Enabling the Desktop NanoFab with DPN® Pen and Ink Delivery Systems (Englisch)
- Neue Suche nach: Fragala, J.S.
- Neue Suche nach: Shile, R.R.
- Neue Suche nach: Haaheim, J.
- Neue Suche nach: Materials Research Society
- Neue Suche nach: Fragala, J.S.
- Neue Suche nach: Shile, R.R.
- Neue Suche nach: Haaheim, J.
- Neue Suche nach: LaVan, David A.
- Neue Suche nach: Materials Research Society
In:
Microelectromechanical systems, materials and devices
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313-321
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2008
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:Enabling the Desktop NanoFab with DPN® Pen and Ink Delivery Systems
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Beteiligte:Fragala, J.S. ( Autor:in ) / Shile, R.R. ( Autor:in ) / Haaheim, J. ( Autor:in ) / LaVan, David A. / Materials Research Society
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Kongress:Symposium, Microelectromechanical systems, materials and devices ; 2007 ; Boston, MA
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Erschienen in:MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 1052 2008. ; 313-321
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Verlag:
- Neue Suche nach: Materials Research Society
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Erscheinungsort:Warrendale, Pa.
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Erscheinungsdatum:01.01.2008
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Format / Umfang:9 pages
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Anmerkungen:Includes bibliographical references and indexes.
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 3
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A Review of Tension Test Methods for Thin FilmsSharpe, W.N. / Materials Research Society et al. | 2008
- 15
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Reliability of MEMS Materials: Mechanical Characterization of Thin Films Using the Wafer Scale Bulge Test and Improved Microtensile TechniquesGaspar, J. / Schmidt, M. / Held, J. / Paul, O. / Materials Research Society et al. | 2008
- 21
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Fast Characterization of Silicon Membrane Structures by Laser-Doppler VibrometryGerbach, R. / Ebert, M. / Bagdahn, J. / Materials Research Society et al. | 2008
- 29
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MEMS Lubrication: An Atomistic Perspective of a Bound + Mobile LubricantIrving, D.L. / Brenner, D.W. / Materials Research Society et al. | 2008
- 37
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Microstructural and Geometrical Factors Influencing the Mechanical Failure of Polysilicon for MEMSJonnalagadda, K. / Chasiotis, I. / Materials Research Society et al. | 2008
- 47
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Passive Devices for Determining Fracture Strength of MEMS Structural MaterialsKahn, H. / Ballarini, R. / Heuer, A.H. / Materials Research Society et al. | 2008
- 53
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Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline SiliconMiyamoto, K. / Sugano, K. / Tsuchiya, T. / Tabata, O. / Materials Research Society et al. | 2008
- 59
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Indentation Characterization of Fracture Toughness and Interfacial Strength of PECVD Nitrides After Rapid Thermal AnnealingYan, H.-Y. / Ou, K.-S. / Chen, K.-S. / Materials Research Society et al. | 2008
- 65
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A Novel Micro Tensile Testing Instrument with Replaceable Testing Specimen by Parylene Passivation TechniqueLau, Y.-D. / Chang, T.-C. / Hocheng, H. / Chen, R. / Fang, W. / Materials Research Society et al. | 2008
- 73
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Mechanical Stress Sensors for Copper Damascene InterconnectsDelamare, R. / Blayac, S. / Kasbari, M. / Inal, K. / Rivero, C. / Materials Research Society et al. | 2008
- 81
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Elastic and Viscoelastic Characterization of Polydimethylsiloxane (PDMS) for Cell-Mechanics ApplicationsLin, I.-K. / Liao, Y.-M. / Liu, Y. / Chen, K.-S. / Zhang, X. / Materials Research Society et al. | 2008
- 87
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A Direct Method of Determining Complex Depth Profiles of Residual Stresses in Thin Films on a Nanoscale-Mechanics of Residually Stressed SystemsMassl, S. / Keckes, J. / Pippan, R. / Materials Research Society et al. | 2008
