]Chang, S.-C. S. / Putty, M. W. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 142
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Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscopeChang, Shih-Chia / Putty, Michael W. et al. | 2005
- 155
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Investigation of actuation behavior for microarray thermal actuator based upon electrical analysisTsai, Chien-Chung / Yang, Tsa-Hsien / Huang, Yi-Chao et al. | 2005
- 155
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Investigation of actuation behavior for microarray thermal actuator based upon electrical analysis [5717-21]Tsai, C.-C. / Yang, T.-H. / Huang, Y.-C. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 167
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Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuatorsOlson, Steve / Altemus, Bruce / Sankaran, Balasubramanian / Tokranova, Natalya / Geer, Robert / Castracane, James / Xu, Bai et al. | 2005
- 167
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Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators [5717-22]Olson, S. / Altemus, B. / Sankaran, B. / Tokranova, N. / Geer, R. / Castracane, J. / Xu, B. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 175
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UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications [5717-24]Yang, R. / Jiang, J. / Wang, W. / Meng, W. J. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 175
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UV-LIGA fabrication of microscale two-level mold inserts for MEMS applicationsYang, Ren / Jiang, Jing / Wang, Wanjun / Meng, Wen Jin et al. | 2005
- 185
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Latching shock sensors for health monitoring and quality controlWhitley, Michael R. / Kranz, Michael S. / Kesmodel, Roy / Burgett, Sherrie J. et al. | 2005
- 185
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Latching shock sensors for health monitoring and quality control [5717-25]Whitley, M. R. / Kranz, M. S. / Kesmodel, R. / Burgett, S. J. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 195
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Development of robust self-assembled microvalves for robust hydraulic actuators [5717-26]Li, B. / Gerace, S. / Chen, Q. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 195
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Development of robust self-assembled microvalves for robust hydraulic actuatorsLi, Bo / Gerace, Sal / Chen, Quanfang et al. | 2005
- 204
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Optical and electrodynamic analysis of a novel spatial light modulator [5717-14]Zhang, J. / Fu, H. / Huang, S. / Wu, Y. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 204
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Optical and electrodynamic analysis of a novel spatial light modulatorZhang, Jie / Fu, Hongqiao / Huang, Shanglian / Wu, Yi et al. | 2005
- 211
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Novel high-Q torsion microresonator [5717-27]Apte, P. R. / Gawarikar, A. / Ajishna, G. / Sahoo, S. K. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 211
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Novel high-Q torsion microresonatorApte, Prakash R. / Gawarikar, Anand / Ajishna, G. / Sahoo, Sanjib K. et al. | 2005
- 219
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Compensation of model eye's aberration by using deformable mirrorKawashima, Hiroyuki / Nakanishi, Michiko / Takeda, Noriko / Minegishi, Isao / Kobayashi, Akio et al. | 2005
- 219
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Compensation of model eye's aberration by using deformable mirror [5717-28]Kawashima, H. / Nakanishi, M. / Takeda, N. / Minegishi, I. / Kobayashi, A. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 230
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Design of a micropower generatorWen, Zhong-quan / Wen, Zhi-yi / Li, Xia / Liu, Xue-hua / Chen, Gang et al. | 2005
- 230
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Design of a micropower generator [5717-29]Wen, Z.-Q. / Wen, Z.-Y. / Li, X. / Liu, X.-H. / Chen, G. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 238
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Electrostatic microrelays with adjustable parameters [5717-30]Mukhurov, N. I. / Efremov, G. I. / SPIE-- the International Society for Optical Engineering et al. | 2005
- 238
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Electrostatic microrelays with adjustable parametersMukhurov, Nikolay I. / Efremov, Georgiy I. et al. | 2005