X-ray Photoelectron Spectromicroscopy of Doped Silicon Patterns (Englisch)
- Neue Suche nach: Barrett, N.
- Neue Suche nach: Lavayssiere, M.
- Neue Suche nach: Zagonel, L.F.
- Neue Suche nach: Bailly, A.
- Neue Suche nach: Renault, O.
- Neue Suche nach: Barrett, N.
- Neue Suche nach: Lavayssiere, M.
- Neue Suche nach: Zagonel, L.F.
- Neue Suche nach: Bailly, A.
- Neue Suche nach: Renault, O.
- Neue Suche nach: Seiler, David G.
In:
International conference on frontiers of characterization and metrology for nanoelectronics
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99-103
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2009
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:X-ray Photoelectron Spectromicroscopy of Doped Silicon Patterns
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Beteiligte:Barrett, N. ( Autor:in ) / Lavayssiere, M. ( Autor:in ) / Zagonel, L.F. ( Autor:in ) / Bailly, A. ( Autor:in ) / Renault, O. ( Autor:in ) / Seiler, David G.
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Kongress:7th, International conference on frontiers of characterization and metrology for nanoelectronics ; 2009 ; Albany, NY
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Erschienen in:International conference on frontiers of characterization and metrology for nanoelectronics ; 99-103AIP CONFERENCE PROCEEDINGS ; 1173 ; 99-103
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Verlag:
- Neue Suche nach: American Institute of Physics
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Erscheinungsort:Melville
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Erscheinungsdatum:01.01.2009
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Format / Umfang:5 pages
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Anmerkungen:Conference proceedings, Includes bibliographical references and index
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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