- 93
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Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion ImplantationNiklaus, M. / Rosset, S. / Dadras, M. / Dubois, P. / Shea, H.R. / Materials Research Society et al. | 2008
- 99
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C-Axis Oriented ZnO Film by RF Sputtering and Its Integration with MEMS ProcessingChandra, S. / Singh, R. / Materials Research Society et al. | 2008
- 105
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Optimization of the Geometry of the MEMS Electrothermal Actuator to Maximize In-Plane Tip DeflectionKolesar, E.S. / Htun, T. / Least, B. / Tippey, J. / Michalik, J. / Materials Research Society et al. | 2008
- 111
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Aligned Low-Temperature Wafer Bonding for MEMS Manufacturing: Challenges and PromisesDragoi, V. / Matthias, T. / Mittendorfer, G. / Lindner, P. / Materials Research Society et al. | 2008
- 117
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Compressive Stress Accumulation in Composite Nanoporous Gold and Silicone Bilayer Membranes: Underlying Mechanisms and RemediesSeker, E. / Huang, L. / Begley, M.R. / Bart-Smith, H. / Kelly, R.G. / Zangari, G. / Reed, M.L. / Utz, M. / Materials Research Society et al. | 2008
- 123
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Variation in Dislocation Pattern Observed in SCS Films Fractured by Tensile Test: Effects of Film Thickness and Testing TemperatureNakao, S. / Ando, T. / Arai, S. / Saito, N. / Sato, K. / Materials Research Society et al. | 2008
- 129
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Micro-Topography Enhances Directional Myogenic Differentiation of Skeletal Precursor CellsZhao, Y. / Materials Research Society et al. | 2008
- 135
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RF MEMS Behavior, Surface Roughness and Asperity ContactRezvanian, O. / Zikry, M.A. / Brown, C. / Krim, J. / Materials Research Society et al. | 2008
- 141
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The Effect of Hydrophobic Patterning on Micromolding of Aqueous-Derived Silk StructuresTsioris, K. / White, R.D. / Kaplan, D.L. / Wong, P.Y. / Materials Research Society et al. | 2008
- 151
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Fabrication and Characterization of Normal and Shear Stresses Sensitive Tactile Sensors by Using Inclined Micro-Cantilevers Covered with ElastomerSohgawa, M. / Huang, Y.-M. / Noda, M. / Kanashima, T. / Yamashita, K. / Okuyama, M. / Ikeda, M. / Noma, H. / Materials Research Society et al. | 2008
- 157
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Design and Fabrication of an Optical-MEMS SensorMathur, V. / Li, J. / Goodhue, W.D. / Materials Research Society et al. | 2008
- 165
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Relative Resistance Chemical Sensors Built on Microhotplate PlatformsHertz, J.L. / Montgomery, C.B. / Lahr, D.L. / Semancik, S. / Materials Research Society et al. | 2008
- 171
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Novel Differential Surface Stress Sensor for Detection of Chemical and Biological SpeciesKang, K. / Shrotriya, P. / Materials Research Society et al. | 2008
- 179
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Excimer Laser Induced Patterning of PSZT and PLZT FilmsLeech, P.W. / Holland, A.S. / Materials Research Society et al. | 2008
- 185
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Optically Actuated Deformable Micro-Mirrors for Adaptive OpticsRibaudo, T. / Li, J. / Haji-saeed, B. / Khoury, J. / Goodhue, W. / Materials Research Society et al. | 2008
- 191
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High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride FilmsFarrell, R. / Pagan, V.R. / Kabulski, A. / Kuchibhatla, S. / Harman, J. / Kasarla, K.R. / Rodak, L.E. / Hensel, J.P. / Famouri, P. / Korakakis, D. et al. | 2008
- 197
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A Miniature Silicon Condenser Microphone Improved with a Flexure Hinge Diaphragm and a Large Back VolumeKim, H.J. / Lee, S.Q. / Lee, J.W. / Lee, S.K. / Park, K.H. / Materials Research Society et al. | 2008
- 205
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Comparison of 1D and 2D Theories of Thermoelastic Damping in Flexural MicroresonatorsPrabhakar, S. / Vengallatore, S. / Materials Research Society et al. | 2008
- 211
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Compliant MEMS Motion Characterization by NanoindentationChoueifati, J.G. / Lusk, C. / Pang, X. / Volinsky, A.A. / Materials Research Society et al. | 2008
- 217
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Effects of Supercritical Carbon Dioxide on Adhesive Strength Between Micro-Sized Photoresist Patterns and Silicon SubstratesIshiyama, C. / Shibata, A. / Sone, M. / Higo, Y. / Materials Research Society et al. | 2008
- 223
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Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers PerformanceJeanne, E. / Meynier, C. / Teston, F. / Certon, D. / Felix, N. / Roy, M. / Alquier, D. / Materials Research Society et al. | 2008
- 229
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Fabrication of C54-TiSi~2 Thin Films Using Cathodic Arc Deposition and Rapid Thermal AnnealingXia, H. / Knudsen, W.R. / Bergstrom, P.L. / Materials Research Society et al. | 2008
- 235
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New Experimental Approach for Measuring Electrical Contact Resistance with an Accurate Mechanical Actuation, Evaluation of the Performances of Gold Micro-SwitchesSeguineau, C. / Broue, A. / Pennec, F. / Dhennin, J. / Desmarres, J.-M. / Pothier, A. / Lafontan, X. / Ignat, M. / Materials Research Society et al. | 2008
- 241
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A Comparative Study of the Strength of Si, SiN and SiC Used at NanoscalesAlan, T. / Sarro, P.M. / Materials Research Society et al. | 2008
- 247
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Compressive Magnetostriction of FeSm Alloy FilmNakano, R. / Matsumura, Y. / Nishi, Y. / Materials Research Society et al. | 2008
- 253
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Influence of Materials on the Performance Limits of MicroactuatorsSrinivasan, P. / Spearing, S.M. / Materials Research Society et al. | 2008
- 259
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Science and Technology of Piezoelectric/Diamond Hybrid Heterostructures for High Performance MEMS/NEMS DevicesAuciello, O. / Sumant, A. / Hiller, J. / Kabius, B. / Srinivasan, S. / Materials Research Society et al. | 2008
- 265
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Relationship Between Film Stress and Dislocation Microstructure Evolution in Thin FilmsFertig, R.S. / Baker, S.P. / Materials Research Society et al. | 2008
- 271
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Systematic Characterization of DRIE-Based Fabrication Process of Silicon MicroneedlesHeld, J. / Gaspar, J. / Ruther, P. / Hagner, M. / Cismak, A. / Heilmann, A. / Paul, O. / Materials Research Society et al. | 2008
- 277
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Novel Fabrication Process for the Integration of MEMS Devices with Thick Amorphous Soft Magnetic Field ConcentratorsBrugger, S. / Pfleging, W. / Paul, O. / Materials Research Society et al. | 2008
- 285
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Analysis and Measurement of Forces in an Electrowetting-Driven OscillatorCrane, N.B. / Volinsky, A.A. / Ramadoss, V. / Nellis, M. / Mishra, P. / Pang, X. / Materials Research Society et al. | 2008
- 291
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Bottom-Up Fabrication of Individual SnO~2 Nanowires-Based Gas Sensors on Suspended MicromembranesRomano-Rodriguez, A. / Hernandez-Ramirez, F. / Prades, J.D. / Tarancon, A. / Casals, O. / Jimenez-Diaz, R. / Juli, M.A. / Morante, J.R. / Barth, S. / Mathur, S. et al. | 2008
- 297
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Nature-Inspired Microfluidic Manipulation Using Magnetic ActuatorsKhaderi, S.N. / Ioan, D. / Toonder, J.M.J.d. / Onck, P.R. / Materials Research Society et al. | 2008
- 305
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MEMS-Based MHz Silicon Ultrasonic Nozzles for Production of Monodisperse DropsSong, Y.L. / Cheng, C.H. / Wang, N. / Tsai, S.C. / Chou, Y.F. / Lee, C.T. / Tsai, C.S. / Materials Research Society et al. | 2008
- 313
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Enabling the Desktop NanoFab with DPN® Pen and Ink Delivery SystemsFragala, J.S. / Shile, R.R. / Haaheim, J. / Materials Research Society et al. | 2008